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公开(公告)号：US11719883B1
公开(公告)日：2023-08-08
申请号：US17675328
申请日：2022-02-18
申请人： Chong Zhang , Minh Tran , Tin Komljenovic , Hyun Dai Park
发明人： Chong Zhang , Minh Tran , Tin Komljenovic , Hyun Dai Park
CPC分类号： G02B6/1228 , G02B6/305
摘要： A device includes three elements fabricated on a common substrate. The first element includes an active waveguide structure having at least three sub-layers supporting a first optical mode. The second element has a passive waveguide structure supporting a second optical mode, and the third element, butt-coupled to the first element, has an intermediate waveguide structure supporting intermediate optical modes. One sub-layer in the active waveguide structure includes an n-contact layer, another sub-layer includes a p-contact layer, and a third sub-layer includes an active region. A tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the second optical mode and an intermediate optical mode. No adiabatic transformation occurs between that intermediate optical mode and the first optical mode. Mutual alignments of the three elements are defined using lithographic alignment marks that facilitate precise alignment between layers formed fabrication of the elements.
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2.发明申请公开(公告)号：US20220120970A1
公开(公告)日：2022-04-21
申请号：US17078859
申请日：2020-10-23
申请人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
发明人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
摘要： An optical device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure supporting a first optical mode, the second element, fabricated on a planarized top surface of the first element, comprises a passive waveguide structure supporting a second optical mode, and the third element, at least partly butt-coupled to the first element, comprises an intermediate waveguide structure, positioned such that a top surface of the intermediate structure underlies a bottom surface of the passive waveguide structure. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and the second optical mode. Mutual alignments of the first, second and third elements are defined using lithographic alignment marks.
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3.发明授权公开(公告)号：US11287573B1
公开(公告)日：2022-03-29
申请号：US17078859
申请日：2020-10-23
申请人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
发明人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
摘要： An optical device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure supporting a first optical mode, the second element, fabricated on a planarized top surface of the first element, comprises a passive waveguide structure supporting a second optical mode, and the third element, at least partly butt-coupled to the first element, comprises an intermediate waveguide structure, positioned such that a top surface of the intermediate structure underlies a bottom surface of the passive waveguide structure. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and the second optical mode. Mutual alignments of the first, second and third elements are defined using lithographic alignment marks.
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4.发明公开公开(公告)号：US20230266532A1
公开(公告)日：2023-08-24
申请号：US17675328
申请日：2022-02-18
申请人： Chong Zhang , Minh Tran , Tin Komljenovic , Hyun Dai Park
发明人： Chong Zhang , Minh Tran , Tin Komljenovic , Hyun Dai Park
CPC分类号： G02B6/1228 , G02B6/305
摘要： A device includes three elements fabricated on a common substrate. The first element includes an active waveguide structure having at least three sub-layers supporting a first optical mode. The second element has a passive waveguide structure supporting a second optical mode, and the third element, butt-coupled to the first element, has an intermediate waveguide structure supporting intermediate optical modes. One sub-layer in the active waveguide structure includes an n-contact layer, another sub-layer includes a p-contact layer, and a third sub-layer includes an active region. A tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the second optical mode and an intermediate optical mode. No adiabatic transformation occurs between that intermediate optical mode and the first optical mode. Mutual alignments of the three elements are defined using lithographic alignment marks that facilitate precise alignment between layers formed fabrication of the elements.
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公开(公告)号：US20210373235A1
公开(公告)日：2021-12-02
申请号：US17015785
申请日：2020-09-09
申请人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
发明人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
摘要： A device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure comprising: one portion, of effective cross-sectional area A1, supporting a first optical mode; and a second portion, butt-coupled to the first portion, of effective cross-sectional area A2>A1. The second element comprises a passive waveguide structure supporting a second optical mode. The third element, at least partly butt-coupled to the second portion, comprises an intermediate waveguide structure supporting intermediate optical modes. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and one intermediate optical mode. No adiabatic transformation occurs between any intermediate optical mode and the first optical mode. Mutual alignments of the elements are defined using lithographic marks.
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公开(公告)号：US11209592B2
公开(公告)日：2021-12-28
申请号：US17015785
申请日：2020-09-09
申请人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
发明人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
摘要： A device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure comprising: one portion, of effective cross-sectional area A1, supporting a first optical mode; and a second portion, butt-coupled to the first portion, of effective cross-sectional area A2>A1. The second element comprises a passive waveguide structure supporting a second optical mode. The third element, at least partly butt-coupled to the second portion, comprises an intermediate waveguide structure supporting intermediate optical modes. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and one intermediate optical mode. No adiabatic transformation occurs between any intermediate optical mode and the first optical mode. Mutual alignments of the elements are defined using lithographic marks.
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公开(公告)号：US20230244034A1
公开(公告)日：2023-08-03
申请号：US17573916
申请日：2022-01-12
申请人： Aditya Malik , Tin Komljenovic , Hyun Dai Park
发明人： Aditya Malik , Tin Komljenovic , Hyun Dai Park
CPC分类号： G02B6/14 , G02B6/13 , G02B6/1228 , G02B2006/12142
摘要： A device has a plurality of waveguide structures including two active (one of which comprises two sub-layers), two passive, and three intermediate waveguide structures on a common substrate. At least partial butt coupling between active and intermediate waveguide structures, and tapering in the intermediate and/or passive waveguide structures at each junction therebetween facilitates efficient optical mode transformations as optical signals travel through the device, either from a first sub-layer of the first active waveguide structure through the other sub-layer, then sequentially though a first intermediate waveguide structure, a passive waveguide structure, a second intermediate waveguide structure, a second active waveguide structure, a third intermediate structure, and a second passive waveguide structure; or in reverse from the second passive waveguide structure back through to the first sub-layer of the first active waveguide structure. Lithographic alignment marks facilitate precise mutual alignments between layers defining each of the waveguide structures.
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公开(公告)号：US12092871B2
公开(公告)日：2024-09-17
申请号：US17573916
申请日：2022-01-12
申请人： Aditya Malik , Hyun Dai Park , Tin Komljenovic
发明人： Aditya Malik , Hyun Dai Park , Tin Komljenovic
CPC分类号： G02B6/14 , G02B6/1228 , G02B6/13 , G02B2006/12142
摘要： A device has a plurality of waveguide structures including two active (one of which comprises two sub-layers), two passive, and three intermediate waveguide structures on a common substrate. At least partial butt coupling between active and intermediate waveguide structures, and tapering in the intermediate and/or passive waveguide structures at each junction therebetween facilitates efficient optical mode transformations as optical signals travel through the device, either from a first sub-layer of the first active waveguide structure through the other sub-layer, then sequentially though a first intermediate waveguide structure, a passive waveguide structure, a second intermediate waveguide structure, a second active waveguide structure, a third intermediate structure, and a second passive waveguide structure; or in reverse from the second passive waveguide structure back through to the first sub-layer of the first active waveguide structure. Lithographic alignment marks facilitate precise mutual alignments between layers defining each of the waveguide structures.
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