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1.发明授权Apparatus for detecting defect in circuit pattern and defect detecting system having the same 有权用于检测电路图案缺陷的装置和具有该缺陷检测系统的缺陷检测系统公开(公告)号：US07129719B2
公开(公告)日：2006-10-31
申请号：US10858166
申请日：2004-06-01
申请人： Boo-Yang Jung , Seong-Young Han , Bruce Kim
发明人： Boo-Yang Jung , Seong-Young Han , Bruce Kim
CPC分类号： G01R31/2853 , G01R31/2896
摘要： Provided is an apparatus for detecting a defect of a circuit pattern which includes a resonator, a first power supply unit connected to one end of the resonator to apply power to the resonator, a probe connected to the other end of the resonator to contact one end of the circuit pattern, a second power supply unit connected to the other end of the circuit pattern to apply a voltage thereto, and a detection portion connected between the resonator and the probe to measure a voltage generated from the circuit pattern and generate a measurement voltage, and determine presence of a defect in the circuit pattern from the measurement voltage.
摘要翻译： 提供了一种用于检测电路图案的缺陷的装置，其包括谐振器，连接到谐振器的一端以向谐振器施加功率的第一电源单元，连接到谐振器的另一端以接触一端的探针 连接到电路图案的另一端以向其施加电压的第二电源单元和连接在谐振器和探头之间的检测部分，以测量从电路图案产生的电压并产生测量电压 并且从测量电压确定电路图案中的缺陷的存在。
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2.发明申请Apparatus for detecting defect in circuit pattern and defect detecting system having the same 有权用于检测电路图案缺陷的装置和具有该缺陷检测系统的缺陷检测系统公开(公告)号：US20050264306A1
公开(公告)日：2005-12-01
申请号：US10858166
申请日：2004-06-01
申请人： Boo-Yang Jung , Seong-Young Han , Bruce Kim
发明人： Boo-Yang Jung , Seong-Young Han , Bruce Kim
CPC分类号： G01R31/2853 , G01R31/2896
摘要： Provided is an apparatus for detecting a defect of a circuit pattern which includes a resonator, a first power supply unit connected to one end of the resonator to apply power to the resonator, a probe connected to the other end of the resonator to contact one end of the circuit pattern, a second power supply unit connected to the other end of the circuit pattern to apply a voltage thereto, and a detection portion connected between the resonator and the probe to measure a voltage generated from the circuit pattern and generate a measurement voltage, and determine presence of a defect in the circuit pattern from the measurement voltage.
摘要翻译： 提供了一种用于检测电路图案的缺陷的装置，其包括谐振器，连接到谐振器的一端以向谐振器施加功率的第一电源单元，连接到谐振器的另一端以接触一端的探针 连接到电路图案的另一端以向其施加电压的第二电源单元和连接在谐振器和探头之间的检测部分，以测量从电路图案产生的电压并产生测量电压 并且从测量电压确定电路图案中的缺陷的存在。
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