公开(公告)号：US09989754B2

公开(公告)日：2018-06-05

申请号：US14383628

申请日：2013-02-28

申请人： Carl Zeiss Microscopy GmbH

发明人： Tiemo Anhut ,  Daniel Schwedt ,  Ralf Wolleschensky ,  Lars-Christian Wittig ,  Ulrich Preiβer

IPC分类号： G02B26/02 ,  G02B21/00 ,  G01N21/64 ,  H04N5/232

CPC分类号： G02B26/02 ,  G01N21/6458 ,  G02B21/0032 ,  G02B21/0064 ,  G02B21/0076 ,  G02B21/008 ,  G02B2207/113 ,  H04N5/23296

摘要： A light scanning microscope with an illumination module switchable between an illumination with m number of spots and an illumination with n number of spots, a deflecting unit which moves the m or n spots in a predetermined sample region, and a detector module for confocal and spectrally resolved detection of the sample radiation. The detector module has a confocal diaphragm unit, a splitting unit which is arranged downstream of the confocal diaphragm unit, a detector, and an imaging unit which images the partial beams on the detector in a spatially separated manner. The confocal diaphragm unit is switchable between a confocal diaphragm with exactly m apertures for m-spot illumination and a confocal diaphragm with n apertures for n-spot illumination. The splitting unit has a first beam path for m-spot illumination and a second beam path for n-spot illumination. The splitting unit is switchable between the two beam paths.