MEMS LIFETIME ENHANCEMENT
    4.
    发明申请
    MEMS LIFETIME ENHANCEMENT 有权
    MEMS LIFETIME ENMANCEMENT

    公开(公告)号:US20130335878A1

    公开(公告)日:2013-12-19

    申请号:US13916675

    申请日:2013-06-13

    CPC classification number: H01G5/16 B81B7/02 H01G5/18 H01G5/38 H01H59/0009

    Abstract: The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the number of movements of a switching element in the MEMS device. Rather than returning to a ground state between cycles, the switching element can remain in the same state if both cycles necessitate the same capacitance. For example, if in both a first and second cycle, the switching element of the MEMS device is in a state of high capacitance the switching element can remain in place between the first and second cycle rather than move to the ground state. Even if the polarity of the capacitance is different in successive cycles, the switching element can remain in place and the polarity can be switched. Because the switching element remains in place between cycles, the switching element, while having the same finite number of movements, should have a longer lifetime.

    Abstract translation: 本发明一般涉及通过减少MEMS器件中的开关元件的移动次数来增加MEMS器件寿命的方法。 不是在循环之间返回到基态,如果两个循环都需要相同的电容,则开关元件可以保持在相同的状态。 例如,如果在第一和第二周期中,MEMS器件的开关元件处于高电容的状态,则开关元件可以在第一和第二周期之间保持就位而不是移动到基态。 即使电容的极性在连续的循环中不同,开关元件也可以保持在适当的位置,并且可以切换极性。 因为开关元件在周期之间保持原位,所以开关元件虽然具有相同的有限数量的运动,应该具有更长的寿命。

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