METHOD OF SEPARATING A GLASS SHEET FROM A CARRIER
    3.
    发明申请
    METHOD OF SEPARATING A GLASS SHEET FROM A CARRIER 审中-公开
    从载体分离玻璃片的方法

    公开(公告)号:US20150059411A1

    公开(公告)日:2015-03-05

    申请号:US14466460

    申请日:2014-08-22

    Abstract: A method of separating a thin glass substrate from a carrier plate to which edge portions of the glass substrate are bonded, including irradiating a surface of the glass substrate with a pulsed laser beam, the laser beam moving along a plurality of parallel scan paths within a raster envelope, producing relative motion between the raster envelope and the glass substrate so that the raster envelope is moved along an irradiation path on the unbonded central portion. The irradiating produces ablation of the glass substrate along the irradiation path that forms a channel having a width W1 at the first surface greater than a width W2 at the second surface and extending through the thickness of the glass substrate, thus separating a thin glass sheet from the glass substrate-carrier plate assembly.

    Abstract translation: 将薄玻璃基板与玻璃基板的边缘部分接合的载体板分离的方法,包括用脉冲激光束照射玻璃基板的表面,激光束沿着多个平行的扫描路径移动, 光栅包围,产生光栅包络和玻璃基底之间的相对运动,使得光栅包络沿着未结合的中心部分上的照射路径移动。 照射产生沿着照射路径的玻璃基板的烧蚀,所述照射路径形成在第一表面处的宽度W1大于第二表面处的宽度W2并且延伸穿过玻璃基板的厚度的通道,从而将薄玻璃板从 玻璃基板载体板组件。

Patent Agency Ranking