公开(公告)号：US20240308129A1

公开(公告)日：2024-09-19

申请号：US18601848

申请日：2024-03-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： YUSHI YAMAKAWA

IPC: B29C59/00 ,  B29C59/02 ,  B32B43/00 ,  H01L21/027

CPC classification number: B29C59/002 ,  B32B43/006 ,  B29C59/026 ,  H01L21/027

Abstract: A processing apparatus configured to separate a multilayer material in which a curable composition is sandwiched between a first member and a second member facing each other, includes a first holding unit configured to suction and hold a first surface of the multilayer material, a second holding unit configured to suction and hold a second surface facing the first surface of the multilayer material, and a deformation mechanism, wherein at least one of the first holding unit and the second holding unit is configured to suction and hold the multilayer material via a flexible member, and wherein the deformation mechanism is configured to deform at least a portion of the flexible member so as to form a start point of separation in the multilayer material.