Broadband, common-path, interferometric wavefront sensor
    1.
    发明授权
    Broadband, common-path, interferometric wavefront sensor 有权
    宽带,公共路径,干涉波前传感器

    公开(公告)号:US09063002B2

    公开(公告)日:2015-06-23

    申请号:US13747235

    申请日:2013-01-22

    CPC classification number: G01J9/0215 G01J9/00 G01J9/02 G01J2009/0226

    Abstract: Hybrid sensors comprising Shack-Hartmann Wavefront Sensor (S-HWFS) and Zernike Wavefront Sensor (Z-WFS) capabilities are presented. The hybrid sensor includes a Z-WFS optically arranged in-line with a S-HWFS such that the combined wavefront sensor operates across a wide dynamic range and noise conditions. The Z-WFS may include the ability to introduce a dynamic phase shift in both transmissive and reflective modes.

    Abstract translation: 提出了包括Shack-Hartmann波前传感器(S-HWFS)和Zernike波前传感器(Z-WFS)功能的混合传感器。 混合传感器包括与S-HWFS成线性配置的Z-WFS,使得组合的波前传感器在宽动态范围和噪声条件下工作。 Z-WFS可以包括在透射和反射模式中引入动态相移的能力。

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