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1.发明申请METHODS FOR IN-SITU CHAMBER CLEANING PROCESS FOR HIGH VOLUME MANUFACTURE OF SEMICONDUCTOR MATERIALS 审中-公开用于半导体材料高容量制造的现场清洁工艺的方法公开(公告)号：US20100180913A1
公开(公告)日：2010-07-22
申请号：US12602740
申请日：2008-12-05
申请人： Chantal Arena , Christiaan J. Werkhoven , Ronald Thomas Bertram, JR. , Andrew D. Johnson , Vasil Vorsa , Robert Gordon Ridgeway , Peter J. Maroulis
发明人： Chantal Arena , Christiaan J. Werkhoven , Ronald Thomas Bertram, JR. , Andrew D. Johnson , Vasil Vorsa , Robert Gordon Ridgeway , Peter J. Maroulis
CPC分类号： C23C16/4405 , C23C16/52 , C23C16/54
摘要： The present invention is related to the field of semiconductor processing equipment and methods and provides, in particular, methods and apparatus for in-situ removal of undesired deposits in the interiors of reactor chambers, for example, on chamber walls and elsewhere. The invention provides methods according to which cleaning steps are integrated and incorporated into a high-throughput growth process. Preferably, the times when growth should be suspended and cleaning commenced and when cleaning should be terminated and growth resumed are automatically determined based on sensor inputs. The invention also provides reactor chamber systems for the efficient performance of the integrated cleaning/growth methods of this invention.
摘要翻译： 本发明涉及半导体加工设备和方法的领域，并且特别地提供了用于在反应器室的内部例如在室壁和其它地方原位去除不想要的沉积物的方法和装置。 本发明提供了一种方法，根据该方法，清洁步骤被整合并结合到高通量生长过程中。 优选地，基于传感器输入自动确定生长应该停止和清洁开始的时间，并且清洁应当终止并且恢复生长。 本发明还提供了用于有效执行本发明的综合清洁/生长方法的反应器室系统。
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公开(公告)号：US4713362A
公开(公告)日：1987-12-15
申请号：US866531
申请日：1986-05-22
CPC分类号： C01B23/00 , B01D53/02 , B01J20/18 , C01B13/027 , C01B3/56 , C01B2203/042 , C01B2203/0465 , C01B2203/047 , C01B2203/048 , C01B2210/0082
摘要： A selective zeolitic adsorbent is prepared by activating a zeolitic composition having at least a portion, preferably at least 50%, of the exchangeable ion capacity occupied by a cation having a charge density of 2.0 or greater, preferably a divalent cation with a charge density of 2.0 or greater, such as calcium or magnesium by thoroughly dehydrating the exchanged zeolite. Additionally, separation ability of the zeolitic adsorbent can be further increased by reacting the thoroughly dehydrated zeolite in an oxidizing atmosphere.
摘要翻译： 通过活化沸石组合物制备选择性沸石吸附剂，所述沸石组合物具有至少一部分，优选至少50％的电荷密度为2.0或更大的阳离子所占据的可交换离子能力，优选电荷密度为 2.0或更大，例如通过使交换的沸石彻底脱水来脱离钙或镁。 此外，通过在氧化气氛中使完全脱水的沸石反应，可以进一步提高沸石吸附剂的分离能力。
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公开(公告)号：US5006315A
公开(公告)日：1991-04-09
申请号：US515295
申请日：1990-04-27
CPC分类号： G01N30/84 , B01D53/025 , G01N2030/025 , G01N30/30 , G01N30/6047
摘要： A preparative-scale gas chromatographic system has conduits and valves adapted for analysis and collection of low volatility effluent. An injection site is provided for alternately supplying liquid solvent for removing condensed effluent from the system when the flow of effluent is terminated. Conduits are joined within the thermal conductivity detector of the system to prevent condensation at the joint. Conduits are provided with copper jackets which are coupled to sources of thermal energy to prevent condensation within the conduits. A trap filter provides backpressure in the collection system wherein recovery of condensed effluent in the filter is facilitated by the smooth surface of the filter.
摘要翻译： 制备型气相色谱系统具有适于分析和收集低挥发性流出物的导管和阀。 提供注射部位，用于当流出物的流动终止时交替地供应用于从系统中除去浓缩流出物的液体溶剂。 导管连接在系统的热导率检测器内，以防止接头处的冷凝。 导管配有铜夹套，铜套与热能源相连，以防止导管内的冷凝。 捕集过滤器在收集系统中提供背压，其中通过过滤器的平滑表面促进过滤器中的浓缩流出物的回收。
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4.发明授权Selective chromatographic process using an ion-exchanged, dehydrated chabazite adsorbent 失效使用离子交换的脱水菱沸石吸附剂进行选择性色谱法
公开(公告)号：US4747854A
公开(公告)日：1988-05-31
申请号：US66789
申请日：1987-06-25
CPC分类号： B01J20/186 , Y10S95/902
摘要： The present invention relates to a process for the selective adsorption and separation of one or more constituents from a gas stream in a gas chromatograph, wherein the gas stream is contacted with a dehydrated chabazite adsorbent having a residual water content of less than 1.5 wt % and having at least 50% of any exchangeable ion capacity exchanged with a polyvalent metal cation. The process of the present invention both anticipates separation of the constituents due to either a difference in the heats of adsorption of the constituents or a size exclusion effect.
摘要翻译： 本发明涉及在气相色谱仪中从气流中选择性吸附和分离一种或多种成分的方法，其中气流与残留含水量小于1.5重量％的脱水菱沸石吸附剂接触， 具有与多价金属阳离子交换的任何可交换离子容量的至少50％。 本发明的方法既预期由于组分的吸附热差异或尺寸排阻效应导致组分的分离。
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5.发明授权Method of separating and detecting impurities using a fractional concentration detector 失效使用分数浓度检测器分离和检测杂质的方法
公开(公告)号：US5360467A
公开(公告)日：1994-11-01
申请号：US101604
申请日：1993-08-03
CPC分类号： G01N33/0014 , G01N30/00 , G01N30/14 , G01N2030/025 , G01N2030/062 , G01N2030/143 , G01N2030/146
摘要： A method for detection of impurities at very low levels in hydrogen, oxygen or specialty gases comprises the metered mixture with high purity helium and subsequent selective separation of hydrogen, oxygen or specialty gas with the detection of impurities remaining in the helium by ionization spectrometry.
摘要翻译： 在氢气，氧气或特殊气体中检测非常低水平的杂质的方法包括具有高纯度氦的计量混合物，随后通过电离光谱法检测氦气中残留的杂质，选择性分离氢气，氧气或特殊气体。
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公开(公告)号：US5034193A
公开(公告)日：1991-07-23
申请号：US160541
申请日：1988-02-25
CPC分类号： B01D53/025 , G01N30/84 , G01N2030/025 , G01N30/30 , G01N30/6047
摘要： A preparative-scale gas chromatographic system has conduits and valves adapted for analysis and collection of low volatility effluent. An injection site is provided for alternately supplying liquid solvent for removing condensed effluent from the system when the flow of effluent is terminated. Conduits are joined within the thermal conductivity detector of the system to prevent condensation at the joint. Conduits are provided with copper jackets which are coupled to sources of thermal energy to prevent condensation within the conduits. A trap filter provides backpressure in the collection system wherein recovery of condensed effluent in the filter is facilitated by the smooth surface of the filter.
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7.发明授权Selective adsorption process using an oxidized ion-exchanged dehydrated chabizite adsorbent 失效选择性吸附方法采用氧化离子交换脱水型硫酸盐吸附剂
公开(公告)号：US4744805A
公开(公告)日：1988-05-17
申请号：US69331
申请日：1987-07-01
CPC分类号： C01B13/027 , B01D53/02 , B01J20/18 , C01B23/00 , C01B3/56 , C01B2203/042 , C01B2203/0465 , C01B2203/047 , C01B2203/048 , C01B2210/0082
摘要： The present invention relates to a process for the selective adsorption and separation of one or more constituents from a gas stream in a gas chromatograph, wherein the gas stream is contacted with a dehydrated chabazite adsorbent having a residual water content of less than 1.5 wt. % and having at least 50% of any exchangeable ion capacity exchanged with a polyvalent metal cation and wherein the dehydrated chabazite has been reacted with an oxidizing atmosphere either during or following dehydration. The process of the present invention both anticipates separation of the constituents due to either a difference in the heats of adsorption of the constituents or a size exclusion effect.
摘要翻译： 本发明涉及一种在气相色谱仪中从气流中选择性吸附和分离一种或多种成分的方法，其中气流与残留含水量小于1.5重量％的脱水菱沸石吸附剂接触。 并且具有与多价金属阳离子交换的任何可交换离子能力的至少50％，并且其中脱水的菱沸石在脱水期间或之后与氧化气氛反应。 本发明的方法既预期由于组分的吸附热差异或尺寸排阻效应导致组分的分离。
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