公开(公告)号：USD712364S1

公开(公告)日：2014-09-02

申请号：US29420457

申请日：2012-05-09

申请人： Pao-Yi Lu ,  Cheng-Ju Lee ,  Chen-Wei Ku

设计人： Pao-Yi Lu ,  Cheng-Ju Lee ,  Chen-Wei Ku

公开(公告)号：US09097980B2

公开(公告)日：2015-08-04

申请号：US13250395

申请日：2011-09-30

申请人： Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

发明人： Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

IPC分类号： B65D85/30 ,  G03F1/66 ,  B65D25/04

CPC分类号： G03F1/66

摘要： A transmission box using AMHS for transferring reticle pod is provided, wherein an OHT (Overhead Hoist Transfer) system is disposed on the transmission box to perform mechanical transferring of the reticle pod for greatly reducing risks of damaging reticles caused by operators when transferring, streamlining the allocation of operators, and thus decreasing the time needed for process to complete.

摘要翻译： 提供了一种使用AMHS传送光罩舱的传输箱，其中在传输箱上设置了一个OHT（顶起式起重机转移）系统，以进行标线舱的机械转移，从而大大降低了运营商在转运时造成的损坏标线的风险， 分配运营商，从而减少流程完成所需的时间。

公开(公告)号：US20120175279A1

公开(公告)日：2012-07-12

申请号：US13094911

申请日：2011-04-27

申请人： Chen-Wei Ku ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Jain-Ping Sheng

发明人： Chen-Wei Ku ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Jain-Ping Sheng

IPC分类号： B65D85/48

CPC分类号： G03F1/66 ,  G03F7/70741

摘要： An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

摘要翻译： 具有紧固结构的EUV荚包括外荚和内荚，其中内荚的上盖配置有多个保持器，并且设置在EUV荚的外荚上的多个支持物用于按压 用于多个保持器的多个保持器用于将掩模版紧固并稳定在内部容器中，从而确保掩模版在荚壳中的安全性和稳定性; 通过利用这种设计，可以减少由于运输过程中的EUV舱的挥发而导致的掩模块碰撞的风险，并且还可以大大降低由于标线的裂纹和损坏造成的成本。

公开(公告)号：US20120267380A1

公开(公告)日：2012-10-25

申请号：US13250395

申请日：2011-09-30

申请人： Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

发明人： Chen-Wei Ku ,  Pao-Yi Lu ,  Kun-Hong Liao ,  Jain-Ping Sheng

IPC分类号： B65D6/00

CPC分类号： G03F1/66

摘要： A transmission box using AMHS for transferring reticle pod is provided, wherein an OHT (Overhead Hoist Transfer) system is disposed on the transmission box to perform mechanical transferring of the reticle pod for greatly reducing risks of damaging reticles caused by operators when transferring, streamlining the allocation of operators, and thus decreasing the time needed for process to complete.

摘要翻译： 提供了一种使用AMHS传送光罩舱的传输箱，其中在传输箱上设置了一个OHT（顶起式起重机转移）系统，以进行标线舱的机械转移，从而大大降低了运营商在转运时造成的损坏标线的风险， 分配运营商，从而减少流程完成所需的时间。

公开(公告)号：US08403143B2

公开(公告)日：2013-03-26

申请号：US12915274

申请日：2010-10-29

申请人： Ming-Chien Chiu ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Chen-Wei Ku

发明人： Ming-Chien Chiu ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Chen-Wei Ku

IPC分类号： B65D85/48

CPC分类号： H01L21/67353 ,  H01L21/67359 ,  H01L21/67393

摘要： A reticle storing container is disclosed to include an outer container, an inner container, and a purging valve. The outer container comprises a container body and a container base on which at least a first through-hole is disposed, and a first inner space is formed between the container body and the container base for storing the inner container. The inner container comprises a top cover and a bottom base on which at least a second through-hole connected to the first through-hole is disposed, and a second inner space is formed between the top cover and the bottom base for storing a reticle. The purging valve is disposed in the first through-hole on the outer container base and connected to the second through-hole of said inner container, wherein the purging valve comprises a spring and a valve part. Thus, when the valve part is propped up by a purging head, the valve part compresses the spring for the purging valve to be connected to the purging head. And a filter material is disposed on the joint portion between the container body and the container base to prevent the interior of the reticle from being contaminated.

摘要翻译： 公开了一种掩模版存储容器，其包括外部容器，内部容器和清洗阀。 外容器包括容器主体和容器基部，至少在其上设置有第一通孔，并且在容器主体和用于容纳内容器的容器基座之间形成有第一内部空间。 所述内部容器包括顶盖和底部基座，至少第二通孔与所述第一通孔相连接，所述第一内部空间形成在所述顶盖和所述底部基座之间，用于存储掩模版。 清洗阀设置在外容器基座上的第一通孔中并连接到所述内容器的第二通孔，其中清洗阀包括弹簧和阀部件。 因此，当阀部分被清洗头支撑时，阀部分压缩用于清洗阀的弹簧以连接到清洗头。 并且过滤材料设置在容器主体和容器基座之间的接合部分上，以防止掩模版的内部被污染。

公开(公告)号：US08220630B1

公开(公告)日：2012-07-17

申请号：US13094911

申请日：2011-04-27

申请人： Chen-Wei Ku ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Jain-Ping Sheng

发明人： Chen-Wei Ku ,  Pao-Yi Lu ,  Chin-Ming Lin ,  Jain-Ping Sheng

IPC分类号： B65D85/48

CPC分类号： G03F1/66 ,  G03F7/70741

摘要： An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

摘要翻译： 具有紧固结构的EUV荚包括外荚和内荚，其中内荚的上盖配置有多个保持器，并且设置在EUV荚的外荚上的多个支持物用于按压 用于多个保持器的多个保持器用于将掩模版紧固并稳定在内部容器中，从而确保掩模版在荚壳中的安全性和稳定性; 通过利用这种设计，可以减少由于运输过程中的EUV舱的挥发而导致的掩模块碰撞的风险，并且还可以大大降低由于标线的裂纹和损坏造成的成本。

公开(公告)号：US08474626B2

公开(公告)日：2013-07-02

申请号：US12766103

申请日：2010-04-23

申请人： Ming-Chien Chiu ,  Pao-Yi Lu ,  Kuo Chun Hung

发明人： Ming-Chien Chiu ,  Pao-Yi Lu ,  Kuo Chun Hung

IPC分类号： B65D85/00

CPC分类号： H01L21/67379 ,  Y10T29/49826

摘要： A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body.

摘要翻译： 晶片容器包括容器主体，其包括多个侧壁，底部和顶部，以限定用于容纳晶片的空间，形成在一个侧壁上的开口，以及具有外表面和内表面的门。 容器主体的顶部设置有机器人法兰，其包括防盗结构和半圆形卡扣钩部分，其设置在机器人法兰的下表面的中心并且其周边面向顶部。 防盗结构具有用于插入容器主体顶部上的突出部分的几何孔。在突出部分插入几何孔中之后，机器人凸缘沿着容器主体进一步旋转约180度，用于半 - 圆形卡钩部分，以接合在容器主体的顶部上的半圆形支撑部分中。

公开(公告)号：US07942269B2

公开(公告)日：2011-05-17

申请号：US12247316

申请日：2008-10-08

申请人： Pao-Yi Lu

发明人： Pao-Yi Lu

IPC分类号： B65D85/30 ,  B65D81/02

CPC分类号： H01L21/67359 ,  H01L21/67005 ,  H01L21/67369

摘要： This invention is related to a carrier of reticle pod. The carrier of reticle pod comprises an upper cover and a lower cover, and the upper cover is configured to be coupled to the lower cover to form an interior space for accommodation. The lower cover includes several pairs of guide tracks disposed on two opposite lateral sides of inner surface of the lower cover. Clapboards are set into the lower cover via the guide tracks to separate the space for accommodation into a plurality of spaces for accommodation for storing reticle pod. Fixing elements including a clipping portion and a resisting portion are disposed on the top surface of the inner surface of upper cover. When the upper cover closes the lower cover, each fixing element of the upper cover is configured to be coupled to each reticle pod stored in the carrier.

摘要翻译： 本发明涉及标线舱的载体。 标线舱的托架包括上盖和下盖，并且上盖构造成联接到下盖以形成用于容纳的内部空间。 下盖包括设置在下盖的内表面的两个相对侧面上的若干对导轨。 隔板通过引导轨道设置在下盖中，以便将用于容纳的空间分隔成多个空间，用于容纳用于存放掩模版舱的空间。 包括夹持部分和阻力部分的固​​定元件设置在上盖的内表面的顶表面上。 当上盖关闭下盖时，上盖的每个固定元件构造成联接到存储在载体中的每个标线盒。

公开(公告)号：US20100051504A1

公开(公告)日：2010-03-04

申请号：US12206860

申请日：2008-09-09

申请人： Pao-Yi Lu ,  Chin-Ming Lin

发明人： Pao-Yi Lu ,  Chin-Ming Lin

IPC分类号： B65D85/90

CPC分类号： H01L21/67369

摘要： A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an outer surface and an inner surface, which is joined with opening of the container body with its inner surface for protecting the plurality of wafers in the container body, the characteristic in that: a recess is integrated with the inner surface of the door for separating the inner surface into two platforms, a restraint module is formed respectively on each of two platforms, and each restraint module includes a base which is disposed with a plurality of notches arranged at interval for contacting said plurality of wafers.

摘要翻译： 晶片容器包括容器体，其内部设置有多个用于支撑多个晶片的槽，并且在其一个侧壁上形成有用于导入和导出所述多个晶片的开口，以及具有外部的门 表面和内表面，其与其内表面与容器主体的开口接合，用于保护容器主体中的多个晶片，其特征在于：凹部与门的内表面一体化，用于将内部 表面分成两个平台，分别在两个平台中的每一个上形成约束模块，并且每个约束模块包括基部，该基部设置有间隔设置的多个凹口，用于接触所述多个晶片。

公开(公告)号：US20110174389A1

公开(公告)日：2011-07-21

申请号：US13076417

申请日：2011-03-30

申请人： Chih-Ching Chiu ,  Pao-Yi Lu

发明人： Chih-Ching Chiu ,  Pao-Yi Lu

IPC分类号： F16K15/20

CPC分类号： F16J15/46 ,  H01L21/67373 ,  H01L21/67376 ,  Y10T137/3584

摘要： The present invention relates a sealing apparatus with interlocking air inflation device for wafer carrier and a sealing method thereof, wherein the sealing apparatus is disposed between a wafer container and a cover of a wafer carrier, used for sealing the cover and the wafer container when the cover is closed to the wafer container. The sealing apparatus comprises: at least one latch set, at least one interlocked cam, an air inflation sealing member, and at least one air intake/outtake valve, wherein the interlocked cam is adopted for connecting an interlocking device having an air inflation member, and the interlocking device can be used to drive the interlocked cam for making the latch set bolt the cover and the wafer container, and inflate the air inflation sealing member through the air inflation member thereof and the air intake/outtake valve in order to inflate and expand the air inflation sealing member.

摘要翻译： 本发明涉及一种具有用于晶片载体的联锁空气充气装置的密封装置及其密封方法，其中密封装置设置在晶片容器和晶片载体的盖之间，用于密封盖和晶片容器 盖子封闭到晶片容器。 所述密封装置包括：至少一个闩锁组，至少一个互锁凸轮，充气密封构件和至少一个进气/排出阀，其中所述互锁凸轮用于连接具有空气充气构件的互锁装置， 并且互锁装置可以用于驱动互锁的凸轮，以使闩锁组件螺栓盖住盖和晶片容器，并且通过其充气构件和进气/排气阀使空气充气密封构件膨胀以便膨胀和 膨胀空气充气密封件。