公开(公告)号：US20140034684A1

公开(公告)日：2014-02-06

申请号：US14047895

申请日：2013-10-07

Applicant: CKD CORPORATION ,  GIGAPHOTON, INC.

Inventor： Takanobu ISHIHARA ,  Hiroshi ITAFUJI

IPC: H05G2/00

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.

Abstract translation: 目标供给装置包括用于储存液体目标材料的罐，用于在罐中输出液体目标材料的喷嘴和用于将气体供应到罐中的气体供应源，并且以 从设置有压力调节器的气体供给源供给的气体。 目标供给装置还包括其一端连接到罐并且另一端形成排气口的减压气体通道，设置在减压气体通道上的减压阀，以及用于控制开路的控制器 /关闭减压阀。 当目标材料不从喷嘴输出时，控制器打开减压阀并降低罐内的压力。

公开(公告)号：US20130081733A1

公开(公告)日：2013-04-04

申请号：US13630987

申请日：2012-09-28

Applicant: CKD CORPORATION

Inventor： Masayuki KOUKETSU ,  Hiroshi ITAFUJI

IPC: F16L55/00

CPC classification number: B01B1/005

Abstract: A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The appartus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface and a guiding member that is provided to contact an opposite side of the mesh form body to the main body side.

Abstract translation: 控制液体扩​​散的液体控制装置具有主体，该主体具有供应对象表面，液体被供应到主体表面。 该配件还具有网状物体，其被编织成网状并且被设置成接触供体对象表面，以及引导构件，其设置成与网状体相对的一侧接触主体侧。

公开(公告)号：US20130313458A1

公开(公告)日：2013-11-28

申请号：US13957299

申请日：2013-08-01

Applicant: CKD CORPORATION

Inventor： Masayuki KOUKETSU ,  Hiroshi ITAFUJI

IPC: F16K3/06

CPC classification number: F16K3/06 ,  F16J1/01 ,  F16K31/1262 ,  F16K51/02 ,  H01L21/67017

Abstract: A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.

Abstract translation: 连接在真空室和真空泵之间的真空控制阀包括具有形成在真空流路中的阀座的控制阀主体，通过执行线性运动来调节升程来操纵阀开口的阀体，杆 其从产生驱动力的线性驱动单元传递驱动力，在允许杆滑动的同时密封真空流路的滑动/密封构件以及覆盖杆的滑动范围的圆筒构件。 滑动范围包括从阀体流路侧向外侧移动的范围。 圆柱形构件具有外周面，外周面的每单位面积的工作流体吸收量小于杆的外表面的工作流体吸收量。

公开(公告)号：US20130193230A1

公开(公告)日：2013-08-01

申请号：US13752232

申请日：2013-01-28

Applicant: CKD CORPORATION

Inventor： Masayuki KOUKETSU ,  Hiroshi ITAFUJI

IPC: B05B9/03

CPC classification number: B05B9/03 ,  B01B1/005 ,  B01D1/14

Abstract: A liquid control apparatus 30 controls a spread mode of a liquid. The liquid control apparatus 30 includes a main body 31 having an upper surface 31c to which the liquid is supplied, and a mesh 47 knitted in a net-like shape and provided to be in contact with the upper surface 31c. An inhibiting groove 41 is provided in the upper surface 31c in a portion that is in contact with the mesh 47. An introducing port 33b for introducing a gas from the inside of the main body 31 into the inhibiting groove 41 is provided in the main body 31. The introducing port 33b is formed such that the gas is introduced into the inhibiting groove 41 substantially parallel to the upper surface 31c.

Abstract translation: 液体控制装置30控制液体的扩散模式。 液体控制装置30包括主体31，主体31具有供给液体的上表面31c和网状47，网47形成为与上表面31c接触。 在上表面31c中设置有与网47接触的部分的抑制槽41.用于将主体31内部的气体引入抑制槽41的引入口33b设置在主体 引入口33b形成为使得气体基本上平行于上表面31c引入到抑制槽41中。

公开(公告)号：US20160029470A1

公开(公告)日：2016-01-28

申请号：US14875166

申请日：2015-10-05

Applicant: Gigaphoton, Inc. ,  CKD Corporation

Inventor： Takanobu ISHIHARA ,  Hiroshi ITAFUJI

IPC: H05G2/00

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.

Abstract translation: 目标供给装置包括用于储存液体目标材料的罐，用于在罐中输出液体目标材料的喷嘴和用于将气体供应到罐中的气体供应源，并且以 从设置有压力调节器的气体供给源供给的气体。 目标供给装置还包括其一端连接到罐并且另一端形成排气口的减压气体通道，设置在减压气体通道上的减压阀，以及用于控制开路的控制器 /关闭减压阀。 当目标材料不从喷嘴输出时，控制器打开减压阀并降低罐内的压力。

公开(公告)号：US20150033941A1

公开(公告)日：2015-02-05

申请号：US14519426

申请日：2014-10-21

Applicant: CKD CORPORATION

Inventor： Masayuki KOUKETSU ,  Hiroshi ITAFUJI

IPC: F16J1/01

CPC classification number: F16J1/01 ,  F15B15/1461 ,  F16K31/1221 ,  F16K41/04 ,  F16K51/02 ,  G05D16/10 ,  G05D16/2013

Abstract: A linear actuator is used with a vacuum chamber in which plasma is generated. The linear actuator comprises a moving member extending between the exterior and the interior of the vacuum chamber through an opening provided in the vacuum chamber so as to be rectilinearly reciprocated, a drive section configured to reciprocate the moving member, a cover that covers the moving member, and a slide seal section that provides a seal between the interior and the exterior of the vacuum chamber while allowing the cover to slide thereon. The cover covers a range of the moving member which is moved into both of the interior and the exterior of the vacuum chamber while the moving member is reciprocated by the drive section, and an outer surface of the cover is smaller in the amount of gas adsorption per unit area than an outer surface of the moving member.

Abstract translation: 线性致动器与其中产生等离子体的真空室一起使用。 线性致动器包括通过设置在真空室中的开口在真空室的外部和内部之间延伸以便直线往复运动的移动构件，构造成使移动构件往复移动的驱动部分，覆盖移动构件的盖 以及滑动密封部分，其在允许盖在其上滑动的同时在真空室的内部和外部之间提供密封。 盖子覆盖移动部件的范围，移动部件移动到真空室的内部和外部，同时移动部件通过驱动部分往复运动，并且盖子的外表面的气体吸附量较小 每单位面积比移动构件的外表面。

公开(公告)号：US20140007958A1

公开(公告)日：2014-01-09

申请号：US14024458

申请日：2013-09-11

Applicant: CKD CORPORATION

Inventor： Hiroshi ITAFUJI ,  Masayuki KOUKETSU

IPC: F16K27/00

CPC classification number: F16K27/003 ,  F16K27/0236 ,  Y10T137/4259 ,  Y10T137/8158 ,  Y10T137/87249 ,  Y10T137/87925

Abstract: A chemical liquid circuit apparatus includes a main circuit member, a sub-circuit member, and a frame member. The main circuit member has a chemical liquid channel for flowing a chemical fluid, and a main opening formed on an end of the chemical liquid channel. The sub-circuit member is mounted on and in contact with the main circuit member and applies a first load to the main circuit member. The sub-circuit member has a sealing surface for sealing the main opening from outside of the apparatus. The frame member has a storing portion for storing the main circuit member, and a connecting opening disposed in a position in communication with the main opening of the main circuit member stored in the storing portion. The shape of the frame member allows a reaction force of the first load to be transferred from the storing portion to the main circuit member.

Abstract translation: 化学液体回路装置包括主电路部件，副电路部件和框架部件。 主电路构件具有用于使化学流体流动的药液通道和形成在药液通道的端部上的主开口。 副电路构件安装在主电路构件上并与主电路构件接触，并向主电路构件施加第一负载。 副回路构件具有用于从设备外部密封主开口的密封表面。 框架构件具有用于存储主电路构件的存储部分和设置在与存储在存储部分中的主电路构件的主开口连通的位置的连接开口。 框架构件的形状允许第一负载的反作用力从存储部分传递到主电路构件。

公开(公告)号：US20130298834A1

公开(公告)日：2013-11-14

申请号：US13945710

申请日：2013-07-18

Applicant: CKD CORPORATION

Inventor： Masayuki KOUKETSU ,  Hiroshi ITAFUJI

IPC: C23C16/448 ,  B01F3/02

CPC classification number: C23C16/4482 ,  B01B1/00 ,  B01B1/005 ,  B01D1/14 ,  B01F3/022 ,  C23C14/24 ,  H01L21/67017

Abstract: A liquid vaporizer is configured to vaporize a liquid reagent and mix the vaporized liquid reagent with a gaseous medium. The liquid vaporizer is equipped with a main vaporizer body having a mixed gas generating space, and a vaporizing unit disposed inside the mixed gas generating space. The vaporizing unit has a vaporizing unit main body having a vaporization surface and a net-shaped body formed in a planar shape by knitting wires regularly in a net-like shape. The net-shaped body forms a plurality of mesh spaces surrounded by the wires and arranged regularly in the in-plane direction. The vaporizing unit forms a plurality of liquid reagent supply spaces surrounded by the wires and the vaporization surface as a result of the net-shaped body and the vaporization surface being abutted against each other. The liquid reagent supply spaces are arranged regularly in the in-plane direction of the net-shaped body.

Abstract translation: 液体蒸发器被配置为蒸发液体试剂并将气化液体试剂与气体介质混合。 液体蒸发器配备有具有混合气体发生空间的主蒸发器主体和设置在混合气体生成空间内的蒸发单元。 蒸发单元具有蒸发表面的蒸发单元主体和通过以网状形状规则地编织线形成为平面形状的网状体。 网状体形成由电线包围的多个网状空间，并且在面内方向规则地配置。 由于网状体和蒸发面彼此抵接，蒸发单元形成由线和蒸发表面包围的多个液体试剂供应空间。 液体试剂供给空间在网状体的面内方向上规则地配置。

公开(公告)号：US20210371964A1

公开(公告)日：2021-12-02

申请号：US17286598

申请日：2019-10-28

Applicant: Tokyo Electron Limited ,  CKD Corporation

Inventor： Yoshiyuki KOBAYASHI ,  Hiroshi ITAFUJI

IPC: C23C4/134 ,  B05B7/14 ,  B05B7/22 ,  B65G53/66

Abstract: A powder feeder according to one aspect of the present disclosure is a powder feeding device that feeds powder from a feeder to a nozzle. The powder feeding device includes a cartridge configured to store the powder in an airtight condition, and includes the feeder. The cartridge includes a port from which the powder is stored and withdrawn, and an open/close valve for opening and closing the port. The feeder includes a connection portion to which the cartridge is removably connected, a supply port configured to supply the powder in the cartridge connected to the connection portion into the feeder, and an opening/closing valve for opening and closing the supply port. The feeder is configured to insert the powder supplied from the supply port to the feeder into the nozzle, and the cartridge and the feeder are configured to form an enclosed space between the port and the supply port in response to the cartridge being connected to the connection portion.

公开(公告)号：US20140030480A1

公开(公告)日：2014-01-30

申请号：US14042553

申请日：2013-09-30

Applicant: CKD Corporation

Inventor： Shinichi NITTA ,  Hiroshi ITAFUJI

IPC: B32B7/12

CPC classification number: B32B7/12 ,  F04B43/02 ,  F04B43/021 ,  F04B43/04 ,  F16J3/02 ,  F16K7/12 ,  Y10T428/24331 ,  Y10T428/24752 ,  Y10T428/31678

Abstract: This invention provides a multi-layer diaphragm which is for use in fluid devices and has excellent maintainability in addition to both operability and pressure resistance. This multi-layer diaphragm is provided with a first and second plate and with an elastic adhesive layer which binds together the first and second metal plates. The elastic adhesive layer has an elastic layer that is elastic in a direction which offsets the first and second metal plates from one another in the in-plane direction. The multi-layer diaphragm is provided with a metal mounting plate which, provided in a position allowing protrusion beyond the first and second metal plates in the outer edge direction, has a mounting unit for mounting to the fluid device.

Abstract translation: 本发明提供一种用于流体装置的多层隔膜，除了可操作性和耐压性之外，还具有优异的可维护性。 该多层隔膜设置有第一和第二板，并且具有将第一和第二金属板结合在一起的弹性粘合剂层。 弹性粘合剂层具有弹性层，该弹性层沿使得第一和第二金属板在面内方向彼此偏移的方向具有弹性。 多层隔膜设置有金属安装板，该金属安装板设置在允许在第一金属板和第二金属板之间在外边缘方向上突出的位置，具有用于安装到流体装置的安装单元。