公开(公告)号：US20100226629A1

公开(公告)日：2010-09-09

申请号：US12721446

申请日：2010-03-10

申请人： Bulent M. Basol ,  Howard Zolla ,  Mustafa Pinarbasi ,  Gregory Norsworthy

发明人： Bulent M. Basol ,  Howard Zolla ,  Mustafa Pinarbasi ,  Gregory Norsworthy

IPC分类号： F26B3/28 ,  F24F7/00 ,  F26B3/34

CPC分类号： F27B9/045 ,  C23C14/5866 ,  F27B9/063 ,  F27B9/20 ,  F27B9/28 ,  F27B9/36 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/6776 ,  H01L31/0322 ,  Y02E10/541

摘要： Described are roll-to-roll or reel-to-reel thermal or rapid thermal processing tools (reactors) are used to react a precursor layer on a continuous flexible workpiece. Variants of the reactors are described, including a reactor having multiple exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; and a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap. Also described is an exhaust system that separates the Group VIA material vapors from other gaseous species for re-cycling or easy disposal and techniques and apparatus for efficient removal of moisture from the workpiece before processing precursor layer in the RTP tool.

摘要翻译： 描述了卷对卷或卷对卷热或快速热处理工具（反应器）用于使连续柔性工件上的前体层反应。 描述了反应器的变型，包括具有多个排气出口的反应器，该排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 以及包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙。 还描述了一种排气系统，其将VIA族VIA气体物质与其他气态物质分离以进行重新循环或易于处置，以及在RTP工具中处理前体层之前有效去除工件的水分的技术和设备。

公开(公告)号：US20090183675A1

公开(公告)日：2009-07-23

申请号：US12334420

申请日：2008-12-12

申请人： Mustafa Pinarbasi ,  Howard G. Zolla ,  Ying Yu ,  Gregory Norsworthy ,  Jalal Ashjaee ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Howard G. Zolla ,  Ying Yu ,  Gregory Norsworthy ,  Jalal Ashjaee ,  Bulent M. Basol

IPC分类号： B05C13/00

CPC分类号： F27B9/045 ,  F27B9/063 ,  F27B9/20 ,  F27B9/28 ,  F27B9/36 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/67706 ,  H01L21/67721 ,  H01L21/6776 ,  H01L31/0322 ,  Y02E10/541 ,  Y02P70/521

摘要： A roll-to-roll or reel-to-reel RTP tool including a reactor having a continuous insert placed in a primary gap of the reactor is provided. The primary gap of the reactor is defined by peripheral reactor walls including a top reactor wall, a bottom reactor wall and side reactor walls. The continuous insert includes a continuous process gap through which a continuous workpiece travels between an entry opening and an exit opening of the insert. An inner space exists between at least one of the insert walls and at least a portion of the peripheral reactor walls that make up the primary gap. At least one gas inlet is connected to the inner space, and at least one exhaust opening connects the process gap as well as the inner space to outside the reactor and carries any gaseous products to outside the process gap and the primary gap of the reactor. Sealable doors or web valves seal the entrance and the exit of the process gap when needed before or after the process, especially when the continuous workpiece stops moving.

摘要翻译： 提供卷对卷或卷到卷RTP工具，其包括具有放置在反应器的初级间隙中的连续插入物的反应器。 反应器的主要间隙由外围反应器壁限定，包括顶部反应器壁，底部反应器壁和侧壁反应器壁。 连续的插入件包括连续的工件间隙，连续的工件在插入件的进入开口和出口之间行进。 内部空间存在于至少一个插入壁和构成主间隙的外围反应器壁的至少一部分之间。 至少一个气体入口连接到内部空间，并且至少一个排气口将过程间隙以及内部空间连接到反应器外部，并将任何气体产物运送到过程间隙和反应器的初级间隙之外。 密封的门或腹板阀门在工艺之前或之后需要密封过程间隙的入口和出口，特别是当连续工件停止移动时。