公开(公告)号：US06566650B1

公开(公告)日：2003-05-20

申请号：US09664418

申请日：2000-09-18

申请人： Chang Chaun Hu ,  Kin Leong Pey ,  Yung Fu Chong ,  Chim Wai Kin ,  Pavel Neuzil ,  Lap Chan

发明人： Chang Chaun Hu ,  Kin Leong Pey ,  Yung Fu Chong ,  Chim Wai Kin ,  Pavel Neuzil ,  Lap Chan

IPC分类号： B01D5944

CPC分类号： G01Q60/58 ,  Y10S977/867 ,  Y10S977/875

摘要： One of the limitations to current usage of scanning thermal microscopes arises when one needs to obtain a thermal map of an electrically biased specimen. Current practice is for the conductive parts of the specimen to be passivated to prevent excessive current leakage between the tip and the conductive sample. The present invention eliminates the need for this by coating the probe's microtip with a layer of insulation that is also a good thermal conductor. Examples of both thermocouple and thermistor based probes are given along with processes for their manufacture.

摘要翻译： 当需要获得电偏置样本的热图时，会出现当前使用扫描热显微镜的局限性。 目前的做法是使样品的导电部件被钝化，以防止尖端和导电样品之间的过大的电流泄漏。 本发明通过用也是良好热导体的绝缘层涂覆探针的微尖头来消除对此的需要。 给出了热电偶和基于热敏电阻的探针的实例以及其制造方法。