Integrated Circuit Micro-Cooler with Double-Sided Tubes of a CNT Array
    3.
    发明申请
    Integrated Circuit Micro-Cooler with Double-Sided Tubes of a CNT Array 审中-公开
    具有CNT阵列双面管的集成电路微型冷却器

    公开(公告)号:US20070114658A1

    公开(公告)日:2007-05-24

    申请号:US11532894

    申请日:2006-09-18

    IPC分类号: H01L23/34

    摘要: Heat sink structures employing carbon nanotube or nanowire arrays exposed from both opposite surfaces of the structure to reduce the thermal interface resistance between an integrated circuit chip and the heat sink are disclosed. In one embodiment, the nanotubes are cut to essentially the same length over the surface of the structure. Carbon nanotube arrays are combined with a thermally conductive metal filler disposed between the nanotubes. This structure produces a thermal interface with high axial and lateral thermal conductivities.

    摘要翻译: 公开了使用从结构的两个相对表面暴露的碳纳米管或纳米线阵列以降低集成电路芯片和散热器之间的热界面电阻的散热结构。 在一个实施例中,在结构的表面上将纳米管切割成基本相同的长度。 碳纳米管阵列与布置在纳米管之间的导热金属填料结合。 该结构产生具有高轴向和横向热导率的热界面。