MICRO-CHANNEL STRUCTURE, SENSOR, MICRO-FLUIDIC DEVICE, LAB-ON-CHIP DEVICE, AND METHOD OF FABRICATING MICRO-CHANNEL STRUCTURE

    公开(公告)号:US20210331167A1

    公开(公告)日:2021-10-28

    申请号:US16475035

    申请日:2018-08-01

    IPC分类号: B01L3/00 G01N27/414

    摘要: The present application provides a micro-channel structure. The micro-channel structure includes a base substrate; a rail layer on the base substrate and including a first rail and a second rail spaced apart from each other; and a wall layer on a side of the rail layer distal to the base substrate, and including a first wall and a second wall at least partially spaced apart from each other, thereby forming a micro-channel between the first wall and the second wall. The micro-channel has an extension direction along a plane substantially parallel to a main surface of the base substrate, the extension direction being substantially parallel to extension directions of the first rail and the second rail along the plane substantially parallel to the main surface of the base substrate.