公开(公告)号：US08220630B1

公开(公告)日：2012-07-17

申请号：US13094911

申请日：2011-04-27

申请人： Chen-Wei Ku ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Jain-Ping Sheng

发明人： Chen-Wei Ku ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Jain-Ping Sheng

IPC分类号： B65D85/48

CPC分类号： G03F1/66 ,  G03F7/70741

摘要： An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

摘要翻译： 具有紧固结构的EUV荚包括外荚和内荚，其中内荚的上盖配置有多个保持器，并且设置在EUV荚的外荚上的多个支持物用于按压 用于多个保持器的多个保持器用于将掩模版紧固并稳定在内部容器中，从而确保掩模版在荚壳中的安全性和稳定性; 通过利用这种设计，可以减少由于运输过程中的EUV舱的挥发而导致的掩模块碰撞的风险，并且还可以大大降低由于标线的裂纹和损坏造成的成本。

公开(公告)号：US20120175279A1

公开(公告)日：2012-07-12

申请号：US13094911

申请日：2011-04-27

申请人： Chen-Wei Ku ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Jain-Ping Sheng

发明人： Chen-Wei Ku ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Jain-Ping Sheng

IPC分类号： B65D85/48

CPC分类号： G03F1/66 ,  G03F7/70741

摘要： An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

摘要翻译： 具有紧固结构的EUV荚包括外荚和内荚，其中内荚的上盖配置有多个保持器，并且设置在EUV荚的外荚上的多个支持物用于按压 用于多个保持器的多个保持器用于将掩模版紧固并稳定在内部容器中，从而确保掩模版在荚壳中的安全性和稳定性; 通过利用这种设计，可以减少由于运输过程中的EUV舱的挥发而导致的掩模块碰撞的风险，并且还可以大大降低由于标线的裂纹和损坏造成的成本。

公开(公告)号：US20120267380A1

公开(公告)日：2012-10-25

申请号：US13250395

申请日：2011-09-30

申请人： Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

发明人： Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

IPC分类号： B65D6/00

CPC分类号： G03F1/66

摘要： A transmission box using AMHS for transferring reticle pod is provided, wherein an OHT (Overhead Hoist Transfer) system is disposed on the transmission box to perform mechanical transferring of the reticle pod for greatly reducing risks of damaging reticles caused by operators when transferring, streamlining the allocation of operators, and thus decreasing the time needed for process to complete.

摘要翻译： 提供了一种使用AMHS传送光罩舱的传输箱，其中在传输箱上设置了一个OHT（顶起式起重机转移）系统，以进行标线舱的机械转移，从而大大降低了运营商在转运时造成的损坏标线的风险， 分配运营商，从而减少流程完成所需的时间。

公开(公告)号：US09097980B2

公开(公告)日：2015-08-04

申请号：US13250395

申请日：2011-09-30

申请人： Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

发明人： Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

IPC分类号： B65D85/30 ,  G03F1/66 ,  B65D25/04

CPC分类号： G03F1/66

摘要： A transmission box using AMHS for transferring reticle pod is provided, wherein an OHT (Overhead Hoist Transfer) system is disposed on the transmission box to perform mechanical transferring of the reticle pod for greatly reducing risks of damaging reticles caused by operators when transferring, streamlining the allocation of operators, and thus decreasing the time needed for process to complete.

摘要翻译： 提供了一种使用AMHS传送光罩舱的传输箱，其中在传输箱上设置了一个OHT（顶起式起重机转移）系统，以进行标线舱的机械转移，从而大大降低了运营商在转运时造成的损坏标线的风险， 分配运营商，从而减少流程完成所需的时间。

公开(公告)号：US08403143B2

公开(公告)日：2013-03-26

申请号：US12915274

申请日：2010-10-29

申请人： Ming-Chien Chiu ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Chen-Wei Ku

发明人： Ming-Chien Chiu ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Chen-Wei Ku

IPC分类号： B65D85/48

CPC分类号： H01L21/67353 ,  H01L21/67359 ,  H01L21/67393

摘要： A reticle storing container is disclosed to include an outer container, an inner container, and a purging valve. The outer container comprises a container body and a container base on which at least a first through-hole is disposed, and a first inner space is formed between the container body and the container base for storing the inner container. The inner container comprises a top cover and a bottom base on which at least a second through-hole connected to the first through-hole is disposed, and a second inner space is formed between the top cover and the bottom base for storing a reticle. The purging valve is disposed in the first through-hole on the outer container base and connected to the second through-hole of said inner container, wherein the purging valve comprises a spring and a valve part. Thus, when the valve part is propped up by a purging head, the valve part compresses the spring for the purging valve to be connected to the purging head. And a filter material is disposed on the joint portion between the container body and the container base to prevent the interior of the reticle from being contaminated.

摘要翻译： 公开了一种掩模版存储容器，其包括外部容器，内部容器和清洗阀。 外容器包括容器主体和容器基部，至少在其上设置有第一通孔，并且在容器主体和用于容纳内容器的容器基座之间形成有第一内部空间。 所述内部容器包括顶盖和底部基座，至少第二通孔与所述第一通孔相连接，所述第一内部空间形成在所述顶盖和所述底部基座之间，用于存储掩模版。 清洗阀设置在外容器基座上的第一通孔中并连接到所述内容器的第二通孔，其中清洗阀包括弹簧和阀部件。 因此，当阀部分被清洗头支撑时，阀部分压缩用于清洗阀的弹簧以连接到清洗头。 并且过滤材料设置在容器主体和容器基座之间的接合部分上，以防止掩模版的内部被污染。

公开(公告)号：USD712364S1

公开(公告)日：2014-09-02

申请号：US29420457

申请日：2012-05-09

申请人： Pao-Yi Lu ,  Cheng-Ju Lee ,  Chen-Wei Ku

设计人： Pao-Yi Lu ,  Cheng-Ju Lee ,  Chen-Wei Ku

公开(公告)号：US08387799B2

公开(公告)日：2013-03-05

申请号：US13183522

申请日：2011-07-15

申请人： Ming-Long Chiu ,  Kuo-Chun Hung ,  Chen-Wei Ku ,  Jain-Ping Sheng ,  Yi-Liang Hou

发明人： Ming-Long Chiu ,  Kuo-Chun Hung ,  Chen-Wei Ku ,  Jain-Ping Sheng ,  Yi-Liang Hou

IPC分类号： B65D85/30 ,  H01L21/673

CPC分类号： H01L21/67383 ,  H01L21/67389 ,  H01L21/67393

摘要： A wafer container includes a container body, formed by a pair of side walls, a top surface, and a bottom surface, a supporting module being disposed on each of said sidewall for supporting a plurality of wafers; and a door joining with opening of the container body with its inner surface for protecting the plurality of wafers within the container body, the characteristic in that: a purgeable supporting module is respectively disposed between each sidewall to of the container body and the back wall, a long slit is further disposed on the side of purgeable supporting module facing the opening and a porous material is disposed within the long slit, and an air inlet is further disposed on one end of the purgeable supporting module for being connected to a gas valve, wherein the purgeable supporting module is composed of a plurality of supporting ribs vertically arranged at intervals.

摘要翻译： 晶片容器包括由一对侧壁，顶表面和底表面形成的容器体，支撑模块设置在每个所述侧壁上以支撑多个晶片; 以及与容器主体的开口连接的门，其内表面用于保护容器主体内的多个晶片，其特征在于，可拆卸的支撑模块分别设置在容器主体和后壁的每个侧壁之间， 在可清洗支撑组件的面对开口的一侧进一步设置长缝隙，并且多孔材料设置在长缝隙内，并且空气入口还设置在可清洗支撑模块的一端，用于连接到气阀， 其特征在于，所述可吹扫支撑模块由多个以间隔垂直排列的支撑肋构成。

公开(公告)号：US20110266193A1

公开(公告)日：2011-11-03

申请号：US13183522

申请日：2011-07-15

申请人： Ming-Long Chiu ,  Kuo-Chun Hung ,  Chen-Wei Ku ,  Jain-Ping Sheng ,  Yi-Liang Hou

发明人： Ming-Long Chiu ,  Kuo-Chun Hung ,  Chen-Wei Ku ,  Jain-Ping Sheng ,  Yi-Liang Hou

IPC分类号： H01L21/673 ,  B65D81/20

CPC分类号： H01L21/67383 ,  H01L21/67389 ,  H01L21/67393

摘要： A wafer container includes a container body, composed of a pair of side walls, a top surface, and a bottom surface, a supporting module being disposed on each of said sidewall for supporting a plurality of wafers; and a door joining with opening of the container body with its inner surface for protecting the plurality of wafers within the container body, the characteristic in that: a purgeable supporting module is respectively disposed between each sidewall to of the container body and the back wall, a long slit is further disposed on the side of purgeable supporting module facing the opening and a porous material is disposed within the long slit, and an air inlet is further disposed on one end of the purgeable supporting module for being connected to a gas valve, wherein the purgeable supporting module is composed of a plurality of supporting ribs vertically arranged at intervals.

摘要翻译： 晶片容器包括由一对侧壁，顶表面和底表面组成的容器主体，支撑模块设置在每个所述侧壁上以支撑多个晶片; 以及与容器主体的开口连接的门，其内表面用于保护容器主体内的多个晶片，其特征在于，可拆卸的支撑模块分别设置在容器主体和后壁的每个侧壁之间， 在可清洗支撑组件的面对开口的一侧进一步设置长缝隙，并且多孔材料设置在长缝隙内，并且空气入口还设置在可清洗支撑模块的一端，用于连接到气阀， 其特征在于，所述可吹扫支撑模块由多个以间隔垂直排列的支撑肋构成。

公开(公告)号：US08418853B2

公开(公告)日：2013-04-16

申请号：US13004096

申请日：2011-01-11

申请人： Chen-Wei Ku ,  Shao Wei Lu ,  Chin-Ming Lin

发明人： Chen-Wei Ku ,  Shao Wei Lu ,  Chin-Ming Lin

IPC分类号： B65D85/00

CPC分类号： H01L21/67359 ,  H01L21/67353

摘要： An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.

摘要翻译： 具有设置在其内部容器和外部容器之间的压力传感器的EUV舱，其中设置在外部容器的内侧上的压力传感器用于检测外部容器和内部容器之间的压力，并且使用压力数据来确定 内部容器是否被外部容器牢固地紧固。

公开(公告)号：US09064917B2

公开(公告)日：2015-06-23

申请号：US13537627

申请日：2012-06-29

申请人： Chen-Wei Ku ,  Sheng-Yuan Wang ,  Cheng-Ju Lee

发明人： Chen-Wei Ku ,  Sheng-Yuan Wang ,  Cheng-Ju Lee

IPC分类号： B65D85/30 ,  H01L21/673

CPC分类号： H01L21/67373

摘要： A container for storing semiconductor devices is revealed. The container includes a receiving body, a seal plate, and a cover. At least one fastener and at least one driver are mounted in the receiving body. The seal plate is fastened under the receiving body and against the driver so as to fix the driver on the receiving body. When the driver is rotated, the fastener is driven to move in the receiving body by the driver. At least one fixing part of the fastener is moved toward at least one fastening part of the cover. By the fixing part locked in the fastening part, the cover is fixed on the receiving body. Thus a force opposite to the rotating shaft will not be generated around a periphery of the driver. Therefore stability of the rotating driver is improved and the container is opened and closed smoothly.

摘要翻译： 揭示了用于存储半导体器件的容器。 容器包括接收体，密封板和盖。 至少一个紧固件和至少一个驱动器安装在接收体中。 密封板紧固在接收体下方并抵靠驾驶员，以将驾驶员固定在接收体上。 当驾驶员旋转时，驱动器驱动紧固件在接收体中移动。 紧固件的至少一个固定部分朝向盖的至少一个紧固部分移动。 通过将固定部分锁定在紧固部分中，盖子被固定在接收体上。 因此，不会在驱动器的周围产生与旋转轴相反的力。 因此，旋转驱动器的稳定性提高，容器开闭。