公开(公告)号：US09613002B2

公开(公告)日：2017-04-04

申请号：US14067474

申请日：2013-10-30

申请人： Chang-Ho Han ,  Dae-Wook Kim ,  Jin-Young Lee ,  Sung-Won Choi ,  Byoung-Hoon Kim ,  Han-Hum Park ,  Sang-Jin Choi ,  Ja-Hum Ku

发明人： Chang-Ho Han ,  Dae-Wook Kim ,  Jin-Young Lee ,  Sung-Won Choi ,  Byoung-Hoon Kim ,  Han-Hum Park ,  Sang-Jin Choi ,  Ja-Hum Ku

IPC分类号： G01N37/00 ,  G06F17/18 ,  H01L21/66 ,  G03F7/20

CPC分类号： G06F17/18 ,  G03F7/70633 ,  H01L22/00 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： A processing method includes processing a wafer based on initial data, measuring errors for each of the plurality of areas, calculating an error similarity of at least some of the plurality of areas as a function of a separation distance between each pair of some of the areas, selecting a first area and a plurality of second areas adjacent to the first area, calculating weight values for the second areas based on the error similarities between each pair of second areas and the error similarities between the first area and each second area, calculating an estimated error of the first area based on the measured errors of the second areas and the weight values for the second areas, and generating estimated data based on the estimated errors for each of the plurality of areas.

公开(公告)号：US20140229134A1

公开(公告)日：2014-08-14

申请号：US14067474

申请日：2013-10-30

申请人： Chang-Ho Han ,  DAE-WOOK KIM ,  JIN-YOUNG LEE ,  SUNG-WON CHOI ,  BYOUNG-HOON KIM ,  HAN-HUM PARK ,  SANG-JIN CHOI ,  JA-HUM KU

发明人： Chang-Ho Han ,  DAE-WOOK KIM ,  JIN-YOUNG LEE ,  SUNG-WON CHOI ,  BYOUNG-HOON KIM ,  HAN-HUM PARK ,  SANG-JIN CHOI ,  JA-HUM KU

IPC分类号： G06F17/18 ,  H01L21/66

CPC分类号： G06F17/18 ,  G03F7/70633 ,  H01L22/00 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： A processing method includes processing a wafer based on initial data, measuring errors for each of the plurality of areas, calculating an error similarity of at least some of the plurality of areas as a function of a separation distance between each pair of some of the areas, selecting a first area and a plurality of second areas adjacent to the first area, calculating weight values for the second areas based on the error similarities between each pair of second areas and the error similarities between the first area and each second area, calculating an estimated error of the first area based on the measured errors of the second areas and the weight values for the second areas, and generating estimated data based on the estimated errors for each of the plurality of areas.

摘要翻译： 一种处理方法包括：基于初始数据处理晶片，测量多个区域中的每个区域的误差，计算多个区域中的至少一些区域的误差相似度，作为每对区域之间的间隔距离的函数 ，选择与所述第一区域相邻的第一区域和多个第二区域，基于每对第二区域之间的误差相似度和所述第一区域与每个第二区域之间的误差相似度来计算所述第二区域的权重值， 基于第二区域的测量误差和第二区域的权重值对第一区域的估计误差，以及基于多个区域中的每一个的估计误差生成估计数据。

公开(公告)号：US20140350900A1

公开(公告)日：2014-11-27

申请号：US14215577

申请日：2014-03-17

申请人： Jin-Young Lee ,  Chang-Ho Han

发明人： Jin-Young Lee ,  Chang-Ho Han

IPC分类号： G06F17/50

CPC分类号： G06F17/5036 ,  G06F17/5009 ,  G06F2217/10

摘要： In a simulation system and method thereof, the simulation includes, when a function value for a nominal point (NP) of an input is a first value, running a first simulation on the input; and when the function value for the NP of the input is a second value different from the first value, running a second simulation on the input. Here, the running of the second simulation may include (a) setting a boundary of an input distribution for the second value as a first distribution value, (b) generating input samples within the set boundary of the input distribution, (c) obtaining a worst case point (WCP) for the input by performing machine learning on the generated input samples, and (d) repeatedly performing the steps (a) to (c) while shifting the boundary of the input distribution until the boundary of the input distribution reaches a minimum critical value.

摘要翻译： 在模拟系统及其方法中，模拟包括当输入的标称点（NP）的函数值为第一值时，对输入进行第一模拟; 并且当输入的NP的功能值是与第一值不同的第二值时，对输入进行第二次仿真。 这里，第二模拟的运行可以包括（a）将第二值的输入分布的边界设置为第一分布值，（b）在输入分布的设定边界内生成输入样本，（c）获得 通过对生成的输入样本进行机器学习来输入的最差情况点（WCP），以及（d）在输入分布的边界移动直到输入分布的边界达到时，重复执行步骤（a）至（c） 最小临界值。