公开(公告)号：US20210043484A1

公开(公告)日：2021-02-11

申请号：US16942255

申请日：2020-07-29

申请人： BROOKS AUTOMATION, INC.

发明人： Jairo Terra MOURA

IPC分类号： H01L21/67 ,  H01L21/687 ,  B25J13/08 ,  B25J9/16 ,  H04N5/225 ,  G06K9/00 ,  G06K9/62 ,  G06T7/73

摘要： A substrate transport apparatus includes a transport chamber, a drive section, a robot arm, an imaging system with a camera mounted through a mounting interface of the drive section in a predetermined location with respect to the transport chamber and disposed to image part of the arm, and a controller connected to the imaging system and configured to image, with the camera, the arm moving to or in the predetermined location, the controller effecting capture of a first image of the arm on registry of the arm proximate to or in the predetermined location, the controller is configured to calculate a positional variance of the arm from comparison of the first image with a calibration image of the arm, and determine a motion compensation factor changing an extended position of the arm. Each camera effecting capture of the first image is disposed inside the perimeter of the mounting interface.

公开(公告)号：US20200180163A1

公开(公告)日：2020-06-11

申请号：US16787184

申请日：2020-02-11

申请人： Brooks Automation, Inc.

发明人： Ulysses GILCHRIST ,  Jairo Terra MOURA

IPC分类号： B25J15/00 ,  B25J18/00 ,  H01L21/687 ,  H01L21/677

摘要： A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.

公开(公告)号：US20190160690A1

公开(公告)日：2019-05-30

申请号：US16201539

申请日：2018-11-27

申请人： Brooks Automation, Inc.

发明人： Ulysses GILCHRIST ,  Jairo Terra MOURA

IPC分类号： B25J15/00 ,  H01L21/677 ,  B25J18/00 ,  H01L21/687

CPC分类号： B25J15/00 ,  B25J18/00 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68707 ,  H01L21/6875 ,  H01L21/68757 ,  Y10S901/30

摘要： A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.