Robot pre-positioning in a wafer processing system
    3.
    发明授权
    Robot pre-positioning in a wafer processing system 有权
    机器人预定位于晶圆处理系统中

    公开(公告)号:US06952622B2

    公开(公告)日:2005-10-04

    申请号:US10685683

    申请日:2003-10-14

    IPC分类号: G06F19/00 H01H43/00

    摘要: A wafer cluster tool is described which operates in a regular, periodic fashion. Embodiments of the invention have a periodicity of one sending period. The invention enables the determination of pick-up times for process chambers in the cluster tool, and embodiments of the invention allow the creation and maintenance of an updated timetable. The timetable indicates times when each of the process chambers is to be serviced. These values are updated as the process chambers receive new wafers. Robots in the cluster tool may pre-position themselves in front of modules, or process chambers, to be served. Robot pre-positioning eliminates the wait time of individual modules beyond queue times which have been pre-determined for the modules. This renders the path of the individual robots pre-deterministic, and enables the cluster tool to utilize single gripper robots.

    摘要翻译: 描述了以规则的周期性方式工作的晶片簇工具。 本发明的实施例具有一个发送周期的周期。 本发明能够确定群集工具中的处理室的拾取时间,并且本发明的实施例允许创建和维护更新的时间表。 时间表指示要处理每个处理室的时间。 这些值随着处理室接收新晶片而更新。 集群工具中的机器人可以将自己预先置于要供应的模块或处理室之前。 机器人预定位消除了已经为模块预先确定的队列时间以外的各个模块的等待时间。 这使得各个机器人预先确定性的路径,并使群集工具能够利用单个抓爪机器人。

    PAPER TOWEL CABINET WITH PAPER TOWEL MODULE
    4.
    发明申请
    PAPER TOWEL CABINET WITH PAPER TOWEL MODULE 有权
    纸卷纸箱与纸巾模块

    公开(公告)号:US20110114661A1

    公开(公告)日:2011-05-19

    申请号:US12618653

    申请日:2009-11-13

    申请人: Dikran Babikian

    发明人: Dikran Babikian

    IPC分类号: A47K10/42 A47K10/20

    CPC分类号: A47K10/42

    摘要: A paper towel cabinet includes a first side wall and a second side wall, a pivotally mounted front wall defining a door, a back wall extending between the side walls, and a paper towel tray having an opening to provide access to paper towels. The paper towel cabinet also includes a module assembly comprising a first module having a front surface extending transversely relative to the first side wall and toward the second side wall. When the door is in an open position, the front surface prevents paper towels leaning toward the door from falling out of the cabinet. The cabinet also includes a bar mounted proximate to the opening and having a length extending between the side walls. The bar is positioned between a stack of paper towels and the opening when the stack of paper towels is placed on the paper towel tray.

    摘要翻译: 纸巾柜包括第一侧壁和第二侧壁,限定门的可枢转安装的前壁,在侧壁之间延伸的后壁和具有开口以提供进入纸巾的纸巾托盘。 纸巾柜还包括模块组件,其包括第一模块,第一模块具有相对于第一侧壁横向延伸并朝向第二侧壁的前表面。 当门处于打开位置时,前表面防止靠在门上的纸巾从机柜中脱落。 机柜还包括靠近开口安装的杆,并且具有在侧壁之间延伸的长度。 当将一叠纸巾放置在纸巾托盘上时,该条被定位在一叠纸巾和开口之间。

    Baby changing station
    6.
    发明申请
    Baby changing station 有权
    婴儿换尿布

    公开(公告)号:US20090038079A1

    公开(公告)日:2009-02-12

    申请号:US12221918

    申请日:2008-08-06

    IPC分类号: A47D5/00 A47C16/00

    CPC分类号: A47D5/006 A47D5/003

    摘要: A baby supporting device is provided which includes a frame. The frame includes a first portion for mounting onto a wall and a second portion pivotally coupled to the first portion and rotatable between a first position and a second position. A first stop member extends from the first portion, and a second stop member extends from the second portion, such that when the second stop member engages the first stop member it stops the second portion at the second position. A first surface covers at least a portion of the first portion, and a second surface covers at least a portion of the second portion.

    摘要翻译: 提供了一种婴儿支撑装置,其包括框架。 框架包括用于安装到壁上的第一部分和可枢转地联接到第一部分并且可在第一位置和第二位置之间旋转的第二部分。 第一止挡构件从第一部分延伸,并且第二止挡构件从第二部分延伸,使得当第二止挡构件接合第一止动构件时,第二止挡构件在第二位置处停止第二部分。 第一表面覆盖第一部分的至少一部分,并且第二表面覆盖第二部分的至少一部分。

    Methods and apparatus for dispensing semiconductor processing solutions with multi-syringe fluid delivery systems

    公开(公告)号:US07041172B2

    公开(公告)日:2006-05-09

    申请号:US10372028

    申请日:2003-02-20

    IPC分类号: B05C5/02

    摘要: Methods and apparatus for controllably dispensing photoresist solutions and other fluids in semiconductor manufacturing equipment from an array of syringe-based fluid dispensers. A multi-syringe fluid dispensing system is provided for photoresist coating within a wafer track coating module. The coating module may contain a spin chuck that is positioned within a catch cup. A robotic dispense arm and gripper assembly may be positioned within the coating module for gripping and positioning a fluid syringe. An array of syringes may be stored on a solution tray within the wafer track coating module for holding a plurality of fluid syringes containing photoresist solutions.

    Sensor protector
    8.
    发明授权
    Sensor protector 有权
    传感器保护器

    公开(公告)号:US08631967B2

    公开(公告)日:2014-01-21

    申请号:US13253790

    申请日:2011-10-05

    申请人: Dikran Babikian

    发明人: Dikran Babikian

    IPC分类号: A47K10/00

    摘要: A method for preventing recalibration of an automated product dispenser, a sensor protector for a product dispenser, and a product dispenser including a housing having a sensor area, a capacitive sensor adjacent a first surface of the sensor area of the housing, where the sensor has a target sensing area extending through the first surface and beyond a second surface of the housing opposite the first surface in a direction away from the first surface and a sensor protector which includes a plurality of spaced apart projections extending from the second surface in the direction away from the first surface.

    摘要翻译: 一种用于防止自动产品分配器的重新校准的方法,用于产品分配器的传感器保护器和产品分配器,其包括具有传感器区域的壳体,邻近壳体的传感器区域的第一表面的电容传感器,其中传感器具有 目标感测区域延伸穿过所述第一表面并且超过所述壳体的与所述第一表面相对的第二表面在远离所述第一表面的方向上;以及传感器保护器,所述传感器保护器包括从所述第二表面沿着所述方向远离的多个间隔开的突出部 从第一个表面。

    Automated fluid dispenser
    9.
    发明授权
    Automated fluid dispenser 有权
    自动流体分配器

    公开(公告)号:US08579157B2

    公开(公告)日:2013-11-12

    申请号:US12605258

    申请日:2009-10-23

    IPC分类号: B67D1/00

    摘要: A fluid dispenser is provided. The dispenser includes a reservoir for storing the fluid to be dispensed, an outlet for dispensing the fluid, a pump in the reservoir for pumping the fluid to the outlet, a motor external of the reservoir, and a coupling magnetically transferring a force generated by the motor to the pump for operating the pump for pumping the fluid.

    摘要翻译: 提供流体分配器。 分配器包括用于存储要分配的流体的储存器,用于分配流体的出口,用于将流体泵送到出口的储存器中的泵,储存器外部的马达以及磁耦合地传递由 电机到泵,用于操作泵以泵送流体。

    SENSOR PROTECTOR
    10.
    发明申请
    SENSOR PROTECTOR 有权
    传感器保护器

    公开(公告)号:US20120085776A1

    公开(公告)日:2012-04-12

    申请号:US13253790

    申请日:2011-10-05

    申请人: Dikran Babikian

    发明人: Dikran Babikian

    IPC分类号: B65D83/08 B23P11/00 A47B81/00

    摘要: A method for preventing recalibration of an automated product dispenser, a sensor protector for a product dispenser, and a product dispenser including a housing having a sensor area, a capacitive sensor adjacent a first surface of the sensor area of the housing, where the sensor has a target sensing area extending through the first surface and beyond a second surface of the housing opposite the first surface in a direction away from the first surface and a sensor protector which includes a plurality of spaced apart projections extending from the second surface in the direction away from the first surface.

    摘要翻译: 一种用于防止自动产品分配器的重新校准的方法,用于产品分配器的传感器保护器和产品分配器,其包括具有传感器区域的壳体,邻近壳体的传感器区域的第一表面的电容传感器,其中传感器具有 目标感测区域延伸穿过所述第一表面并且超过所述壳体的与所述第一表面相对的第二表面在远离所述第一表面的方向上;以及传感器保护器,所述传感器保护器包括多个间隔开的突出部,所述突出部沿所述第二表面沿着所述方向远离 从第一个表面。