公开(公告)号：US10180486B2

公开(公告)日：2019-01-15

申请号：US15072204

申请日：2016-03-16

Applicant: Cascade Microtech, Inc.

Inventor： Daniel M. Bock ,  Samantha Nhim ,  Lynh Thuy Bui

IPC: G01R35/00 ,  G01R1/067 ,  G01R31/28 ,  G01R31/319 ,  H01L21/66

Abstract: Test standards and methods for impedance calibration of a probe system and probe systems that include the test standards and/or utilize the methods are disclosed herein. The test standards include at least one test structure. In some embodiments, the test standard further includes an alignment structure that is associated with the test structure. In some embodiments, the test standards include a plurality of test structures. In some embodiments, the plurality of test structures includes a thin film thru test structure and a thin film offset test structure. In some embodiments, the plurality of test structures is positioned to simultaneously contact a plurality of probe regions of a probe head. The methods include methods of calibrating a probe system.

公开(公告)号：US20170269183A1

公开(公告)日：2017-09-21

申请号：US15072204

申请日：2016-03-16

Applicant: Cascade Microtech, Inc.

Inventor： Daniel M. Bock ,  Samantha Nhim ,  Lynh Thuy Bui

IPC: G01R35/00 ,  G01R1/067

CPC classification number: G01R35/005 ,  G01R1/067 ,  G01R31/2886 ,  G01R31/3191 ,  G01R35/007 ,  H01L22/34

Abstract: Test standards and methods for impedance calibration of a probe system and probe systems that include the test standards and/or utilize the methods are disclosed herein. The test standards include at least one test structure. In some embodiments, the test standard further includes an alignment structure that is associated with the test structure. In some embodiments, the test standards include a plurality of test structures. In some embodiments, the plurality of test structures includes a thin film thru test structure and a thin film offset test structure. In some embodiments, the plurality of test structures is positioned to simultaneously contact a plurality of probe regions of a probe head. The methods include methods of calibrating a probe system.

公开(公告)号：US09470753B2

公开(公告)日：2016-10-18

申请号：US14071388

申请日：2013-11-04

Applicant: CASCADE MICROTECH, INC.

Inventor： Daniel M. Bock ,  Kenneth R. Smith

IPC: G01R31/28 ,  G01R31/317

CPC classification number: G01R31/31715 ,  G01R31/28

Abstract: Systems and methods for testing a device under test (DUT) that includes a low power output driver. The methods include providing an input signal to the DUT. The low power output driver is configured to generate a data signal responsive to receipt of the input signal by the DUT and provide the data signal to a signal analyzer via a data signal transmission line. The methods further include determining an expected data signal to be received from the low power output driver and charging at least a portion of the data signal transmission line with a co-drive output signal that is based, at least in part, on the expected data signal. The methods further include receiving a composite data signal with the signal analyzer. The systems include probe heads with a plurality of data signal transmission lines and a plurality of co-drive conductors.

Abstract translation: 用于测试包含低功率输出驱动器的被测设备（DUT）的系统和方法。 所述方法包括向DUT提供输入信号。 低功率输出驱动器被配置为响应于DUT接收到输入信号而生成数据信号，并且经由数据信号传输线将数据信号提供给信号分析器。 所述方法还包括确定要从低功率输出驱动器接收的期望数据信号，并且至少部分地基于预期数据对共驱动输出信号进行数据信号传输线的至少一部分的充电 信号。 所述方法还包括用信号分析器接收复合数据信号。 该系统包括具有多个数据信号传输线和多个共驱动导体的探头。

公开(公告)号：US20140125363A1

公开(公告)日：2014-05-08

申请号：US14071388

申请日：2013-11-04

Applicant: CASCADE MICROTECH, INC.

Inventor： Daniel M. Bock ,  Kenneth R. Smith

IPC: G01R31/28

CPC classification number: G01R31/31715 ,  G01R31/28

Abstract: Systems and methods for testing a device under test (DUT) that includes a low power output driver. The methods include providing an input signal to the DUT. The low power output driver is configured to generate a data signal responsive to receipt of the input signal by the DUT and provide the data signal to a signal analyzer via a data signal transmission line. The methods further include determining an expected data signal to be received from the low power output driver and charging at least a portion of the data signal transmission line with a co-drive output signal that is based, at least in part, on the expected data signal. The methods further include receiving a composite data signal with the signal analyzer. The systems include probe heads with a plurality of data signal transmission lines and a plurality of co-drive conductors.

Abstract translation: 用于测试包含低功率输出驱动器的被测设备（DUT）的系统和方法。 所述方法包括向DUT提供输入信号。 低功率输出驱动器被配置为响应于DUT接收到输入信号而生成数据信号，并且经由数据信号传输线将数据信号提供给信号分析器。 所述方法还包括确定要从低功率输出驱动器接收的期望数据信号，并且至少部分地基于预期数据对共驱动输出信号进行数据信号传输线的至少一部分的充电 信号。 所述方法还包括用信号分析器接收复合数据信号。 该系统包括具有多个数据信号传输线和多个共驱动导体的探头。