公开(公告)号：US07770231B2

公开(公告)日：2010-08-03

申请号：US11832881

申请日：2007-08-02

申请人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

发明人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

IPC分类号： G01N23/00

CPC分类号： G01Q10/04 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/38

摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

摘要翻译： 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

公开(公告)号：US20090032706A1

公开(公告)日：2009-02-05

申请号：US11832881

申请日：2007-08-02

申请人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

发明人： Craig Prater ,  Chanmin Su ,  Nghi Phan ,  Jeffrey M. Markakis ,  Craig Cusworth ,  Jian Shi ,  Johannes H. Kindt ,  Steven F. Nagle ,  Wenjun Fan

IPC分类号： G01N23/00

CPC分类号： G01Q10/04 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/38

摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

摘要翻译： 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动，以至少以30线/秒的速率扫描探针至少4微米的扫描范围，并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。

公开(公告)号：US08443459B2

公开(公告)日：2013-05-14

申请号：US13435086

申请日：2012-03-30

申请人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

发明人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

IPC分类号： G01Q10/00 ,  G01Q20/02 ,  G01Q60/24

CPC分类号： G01Q10/02 ,  G01Q20/02 ,  G01Q30/025

摘要： A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

摘要翻译： 高带宽SPM尖端扫描器包括在扫描头内可垂直移动的物镜，以增加感测光束的聚焦深度。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂 小谐振频率。 可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

公开(公告)号：US08166567B2

公开(公告)日：2012-04-24

申请号：US11687304

申请日：2007-03-16

申请人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

发明人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

IPC分类号： G01Q10/00 ,  G01Q20/02 ,  G01Q60/24

CPC分类号： G01Q10/02 ,  G01Q20/02 ,  G01Q30/025

摘要： A high-bandwidth SPM tip scanner is provided that additionally includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 μm. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

摘要翻译： 提供了一种高带宽SPM尖端扫描器，其另外包括可在扫描头内垂直移动以增加感测光束的聚焦深度的物镜。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂 小谐振频率。 以这种方式构造的高带宽尖端扫描器具有大于500Hz的基本谐振频率和小于10μm的感测光束光点小直径。 可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

公开(公告)号：US20120204295A1

公开(公告)日：2012-08-09

申请号：US13435086

申请日：2012-03-30

申请人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

发明人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

IPC分类号： G01Q10/00

CPC分类号： G01Q10/02 ,  G01Q20/02 ,  G01Q30/025

摘要： A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

摘要翻译： 高带宽SPM尖端扫描器包括在扫描头内可垂直移动的物镜，以增加感测光束的聚焦深度。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂 小谐振频率。 可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

公开(公告)号：US20080223119A1

公开(公告)日：2008-09-18

申请号：US11687304

申请日：2007-03-16

申请人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

发明人： Nghi Phan ,  Craig Cusworth ,  Craig Prater

IPC分类号： G01B5/28

CPC分类号： G01Q10/02 ,  G01Q20/02 ,  G01Q30/025

摘要： A high-bandwidth SPM tip scanner is provided that additionally includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 μm. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.

摘要翻译： 提供了一种高带宽SPM尖端扫描器，其另外包括可在扫描头内垂直移动以增加感测光束的聚焦深度的物镜。 优选地提供可移动光学器件以允许在SPM的探针上瞄准感测光束，并允许感测光束在扫描期间跟踪探针。 瞄准和跟踪允许在直接目视检查集成在SPM中的光学显微镜的聚焦照明光束上的探针上的小感测光束点的撞击，结果允许使用相对较小的悬臂 小谐振频率。 以这种方式构造的高带宽尖端扫描器具有大于500Hz的基本谐振频率以及小于10um的感测光束光点小直径。 可以在尺寸超过7 mm的大样品上扫描图像，分辨率小于1埃，扫描速度超过30赫兹。

公开(公告)号：US20060000263A1

公开(公告)日：2006-01-05

申请号：US11106366

申请日：2005-04-14

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G01B5/28

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.

公开(公告)号：US20090222958A1

公开(公告)日：2009-09-03

申请号：US12398011

申请日：2009-03-04

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G12B21/08

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.

摘要翻译： 一种方法包括通过在弯曲和/或扭转模式中动态地振动器械的悬臂来确定基于探针的器械的尖端接触样品和/或接触区域的点。 该方法还包括使用诸如振幅，相位和谐振频率的振荡特性来确定触点的状态并提供定量数据。 从这样获得的数据可以获得静态和准静态测量，包括接触刚度和弹性模量。 通过在不同的施加力下重复对多个力分布的静态测量，可以获得诸如蠕变和粘弹性模量的准静态测量，并使用已知理论对所得数据进行相关。

公开(公告)号：US08161805B2

公开(公告)日：2012-04-24

申请号：US12398011

申请日：2009-03-04

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G01B5/28 ,  G01Q90/00

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.

摘要翻译： 一种方法包括通过在弯曲和/或扭转模式中动态地振动器械的悬臂来确定基于探针的器械的尖端接触样品和/或接触区域的点。 该方法还包括使用诸如振幅，相位和谐振频率的振荡特性来确定接触的状态并提供定量数据。 从这样获得的数据可以获得静态和准静态测量，包括接触刚度和弹性模量。 通过在不同的施加力下重复对多个力分布的静态测量，可以获得诸如蠕变和粘弹性模量的准静态测量，并使用已知理论对所得数据进行相关。

公开(公告)号：US07596990B2

公开(公告)日：2009-10-06

申请号：US11106366

申请日：2005-04-14

申请人： Chanmin Su ,  Nghi Phan ,  Craig Prater

发明人： Chanmin Su ,  Nghi Phan ,  Craig Prater

IPC分类号： G01B5/28 ,  G01N13/16

CPC分类号： G01Q10/065 ,  G01Q60/366

摘要： A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.

摘要翻译： 控制基于探针的悬臂式仪器是为了抵消由于探针样品相互作用而对探针施加的横向载荷。 探针优选地包括主动悬臂，例如所谓的双压电晶片悬臂。 优选地通过监测探针操作的横向力相关性质（例如悬臂自由端偏转角）来实现力抵抗，并且在反馈下向悬臂和一个或多个单独的致动器中的至少一个施加电压以保持该特性作为探针 样品间距减小。 探头可以进一步使用接触弯曲和扭转共振特性中的至少一个来确定接触点和释放点。 通过对尖端特征的了解，可以获得探针样品相互作用的定量机械数据。