公开(公告)号：US20130017315A1

公开(公告)日：2013-01-17

申请号：US13183921

申请日：2011-07-15

申请人： CANFENG LAI ,  DAVID EUGENE ABERLE ,  MICHAEL P. CAMP ,  HENRY BARANDICA ,  MARTIN A. HILKENE ,  MATTHEW D. SCOTNEY-CASTLE ,  JEFFREY TOBIN ,  DOUGLAS H. BURNS ,  LARA HAWRYLCHAK

发明人： CANFENG LAI ,  DAVID EUGENE ABERLE ,  MICHAEL P. CAMP ,  HENRY BARANDICA ,  MARTIN A. HILKENE ,  MATTHEW D. SCOTNEY-CASTLE ,  JEFFREY TOBIN ,  DOUGLAS H. BURNS ,  LARA HAWRYLCHAK ,  PETER I. PORSHNEV

IPC分类号： C23C16/505 ,  C23C16/52 ,  H05H1/46

CPC分类号： H01J37/32082 ,  H01J37/321 ,  H01J37/32155 ,  H01J37/32174

摘要： Methods and apparatus for controlling power distribution in a substrate processing system are provided. In some embodiments, a substrate processing system including a process chamber having a substrate support and a processing region disposed above the substrate support; a first conduit disposed above the processing region to provide a portion of a first toroidal path that extends through the first conduit and across the processing region; a second conduit disposed above the processing region to provide a portion of a second toroidal path that extends through the second conduit and across the processing region; an RF generator coupled to the first and second conduits to provide RF energy having a first frequency to each of the first and second conduits; an impedance matching network disposed between the RF generator and the first and second conduits; and a power divider to control the amount of RF energy provided to the first and second conduits from the RF generator.