公开(公告)号：US20120028011A1

公开(公告)日：2012-02-02

申请号：US12879578

申请日：2010-09-10

Applicant: CHONG Pyung An ,  Mark Alejandro Quesada

Inventor： CHONG Pyung An ,  Mark Alejandro Quesada

IPC: B32B7/02 ,  B29C35/08 ,  C23C14/34 ,  B05D3/04

CPC classification number: C23C14/087 ,  C03C3/247 ,  C03C8/08 ,  C03C17/3411 ,  C03C17/3417 ,  C03C2218/322 ,  C23C14/086 ,  C23C14/5853 ,  H01L51/5253 ,  Y10T428/24942 ,  Y10T428/2495

Abstract: A hermetic thin film includes a first inorganic layer and a second inorganic layer contiguous with the first inorganic layer, wherein the second inorganic layer is formed as a reaction product of the first inorganic layer with oxygen and has a molar volume that is about −1% to 15% greater than a molar volume of the first inorganic layer. An equilibrium thickness of the second inorganic layer is at least 10% of but less than an as-deposited thickness of the first inorganic layer.

Abstract translation: 密闭薄膜包括与第一无机层邻接的第一无机层和第二无机层，其中第二无机层形成为第一无机层与氧的反应产物，其摩尔体积为约-1％ 比第一无机层的摩尔体积大15％。 第二无机层的平衡厚度为第一无机层的沉积厚度的至少10％但小于其沉积厚度。