公开(公告)号：US20100164381A1

公开(公告)日：2010-07-01

申请号：US12470776

申请日：2009-05-22

申请人： CHIH-CHEN CHANG ,  TUNG-CHUAN WU ,  CHAN-HSING LO ,  CHING-HUEI WU ,  MUH-WANG LIANG ,  FU-CHING TUNG ,  SHIH-CHIN LIN ,  JEN-RONG HUANG

发明人： CHIH-CHEN CHANG ,  TUNG-CHUAN WU ,  CHAN-HSING LO ,  CHING-HUEI WU ,  MUH-WANG LIANG ,  FU-CHING TUNG ,  SHIH-CHIN LIN ,  JEN-RONG HUANG

IPC分类号： H05H1/46

CPC分类号： H05H1/46 ,  H01J37/32192 ,  H01J37/32229

摘要： A long linear-type microwave plasma source using a variably-reduced-height rectangular waveguide as the plasma reactor has been developed. Microwave power is fed from the both sides of the waveguide and is coupled into plasma through a long slot cut on the broad side of the waveguide. The reduced height of the waveguide is variable in order to control the coupling between microwave and plasma so that the plasma uniformity can remain a high quality when extending the length of the linear-type plasma source.

摘要翻译： 已经开发了使用可变降低高度的矩形波导作为等离子体反应器的长线性型微波等离子体源。 微波功率从波导的两侧馈送，并通过在波导的宽侧切割的长槽耦合到等离子体中。 波导的降低的高度是可变的，以便控制微波和等离子体之间的耦合，使得当延伸线性型等离子体源的长度时，等离子体均匀性可以保持高质量。

公开(公告)号：US20090151637A1

公开(公告)日：2009-06-18

申请号：US12129009

申请日：2008-05-29

申请人： CHIH-CHEN CHANG ,  TUNG-CHUAN WU ,  FU-CHING TUNG ,  MUH-WANG LIANG ,  CHING-HUEI WU ,  CHAN-HSING LO ,  TEAN-MU SHEN ,  JUNG-CHEN CHIEN ,  JUNG-CHEN HO

发明人： CHIH-CHEN CHANG ,  TUNG-CHUAN WU ,  FU-CHING TUNG ,  MUH-WANG LIANG ,  CHING-HUEI WU ,  CHAN-HSING LO ,  TEAN-MU SHEN ,  JUNG-CHEN CHIEN ,  JUNG-CHEN HO

IPC分类号： C23C16/00 ,  H01L21/3065

CPC分类号： H05H1/46 ,  H01J37/32192 ,  H01J37/32229 ,  H01J37/32477

摘要： A microwave-excited plasma source using a ridged wave-guide line-type microwave plasma reactor is disclosed. The microwave-excited plasma source comprises a reaction chamber, a ridged wave-guide and a separation plate. The ridged wave-guide is disposed on the reaction chamber, and comprises a frame portion, a ridge portion and a line-shaped slot. The line-shaped slot is disposed on a first side of the frame portion, and the ridge portion facing the line-shaped slot is disposed on a second side of the frame portion. The separation plate is disposed on the line-shaped slot. Moreover, the ridged wave-guide is suitable for concentrating microwave power, which is transmitted to the reaction chamber through the line-shaped slot in order to excite plasma.

摘要翻译： 公开了一种使用脊波导线型微波等离子体反应器的微波激发等离子体源。 微波激发的等离子体源包括反应室，脊波导和分离板。 脊状波导布置在反应室上，包括框架部分，脊部分和线状槽。 线状槽设置在框架部分的第一侧上，并且面向线状槽的脊部设置在框架部分的第二侧上。 分隔板设置在线状槽上。 此外，脊状波导适用于集中微波功率，其通过线状槽传输到反应室以激发等离子体。

公开(公告)号：US20100141147A1

公开(公告)日：2010-06-10

申请号：US12425154

申请日：2009-04-16

申请人： CHIH-CHEN CHANG ,  TUNG-CHUAN WU ,  CHAN-HSING LO ,  CHING-HUEI WU ,  JEN-RONG HUANG ,  MUH-WANG LIANG ,  CHIA-HAO CHANG

发明人： CHIH-CHEN CHANG ,  TUNG-CHUAN WU ,  CHAN-HSING LO ,  CHING-HUEI WU ,  JEN-RONG HUANG ,  MUH-WANG LIANG ,  CHIA-HAO CHANG

IPC分类号： H05H1/24

CPC分类号： H05H1/46 ,  H01J37/32091 ,  H01J37/32174

摘要： A capacitively coupled plasma (CCP) generator with two input ports, which is especially used as a large-area capacitively coupled plasma (CCP) generator. In the inventive CCP generator, only a RF power supply is required to provide the two input ports with RF power. The input impedance at each of the input ports is adjustable so that the standing wave between two rectangular electrodes can be eliminated to achieve plasma uniformity.

摘要翻译： 具有两个输入端口的电容耦合等离子体（CCP）发生器，其特别用作大面积电容耦合等离子体（CCP）发生器。 在本发明的CCP发生器中，仅需要RF电源来为两个输入端口提供RF功率。 在每个输入端口处的输入阻抗是可调节的，使得可以消除两个矩形电极之间的驻波以实现等离子体均匀性。

公开(公告)号：US20110225765A1

公开(公告)日：2011-09-22

申请号：US12873600

申请日：2010-09-01

申请人： CHUN-HSIEN LIU ,  YA-HUI TSAI ,  TUNG-CHUAN WU ,  LAI-SHENG CHEN

发明人： CHUN-HSIEN LIU ,  YA-HUI TSAI ,  TUNG-CHUAN WU ,  LAI-SHENG CHEN

IPC分类号： A47L9/00

CPC分类号： A47L9/165 ,  A47L9/1666 ,  A47L2201/00 ,  A47L2201/06

摘要： The present invention provides a suction cleaning module comprising: a first housing, a second housing, a third housing and a fan blower. The second housing, connected to the bottom of the first housing, has a shell section such that a suction channel is formed between the shell section and the first housing and has a dust collection space communicating with the suction channel. The third housing, respectively coupled to the first and second housing, has a filtered flow outlet. The fan blower connected to the third housing has a flow inlet and a flow inlet corresponding to the filtered flow outlet.

摘要翻译： 本发明提供一种抽吸清洁模块，包括：第一壳体，第二壳体，第三壳体和风扇鼓风机。 连接到第一壳体的底部的第二壳体具有外壳部分，使得在壳体部分和第一壳体之间形成吸入通道，并且具有与吸入通道连通的灰尘收集空间。 分别耦合到第一和第二壳体的第三壳体具有过滤的流出口。 连接到第三壳体的鼓风机具有与过滤流出口对应的流入口和流入口。

公开(公告)号：US20090151466A1

公开(公告)日：2009-06-18

申请号：US12053390

申请日：2008-03-21

申请人： TUNG-CHUAN WU ,  SHUO-HUNG CHANG ,  LAI-SHENG CHEN CHEN ,  YEN-CHIEH MAO

发明人： TUNG-CHUAN WU ,  SHUO-HUNG CHANG ,  LAI-SHENG CHEN CHEN ,  YEN-CHIEH MAO

IPC分类号： G01L1/20 ,  F16B31/02

CPC分类号： G01L5/24 ,  F16B31/025

摘要： A fixing element and inspection system for examining the status of the fixing element are provided in the present invention. The fixing has a sensing material disposed therein for transforming the force acting on the fixing element into an electrical signal. A signal processing unit, powered by a radio frequency circuit, is coupled to the sensing material for transforming the electrical signal into a readable signal and then transmitting the readable signal to the inspection system through radio frequency so as to monitor the status of the fixing element. By means of the present invention, it is capable of inspecting and monitoring the status of a great amount of fixing elements rapidly and precisely, especially in occasion that extreme safety should be highly concerned, for example, fixing elements secured to the airplane.

摘要翻译： 在本发明中提供了用于检查固定元件的状态的固定元件和检查系统。 固定件具有设置在其中的传感材料，用于将作用在固定元件上的力变换成电信号。 由射频电路供电的信号处理单元耦合到感测材料，用于将电信号变换成可读信号，然后通过射频将可读信号发送到检查系统，以便监视固定元件的状态 。 通过本发明，能够快速，精确地检查和监视大量的固定元件的状态，特别是在高度关注极端安全的情况下，例如固定在飞机上的固定元件。