公开(公告)号：US20170248973A1

公开(公告)日：2017-08-31

申请号：US15056803

申请日：2016-02-29

Applicant: Cascade Microtech, Inc.

Inventor： Michael Teich ,  Jörg Kiesewetter ,  Ulf Hackius ,  Frank Zill ,  Mirko Kreher

IPC: G05D7/06 ,  H01L21/687 ,  G01R31/26 ,  H01L21/66 ,  G01R31/00 ,  G05B19/418 ,  H01L21/67

CPC classification number: G01R31/2642 ,  G01R31/2862 ,  G01R31/2881 ,  G05B19/41805 ,  G05B2219/45031 ,  G05D22/02 ,  H01L21/67248 ,  H01L22/26

Abstract: Probe systems and methods including active environmental control are disclosed herein. The methods include placing a substrate, which includes a device under test (DUT), on a support surface of a chuck. The support surface extends within a measurement environment that is at least partially surrounded by a measurement chamber. The methods further include determining a variable associated with a moisture content of the measurement environment and receiving a temperature associated with the measurement environment. The methods also include supplying a purge gas stream to the measurement chamber at a purge gas flow rate and selectively varying the purge gas flow rate such that a dew point temperature of the measurement environment is within a target dew point temperature range. The methods further include providing a test signal to the DUT and receiving a resultant signal from the DUT. The systems include probe systems that perform the methods.