公开(公告)号：US20130074599A1

公开(公告)日：2013-03-28

申请号：US13397684

申请日：2012-02-16

申请人： Ching-Kai Shen

发明人： Ching-Kai Shen

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0831

摘要： A capacitive accelerometer includes a substrate and a first semiconductor layer. The first semiconductor layer is disposed on the substrate and includes a first mass, first and second support bases, first and second elastic members, and first and second comb capacitor sets. The first and second support bases are disposed at positions corresponding to first and second axes respectively. The first elastic member is connected to the first mass and the first support base in a manner of bending back and forth perpendicular to the first axis. The second elastic member is connected to the first mass and the second support base in a manner of bending back and forth perpendicular to the second axis. The first and second comb capacitor sets are disposed at positions corresponding to the second and first axes respectively and connected to the first mass. The first axis is perpendicular to the second axis.

摘要翻译： 电容式加速度计包括衬底和第一半导体层。 第一半导体层设置在基板上，并且包括第一质量块，第一和第二支撑基座，第一和第二弹性构件以及第一和第二梳状电容器组。 第一和第二支撑基座分别设置在与第一和第二轴对应的位置。 第一弹性构件以垂直于第一轴线来回弯曲的方式连接到第一质量块和第一支撑基座。 第二弹性构件以与第二轴线垂直的方式来回弯曲的方式连接到第一质量块和第二支撑基座。 第一梳状电容器组和第二梳状电容器组分别设置在与第二和第二轴对应的位置处，并连接到第一质量块。 第一轴垂直于第二轴。

公开(公告)号：US08910523B2

公开(公告)日：2014-12-16

申请号：US13397684

申请日：2012-02-16

申请人： Ching-Kai Shen

发明人： Ching-Kai Shen

IPC分类号： G01P15/125 ,  G01P15/18 ,  G01P15/08

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0831

摘要： A capacitive accelerometer includes a substrate and a first semiconductor layer. The first semiconductor layer is disposed on the substrate and includes a first mass, first and second anchors, first and second elastic members, and first and second comb capacitor sets. The first and second anchors are disposed at positions corresponding to first and second axes respectively. The first elastic member is connected to the first mass and the first anchor in a manner of bending back and forth perpendicular to the first axis. The second elastic member is connected to the first mass and the second anchor in a manner of bending back and forth perpendicular to the second axis. The first and second comb capacitor sets are disposed at positions corresponding to the second and first axes respectively and connected to the first mass. The first axis is perpendicular to the second axis.

摘要翻译： 电容式加速度计包括衬底和第一半导体层。 第一半导体层设置在基板上，并且包括第一质量块，第一和第二锚固件，第一和第二弹性构件以及第一和第二梳状电容器组。 第一和第二锚定件分别设置在与第一和第二轴对应的位置。 第一弹性构件以垂直于第一轴线来回弯曲的方式连接到第一质量块和第一锚固件。 第二弹性构件以垂直于第二轴线来回弯曲的方式连接到第一质量块和第二锚固件。 第一梳状电容器组和第二梳状电容器组分别设置在与第二和第二轴对应的位置处，并连接到第一质量块。 第一轴垂直于第二轴。