Ink jet printing device
    1.
    发明授权
    Ink jet printing device 失效
    喷墨打印装置

    公开(公告)号:US5699094A

    公开(公告)日:1997-12-16

    申请号:US515180

    申请日:1995-08-11

    摘要: An ink jet printhead has improved resistance to the corrosive effects of ink by coating ink sensitive areas with a photo-imageable benzocyclobutene (BCB) polymer. The BCB can be patterned so as to provide a protective coating over selected areas while leaving other areas uncoated. In one described embodiment, a thermal ink jet printer is formed by bonding together a channel plate and a heater plate. Resistors and electrical connections are formed in the surface of the heater plate. A BCB layer is formed so as to overlie the heater plate to protect the electrical elements while providing pit structure for the heater and for ink flow bypass.

    摘要翻译: 通过用可光成像的苯并环丁烯(BCB)聚合物涂布油墨敏感区域,喷墨打印头改善了对油墨的腐蚀作用的抵抗力。 BCB可以被图案化,以便在选定区域上提供保护涂层,同时使其他区域未涂覆。 在一个描述的实施例中,通过将通道板和加热器板接合在一起而形成热喷墨打印机。 电阻器和电气连接形成在加热器板的表面。 形成BCB层,以覆盖加热板,以保护电气元件,同时为加热器和墨水旁路提供凹坑结构。

    Ink jet printhead having a patternable ink channel structure
    2.
    发明授权
    Ink jet printhead having a patternable ink channel structure 失效
    喷墨打印头具有可图案化的墨水通道结构

    公开(公告)号:US06183069B2

    公开(公告)日:2001-02-06

    申请号:US09004765

    申请日:1998-01-08

    IPC分类号: B41J205

    摘要: An ink jet printhead is disclosed which has a heater plate containing the heating elements and driving circuitry means monolithographically formed on one surface thereof and the ink flow directing channel structure is formed on the heater plate using a layer of patternable material, so that all critical alignments are done directly on the heater plate. In one embodiment, the patternable material is a photosensitive polymer which is exposed using a mask to define the channel and reservoir pattern, which is then developed and cured. After curing, the patterned channel structure is polished to provide a smooth coplanar surface and a cover plate with an aperture therein is aligned with a loose tolerance to the channel structure and bonded thereto to complete the printhead. The aperture serves as both ink inlet and a portion of the ink reservoir. The channels are open at one end and serve as the droplet ejecting nozzles, while the other ends are connected to the reservoir. In one embodiment, the cover plate is transparent and the channel structure material is polyimide or polyarylene ether ketone.

    摘要翻译: 公开了一种喷墨打印头,其具有包含加热元件的加热器板和在其一个表面上以光学方式形成的驱动电路装置,并且使用可图案化材料层在加热器板上形成墨流动引导通道结构,使得所有关键对准 直接在加热器板上完成。 在一个实施方案中,可图案材料是使用掩模曝光以限定通道和储存器图案的光敏聚合物,其然后显影和固化。 固化后,对图案化的沟道结构进行抛光以提供平滑的共面表面,并且其中具有孔的盖板对准通道结构的松动公差并与其结合以完成打印头。 该孔用作墨水入口和墨水储存器的一部分。 通道在一端开口并用作液滴喷嘴,而另一端连接到储存器。 在一个实施例中,盖板是透明的,并且通道结构材料是聚酰亚胺或聚亚芳基醚酮。

    Method of making inkjet print head with patterned photoresist layer having features with high aspect ratios
    4.
    发明授权
    Method of making inkjet print head with patterned photoresist layer having features with high aspect ratios 有权
    制造具有高纵横比特征的图案化光刻胶层的喷墨打印头的方法

    公开(公告)号:US06440643B1

    公开(公告)日:2002-08-27

    申请号:US09921112

    申请日:2001-08-02

    IPC分类号: B41J2135

    CPC分类号: B41J2/14129 B41J2202/03

    摘要: Patterned photoresist layers formed on substrates have features with high aspect ratios. The photoresist layers can be formed as single layers with aspect ratios as high as about 4:1. In addition, the features in the photoresist layers can have a wide range of aspect ratios in a given single layer. The photoresist layers can be used in ink jet print heads and other devices to provide controlled fluid flow. The photoresist layers are formed using a contrast enhancement material that enables features having substantially vertical side walls and high aspect ratios to be formed.

    摘要翻译: 形成在基板上的图案化光致抗蚀剂层具有高纵横比的特征。 光致抗蚀剂层可以形成为具有高达约4:1的纵横比的单层。 此外,光刻胶层中的特征可以在给定的单层中具有宽范围的纵横比。 光致抗蚀剂层可用于喷墨打印头和其它装置中以提供受控的流体流动。 使用对比增强材料形成光致抗蚀剂层,其使得能够形成具有基本上垂直的侧壁和高纵横比的特征。

    Patterned photoresist structures having features with high aspect ratios and method of forming such structures
    5.
    发明授权
    Patterned photoresist structures having features with high aspect ratios and method of forming such structures 有权
    具有高纵横比特征的图案化光致抗蚀剂结构和形成这种结构的方法

    公开(公告)号:US06294317B1

    公开(公告)日:2001-09-25

    申请号:US09352956

    申请日:1999-07-14

    IPC分类号: B41J2135

    CPC分类号: B41J2/14129 B41J2202/03

    摘要: Patterned photoresist layers formed on substrates have features with high aspect ratios. The photoresist layers can be formed as single layers with aspect ratios as high as about 4:1. In addition, the features in the photoresist layers can have a wide range of aspect ratios in a given single layer. The photoresist layers can be used in ink jet print heads and other devices to provide controlled fluid flow. The photoresist layers are formed using a contrast enhancement material that enables features having substantially vertical side walls and high aspect ratios to be formed.

    摘要翻译: 形成在基板上的图案化光致抗蚀剂层具有高纵横比的特征。 光致抗蚀剂层可以形成为具有高达约4:1的纵横比的单层。 此外,光刻胶层中的特征可以在给定的单层中具有宽范围的纵横比。 光致抗蚀剂层可用于喷墨打印头和其它装置中以提供受控的流体流动。 使用对比增强材料形成光致抗蚀剂层,其使得能够形成具有基本上垂直的侧壁和高纵横比的特征。

    Methods of patterning resists and structures including the patterned resists
    7.
    发明授权
    Methods of patterning resists and structures including the patterned resists 失效
    图案化抗蚀剂和包括图案化抗蚀剂的结构的方法

    公开(公告)号:US06790598B2

    公开(公告)日:2004-09-14

    申请号:US10046245

    申请日:2002-01-16

    IPC分类号: G03F722

    摘要: Methods of patterning resists and structures including the patterned resists are disclosed. A patterned, multi-transmissive mask is used during patterning of resists to control exposure at areas of the resist at which features having different detail are desired. Exposure is varied in more finely patterned and more grossly patterned areas of the resist. The patterned resists have a high degree of topographical uniformity.

    摘要翻译: 公开了图案化抗蚀剂和包括图案化抗蚀剂的结构的方法。 在图案化抗蚀剂期间使用图案化的多透射掩模,以控制在需要具有不同细节的特征的抗蚀剂的区域处的曝光。 曝光在抗蚀剂的更精细图案和更严格图案的区域中变化。 图案化的抗蚀剂具有高度的形貌均匀性。