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公开(公告)号:US11873551B2
公开(公告)日:2024-01-16
申请号:US17705367
申请日:2022-03-27
Applicant: City University of Hong Kong
CPC classification number: C23C14/35 , C22C45/001 , C22C45/04 , C22C45/10 , C23C14/16
Abstract: An ultraflat and ultralow-friction metallic glass thin film is fabricated. The metallic glass thin film is a binary alloy, wherein a content of one metal element of the binary alloy is between 45 atomic % and 64 atomic %. The metallic glass thin film has an atomically smooth surface with a surface roughness Ra less than 0.1 nm and a total height of profile Rt less than 0.15 nm; the friction coefficient is below 1×10−2. Due to the metallic glass thin film being treated by ion bombardment, the metallic glass thin film is thermally ultrastable.