公开(公告)号：US20060070876A1

公开(公告)日：2006-04-06

申请号：US11234615

申请日：2005-09-23

申请人： Chi Wu ,  Stephane Ferrasse ,  Frank Alford ,  Susanne Grabmeier ,  Werner Hort ,  Jaeyeon Kim ,  Susan Strothers ,  Andrew Wragg ,  Robert Prater

发明人： Chi Wu ,  Stephane Ferrasse ,  Frank Alford ,  Susanne Grabmeier ,  Werner Hort ,  Jaeyeon Kim ,  Susan Strothers ,  Andrew Wragg ,  Robert Prater

IPC分类号： C23C14/00 ,  C23C14/32

CPC分类号： C23C14/3407 ,  H01J37/3423 ,  H01J37/3426

摘要： The invention includes a target construction having a sputtering region and a flange region laterally outward relative to the sputtering region. The flange region has a front surface disposed on a front face of the construction and a back surface opposing the front surface. An o-ring groove is disposed within the flange region. The o-ring groove has a planar base surface which has a first width and has an orifice disposed along the front surface of the flange. The orifice has a second width as measured parallel relative to the base surface. The second width is greater than the first width. The flange surfaces can additionally be protected from rubbing by a layer of protective material.

公开(公告)号：US07618520B2

公开(公告)日：2009-11-17

申请号：US11234615

申请日：2005-09-23

申请人： Chi tse Wu ,  Stephane Ferrasse ,  Frank C. Alford ,  Susanne Grabmeier ,  Werner H. Hort ,  Jaeyeon Kim ,  Susan D. Strothers ,  Andrew Wragg ,  Robert Prater

发明人： Chi tse Wu ,  Stephane Ferrasse ,  Frank C. Alford ,  Susanne Grabmeier ,  Werner H. Hort ,  Jaeyeon Kim ,  Susan D. Strothers ,  Andrew Wragg ,  Robert Prater

IPC分类号： C23C14/35

CPC分类号： C23C14/3407 ,  H01J37/3423 ,  H01J37/3426

摘要： The invention includes a target construction having a sputtering region and a flange region laterally outward relative to the sputtering region. The flange region has a front surface disposed on a front face of the construction and a back surface opposing the front surface. An o-ring groove is disposed within the flange region. The o-ring groove has a planar base surface which has a first width and has an orifice disposed along the front surface of the flange. The orifice has a second width as measured parallel relative to the base surface. The second width is greater than the first width. The flange surfaces can additionally be protected from rubbing by a layer of protective material.

摘要翻译： 本发明包括具有溅射区域和相对于溅射区域横向向外的凸缘区域的目标结构。 凸缘区域具有设置在结构的正面上的前表面和与前表面相对的后表面。 O形环槽设置在凸缘区域内。 O形环槽具有平坦的基面，其具有第一宽度并且具有沿凸缘的前表面设置的孔。 孔口具有相对于基底表面平行测量的第二宽度。 第二宽度大于第一宽度。 凸缘表面可另外被保护，免受一层保护材料的摩擦。