公开(公告)号：US5804462A

公开(公告)日：1998-09-08

申请号：US565285

申请日：1995-11-30

申请人： Chung-Chiun Liu ,  Xiaodong Wang ,  Henry G. Hughes

发明人： Chung-Chiun Liu ,  Xiaodong Wang ,  Henry G. Hughes

IPC分类号： G01N33/00 ,  H01L29/84

CPC分类号： G01N33/0031 ,  G01N33/0037 ,  G01N33/004 ,  G01N33/0047

摘要： A process for forming different types of sensors, including metal oxide (10), calorimetric (44), and heterojunction (48), on the same semiconductor chip includes the steps of doping a top surface of a silicon substrate (16) with boron to form a diffusion region (18) for a resistive heater, forming a first silicon nitride layer (24) on the diffusion region, forming a first metal layer (26) on the first silicon nitride layer to provide a resistive temperature detector, forming a second silicon nitride layer (28) on the first metal layer, forming a second metal layer (34) on the second silicon nitride layer, and etching a sensing cavity (40) underneath and adjacent to the diffusion region using an anisotropic wet etchant and the diffusion region as an etch-stop. A metal oxide layer (36) is formed over the second metal layer for a metal oxide or heterojunction sensor. The sensor can optionally be suspended by tethers (38) within the sensing cavity.

摘要翻译： 在相同的半导体芯片上形成包括金属氧化物（10），量热（44）和异质结（48）的不同类型的传感器的方法包括以下步骤：用硼将硅衬底（16）的顶表面掺杂到 形成用于电阻加热器的扩散区域（18），在所述扩散区域上形成第一氮化硅层（24），在所述第一氮化硅层上形成第一金属层（26）以提供电阻温度检测器，形成第二 在所述第一金属层上形成氮化硅层（28），在所述第二氮化硅层上形成第二金属层（34），并且使用各向异性湿蚀刻剂和扩散区域在所述扩散区域的下方和邻近处蚀刻感测腔（40） 区域作为蚀刻停止。 金属氧化物层（36）形成在用于金属氧化物或异质结传感器的第二金属层的上方。 传感器可以可选地通过传感腔内的系绳（38）悬挂。

公开(公告)号：US06623620B2

公开(公告)日：2003-09-23

申请号：US09466865

申请日：1999-12-17

申请人： Ann Lai ,  Laurie A. Dudik ,  Chung-Chiun Liu

发明人： Ann Lai ,  Laurie A. Dudik ,  Chung-Chiun Liu

IPC分类号： G01N27407

CPC分类号： G01N27/4045 ,  G01N33/0042 ,  Y02A50/248

摘要： A thick film electrochemical micro-sensor device for detecting or monitoring sulfur dioxide, comprising a substrate to which is applied a working electrode, a counter electrode, a reference electrode, and optionally a heater and a temperature detector, wherein a portion of the electrodes is covered with an insulator, and a portion of the electrodes is covered with an electrolyte. The device is especially useful for detecting or monitoring sulfur dioxide in emission gases. A method of detecting or monitoring sulfur dioxide emissions using the electrochemical micro-sensor device includes contacting the emission gas with the sensor of the present invention, measuring the current output of the sensor, determining if the current output indicates the presence of sulfur dioxide, and generating a signal, that can be used to actuate a scrubber system when a pre-determined level of sulfur dioxide is detected.

摘要翻译： 一种用于检测或监测二氧化硫的厚膜电化学微传感器装置，包括施加工作电极，对电极，参考电极以及任选的加热器和温度检测器的衬底，其中电极的一部分 覆盖有绝缘体，并且一部分电极被电解质覆盖。 该装置特别适用于检测或监测排放气体中的二氧化硫。 使用电化学微量传感器装置检测或监测二氧化硫排放的方法包括使排放气体与本发明的传感器接触，测量传感器的电流输出，确定当前输出是否表示二氧化硫的存在，以及 产生信号，当检测到预定量的二氧化硫时，该信号可用于致动洗涤器系统。

公开(公告)号：US6023961A

公开(公告)日：2000-02-15

申请号：US54117

申请日：1998-04-02

申请人： Frederick M. Discenzo ,  Chung-Chiun Liu ,  Donald L. Feke ,  Laurie Ann Dudik

发明人： Frederick M. Discenzo ,  Chung-Chiun Liu ,  Donald L. Feke ,  Laurie Ann Dudik

IPC分类号： F16C19/52 ,  G01N11/16 ,  G01N29/02 ,  G01N33/28 ,  G01N33/30 ,  G01N9/00

CPC分类号： F16C19/52 ,  F16C41/008 ,  G01N11/16 ,  G01N29/022 ,  G01N33/2888 ,  G01N33/30 ,  F16N2250/30 ,  F16N2250/36 ,  F16N2260/18 ,  F16N2270/52 ,  F16N2270/54 ,  F16N2270/56 ,  G01N2291/0226 ,  G01N2291/0256 ,  G01N2291/02818 ,  G01N2291/106

摘要： A micro-viscosity sensor for measuring the viscosity of a lubricant. The micro-viscosity sensor including at least one finger-like element or an array of finger-like elements vertically extending from the surface of a semiconductor base, the at least one finger-like element being oscillated at a desired frequency. The power required to oscillate the at least one-finger-like element is monitored because the power required is a function of the viscosity of the lubricant. The sensor also includes a temperature detector, wherein the thermal conductivity of the temperature detector varies in correspondence with the temperature of the lubricant. A first set of electrical contacts provides for electrical connection to the at least one finger-like element; and a second set of electrical contacts provides for electrical connection to the temperature detector. The viscosity of the lubricant is determined based on the temperature of the lubricant correlated with the power required to oscillate the at least one-finger like element at a particular frequency.

摘要翻译： 用于测量润滑剂粘度的微粘度传感器。 微粘度传感器包括至少一个手指状元件或从半导体基底的表面垂直延伸的指状元件的阵列，所述至少一个指状元件以期望的频率振荡。 监测振荡至少一指指状元件所需的功率，因为​​所需的功率是润滑剂粘度的函数。 传感器还包括温度检测器，其中温度检测器的热导率根据润滑剂的温度而变化。 第一组电触点提供与至少一个手指状元件的电连接; 并且第二组电触点提供与温度检测器的电连接。 润滑剂的粘度基于与以特定频率振荡至少一个手指状元件所需的功率相关的润滑剂的温度来确定。

公开(公告)号：US4571292A

公开(公告)日：1986-02-18

申请号：US407566

申请日：1982-08-12

申请人： Chung-Chiun Liu ,  Vasilios A. Karagounis

发明人： Chung-Chiun Liu ,  Vasilios A. Karagounis

IPC分类号： G01N27/49 ,  G01N27/46

CPC分类号： G01N27/404

摘要： A sensor for an electrochemically active species, such as oxygen, uses more than two electrodes, namely, at least a working electrode, counter electrode and reference electrode. The sensor preferably is substantially planar, is made using thick film or thin film technique and accordingly may be very small. With the sensor in an electrolyte balanced reverse reactions occur, respectively, at the working and counter electrodes while no reaction occurs at the reference electrode, which is maintained in equilibrium with the electrolyte, and voltage between the working the reference electrodes is maintained constant. Current flow between the working and counter electrodes, then, provides an accurate, stable representation of species concentration.

摘要翻译： 用于电化学活性物质如氧的传感器使用两个以上的电极，即至少一个工作电极，对电极和参比电极。 传感器优选地基本上是平面的，使用厚膜或薄膜技术制造，因此可能非常小。 在传感器处于电解质时，分别在工作电极和对电极处发生平衡的反向反应，而在与电解质保持平衡的参考电极上没有发生反应，并且工作的参考电极之间的电压保持恒定。 然后，工作电极和对电极之间的电流提供了物质浓度的准确，稳定的表示。

公开(公告)号：US08247135B2

公开(公告)日：2012-08-21

申请号：US11226139

申请日：2005-09-14

申请人： Jesse S. Wainright ,  Laurie A. Dudik ,  Chung-Chiun Liu

发明人： Jesse S. Wainright ,  Laurie A. Dudik ,  Chung-Chiun Liu

IPC分类号： H01M4/64 ,  H01M8/24 ,  H01M2/14

CPC分类号： H01M8/004 ,  H01M4/78 ,  H01M4/8631 ,  H01M4/881 ,  H01M4/8828 ,  H01M4/8882 ,  H01M8/002 ,  H01M8/0247 ,  H01M8/2404 ,  H01M8/241 ,  H01M8/242

摘要： The invention is a flexible, micro-fabricated fuel cell and fuel cell stack that can be helically wound or bend into cylindrical shapes. The electrolyte is a proton exchange membrane (PEM) upon which can be printed, by ink jet means, the anode and cathode electrodes and the current collectors that convey current to or from the edges of the PEM which has a thickness on the order of 0.001 to 0.010 inch. Pluralities of the series connected fuel cell stacks can be arranged in electrical and physical parallel with one another to provide what are batteries of fuel cell stacks that can be connected by manifolds to sources of fuel and oxidizer. The invention is directed to a thin, light-weight, flexible fuel cell assembly that can be produced in ambient conditions using standard micro-fabrication techniques, such as thick film printing and ink jet deposition. Thick film printing techniques, screen printing or ink jet printing, are used to deposit porous current collectors on either side of the membrane.

摘要翻译： 本发明是一种柔性的，微型制造的燃料电池和燃料电池堆，可以螺旋缠绕或弯曲成圆柱形。 电解质是质子交换膜（PEM），可通过喷墨装置印刷阳极和阴极电极以及将电流传送到PEM边缘的电流，该PEM的厚度大约为0.001 到0.010英寸。 串联连接的燃料电池堆的多个可以彼此电气和物理平行布置，以提供什么是可以通过歧管连接到燃料和氧化剂源的燃料电池堆的电池。 本发明涉及一种薄的，重量轻的柔性燃料电池组件，其可以使用标准的微加工技术（例如厚膜印刷和喷墨沉积）在环境条件下制造。 厚膜印刷技术，丝网印刷或喷墨印刷用于在膜的任一侧上沉积多孔集流器。

公开(公告)号：US20110140885A1

公开(公告)日：2011-06-16

申请号：US13031311

申请日：2011-02-21

申请人： Gregory J. Hummer ,  Chung-Chiun Liu

发明人： Gregory J. Hummer ,  Chung-Chiun Liu

IPC分类号： G08B1/08

CPC分类号： G08B21/12 ,  G08B25/012 ,  G08B25/08

摘要： A detection system for an enclosed container for an enclosed cargo container includes a sensor device for sensing a material harmful to human beings within an enclosed cargo container and a detection device coupled to the sensor device for transmitting a corresponding signal to a monitoring device outside the cargo container. Containers which have harmful materials within them can be inspected or stopped before entering the country.

摘要翻译： 用于封闭货物集装箱的封闭容器的检测系统包括用于感测在封闭的货物集装箱内对人造成危害的材料的传感器装置和耦合到传感器装置的检测装置，用于将相应的信号传送到货物外部的监控装置 容器。 在进入国家之前，可以检查或停止在其内具有有害物质的容器。

公开(公告)号：US06740225B2

公开(公告)日：2004-05-25

申请号：US09799969

申请日：2001-03-06

申请人： Bonnie Gurry ,  Meijun Shao ,  Laurie Dudik ,  Chung-Chiun Liu

发明人： Bonnie Gurry ,  Meijun Shao ,  Laurie Dudik ,  Chung-Chiun Liu

IPC分类号： G01N27333

CPC分类号： G01N27/4045 ,  G01N33/182

摘要： A thick film electrochemical microsensor device for measuring or regulating chlorine and bromine in water, comprising a substrate to which is applied an optimum arrangement of at least two electrodes. The device is especially useful for measuring or regulating chlorine and bromine levels in swimming pool or spa water. A method of measuring or regulating ions of at least one of chlorine and bromine in water is also described, which comprises contacting the water with the microsensor of the present invention; measuring the current output of the microsensor; determining the level of at least one of chlorine and bromine indicated by the current output; and generating a signal.

摘要翻译： 一种用于测量或调节水中氯和溴的厚膜电化学微传感器装置，包括施加至少两个电极的最佳布置的基底。 该设备对于测量或调节游泳池或水疗中的氯和溴水平尤其有用。 还描述了测量或调节水中氯和溴中的至少一种的离子的方法，其包括使水与本发明的微传感器接触; 测量微传感器的电流输出; 确定由当前输出指示的氯和溴中的至少一个的水平; 并产生信号。

公开(公告)号：US6134946A

公开(公告)日：2000-10-24

申请号：US69136

申请日：1998-04-29

申请人： Chung-Chiun Liu ,  Robert F. Savinell ,  Zhihong Jin

发明人： Chung-Chiun Liu ,  Robert F. Savinell ,  Zhihong Jin

IPC分类号： G01N27/12 ,  G01N27/00

CPC分类号： G01N27/12

摘要： A tin oxide sol is deposited on platinum electrodes (12) of a sensor (10). The sol is calcined at a temperature of 500 to 800.degree. C. to produce a thin film of tin oxide with a thickness of about 150 nm to 2 .mu. and having a nano-crystalline structure with good stability. The sensor rapidly detects reducing gases, such as carbon monoxide, or hydrocarbons and organic vapors. Sensors using films calcined at around 700.degree. C. have high carbon monoxide selectivity with a response time of around 4 minutes and a recovery time of 1 minute, and therefore provide good detection systems for detection of trace amounts of pollutants such as toxic and flammable gases in homes, industrial settings, and hospitals.

摘要翻译： 氧化锡溶胶沉积在传感器（10）的铂电极（12）上。 将该溶胶在500〜800℃的温度下煅烧，制成厚度为150nm〜2μm的氧化锡薄膜，具有稳定性好的纳米晶体结构。 传感器快速检测还原气体，如一氧化碳，或碳氢化合物和有机蒸汽。 使用在约700℃煅烧的膜的传感器具有高一氧化碳选择性，响应时间约为4分钟，恢复时间为1分钟，因此提供了良好的检测系统，用于检测痕量的有毒和易燃气体 在家庭，工业环境和医院。

公开(公告)号：US4655880A

公开(公告)日：1987-04-07

申请号：US519071

申请日：1983-08-01

申请人： Chung-Chiun Liu

发明人： Chung-Chiun Liu

IPC分类号： A61B5/00 ,  C12Q1/00 ,  G01N33/487 ,  G01N27/48

CPC分类号： A61B5/1486 ,  C12Q1/005 ,  G01N27/3274 ,  A61B5/14865 ,  Y10S435/817

摘要： A sensor apparatus is disclosed for sensing substances, species, substrates, etc. using oxidase. The apparatus includes a pair of potentiostat operating electrode systems. In one embodiment each electrode system includes respective working, counter and reference electrodes, and in another embodiment each electrode system includes a respective working electrode and the counter and reference electrodes are shared by both electrode systems. The oxidase material is immobilized on the working electrode of one of the electrode systems. A method also is disclosed for concentration sensing using oxidases.

摘要翻译： 公开了一种使用氧化酶检测物质，物质，底物等的传感器装置。 该装置包括一对恒电位仪操作电极系统。 在一个实施例中，每个电极系统包括相应的工作电极，对置电极和参考电极，并且在另一实施例中，每个电极系统包括相应的工作电极，并且计数器和参考电极由两个电极系统共享。 氧化酶材料固定在电极系统之一的工作电极上。 公开了使用氧化酶的浓度感测的方法。

公开(公告)号：US07442291B1

公开(公告)日：2008-10-28

申请号：US10409895

申请日：2003-04-09

申请人： Frederick M. Discenzo ,  Chung-Chiun Liu ,  Laurie A. Dudik

发明人： Frederick M. Discenzo ,  Chung-Chiun Liu ,  Laurie A. Dudik

IPC分类号： B01D35/14

CPC分类号： B01D35/143 ,  B01D2201/54

摘要： A system and method relating to in situ monitoring, analysis, and control of a lubricating material within a lubrication filter assembly is provided. A filter-sensor integration comprises a lubrication filter assembly and at least one lubrication sensing assembly, wherein the lubrication sensing assembly comprising at least one sensor array, and the sensor array comprises of at least one sensor. The lubrication filter assembly comprises a housing which defines a chamber, wherein lubricating material enters the chamber through a filter material. The lubrication sensing assembly is embedded into the chamber of the lubrication filter assembly, and the lubrication sensing device is positioned relative to the filter material so that the at least one sensor of the sensor array senses in situ different parameters of the lubricating fluid, analyzes measured parameters to determine health of the system, and generates a control signal to protect machinery and processes.

摘要翻译： 提供了一种与润滑过滤器组件内的润滑材料的现场监测，分析和控制有关的系统和方法。 过滤器 - 传感器集成包括润滑过滤器组件和至少一个润滑感测组件，其中所述润滑感测组件包括至少一个传感器阵列，并且所述传感器阵列包括至少一个传感器。 润滑过滤器组件包括限定腔室的壳体，其中润滑材料通过过滤材料进入腔室。 润滑检测组件被嵌入到润滑过滤器组件的腔室中，并且润滑感测装置相对于过滤材料定位，使得传感器阵列的至少一个传感器原位感测润滑流体的不同参数，分析测量 参数来确定系统的健康状况，并产生一个控制信号来保护机械和过程。