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公开(公告)号：US20240025733A1
公开(公告)日：2024-01-25
申请号：US18352357
申请日：2023-07-14
发明人： Andrew HOCKING , Scott A. MILLER
CPC分类号： B81B7/04 , B81B5/00 , B81B3/0051 , B81B2201/042 , B81B2203/0154
摘要： A MEM array may comprise a first stage comprising a first stage reflective surface, and a second stage comprising a second stage reflective surface. The MEM array may comprise a base wafer positioned below the first stage and the second stage; and a first frame pivotally coupled to the first stage. The first frame may be pivotally coupled to a second frame, which may comprise a second frame high aspect ratio (AR) member that may be operable to reduce mechanical motion of the second stage.
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公开(公告)号：US20220227621A1
公开(公告)日：2022-07-21
申请号：US17647670
申请日：2022-01-11
发明人： Scott A. MILLER
摘要： Methods, apparatuses and methods of manufacture are described for a MEMS mirror array with reduced crosstalk. The MEMS mirror array has a plurality of reflective surfaces wherein each reflective surface has a resonant frequency, and further wherein adjacent reflective surfaces do not have the same resonant frequency.
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公开(公告)号：US20230136105A1
公开(公告)日：2023-05-04
申请号：US17937104
申请日：2022-09-30
发明人： Scott A. MILLER
摘要： A mirror array includes a lid, a base, and a movable mirror between the lid and the base. The movable mirror includes a stationary frame including a cavity, a movable frame in the cavity, and a central stage in the cavity. The mirror array also includes a first protrusion on the base wafer. The first protrusion overlaps with the central stage in a first direction.
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公开(公告)号：US20230023348A1
公开(公告)日：2023-01-26
申请号：US17807441
申请日：2022-06-17
发明人： Scott A. MILLER
摘要： Methods, apparatuses, and methods of manufacture are described that provide one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended which reduces moment of inertia during use.
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