公开(公告)号：US20220277927A1

公开(公告)日：2022-09-01

申请号：US17663323

申请日：2022-05-13

Applicant: Carl Zeiss MultiSEM GmbH

Inventor： Stefan Schubert ,  Dieter Schumacher ,  Erik Essers ,  Ingo Mueller ,  Arne Thoma ,  Joerg Jacobi ,  Wilhelm Bolsinger ,  Dirk Zeidler

IPC: H01J37/28 ,  H01J37/317 ,  H01J37/147 ,  H01J37/04 ,  H01J37/244

Abstract: A particle beam system, such as a multi-beam particle microscope, includes a multi-beam deflection device and a beam stop. The multi-beam deflection device is arranged in the particle-optical beam path downstream of the multi-beam generator and upstream of the beam switch of the particle beam system. The multi-beam deflection device serves collectively blanks a multiplicity of charged individual particle beams. These impinge on a beam stop, which is arranged in the particle-optical beam path level with a site at which a particle beam diameter is reduced or is at a minimum. By way of example, such sites are the cross-over plane of the individual particle beams or an intermediate image plane. Associated methods for operating the particle beam system and associated computer program products are disclosed.