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公开(公告)号:US20130205805A1
公开(公告)日:2013-08-15
申请号:US13753093
申请日:2013-01-29
IPC分类号: B01D8/00
摘要: A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.
摘要翻译: 冰箱系统或低温泵包括具有至少第一和第二级的第一冰箱和第二冰箱。 限制第一冰箱的第一级与第二冰箱的冷端之间的热耦合,以保持第二冰箱的冷端和第一冰箱的第一级之间的温差。 冰箱系统或低温泵还包括与第二冰箱的冷端热接触的辐射屏蔽,以及与辐射屏蔽隔开并被辐射屏蔽围绕的冷凝表面,并与第二级(例如最冷阶段)热接触, 的第一台冰箱。 受限制的热耦合可以被配置为平衡两个冰箱上的冷却负载。
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公开(公告)号:US20170306939A1
公开(公告)日:2017-10-26
申请号:US15633100
申请日:2017-06-26
摘要: A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.
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公开(公告)号:US20160146200A1
公开(公告)日:2016-05-26
申请号:US15012399
申请日:2016-02-01
发明人: Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, JR.
IPC分类号: F04B37/08
CPC分类号: F04B37/08 , B01D8/00 , Y10T29/49236
摘要: A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
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