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公开(公告)号:US20180050900A1
公开(公告)日:2018-02-22
申请号:US15676430
申请日:2017-08-14
Inventor: Stephen DUFFY , Colin Robert JENKINS , Tsjerk Hans HOEKSTRA
CPC classification number: B81B3/0072 , B81B2201/0257 , B81B2203/0127 , B81B2203/04 , B81B2207/03 , B81C1/00666 , H04R7/06 , H04R19/005 , H04R19/04 , H04R2201/003
Abstract: The application describes a MEMS transducer comprising a layer of conductive material provided on a surface of a layer of membrane material. The layer of conductive material comprises first and second regions, wherein the thickness and/or the conductivity of the/each first and second regions is different.