Fast-Scanning SPM and Method of Operating Same
    2.
    发明申请
    Fast-Scanning SPM and Method of Operating Same 有权
    快速扫描SPM和操作方法相同

    公开(公告)号:US20090032706A1

    公开(公告)日:2009-02-05

    申请号:US11832881

    申请日:2007-08-02

    IPC分类号: G01N23/00

    摘要: A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.

    摘要翻译: 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置,因此必须获得高分辨率图像。 该方法包括在SPM的探针和样品之间产生相对扫描运动,以至少以30线/秒的速率扫描探针至少4微米的扫描范围,并且控制与力控制回转的探针 - 样品相互作用 速率至少为1毫米/秒。 能够实现这些结果的优选SPM具有力控制器,其具有至少10kHz的至少闭环带宽的力控制带宽。

    Closed loop controller and method for fast scanning probe microscopy
    3.
    发明申请
    Closed loop controller and method for fast scanning probe microscopy 有权
    闭环控制器和快速扫描探针显微镜的方法

    公开(公告)号:US20080277582A1

    公开(公告)日:2008-11-13

    申请号:US11800679

    申请日:2007-05-07

    IPC分类号: G21K7/00 G01B5/28

    摘要: A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the controlling step attenuates noise in the actuator position compared to noise exhibited by the position sensor over the scan bandwidth. Scan frequencies up to a third of the first scanner resonance frequency or greater than 300 Hz are possible.

    摘要翻译: 操作测量仪器的方法包括使用致动器在扫描频率下产生探针和样品之间的相对运动。 该方法还包括使用在检测到的运动中呈现噪声的位置传感器来检测致动器的运动,以及使用反馈回路和前馈算法来控制致动器的位置。 在该实施例中,与位置传感器在扫描带宽上显示的噪声相比,控制步骤衰减了致动器位置的噪声。 扫描频率高达第一扫描仪共振频率的三分之一或大于300 Hz是可能的。

    Closed loop controller and method for fast scanning probe microscopy
    4.
    发明授权
    Closed loop controller and method for fast scanning probe microscopy 有权
    闭环控制器和快速扫描探针显微镜的方法

    公开(公告)号:US08904560B2

    公开(公告)日:2014-12-02

    申请号:US11800679

    申请日:2007-05-07

    摘要: A method of operating a metrology instrument includes generating relative motion between a probe and a sample at a scan frequency using an actuator. The method also includes detecting motion of the actuator using a position sensor that exhibits noise in the detected motion, and controlling the position of the actuator using a feedback loop and a feed forward algorithm. In this embodiment, the controlling step attenuates noise in the actuator position compared to noise exhibited by the position sensor over the scan bandwidth. Scan frequencies up to a third of the first scanner resonance frequency or greater than 300 Hz are possible.

    摘要翻译: 操作测量仪器的方法包括使用致动器在扫描频率下产生探针和样品之间的相对运动。 该方法还包括使用在检测到的运动中呈现噪声的位置传感器来检测致动器的运动,以及使用反馈回路和前馈算法来控制致动器的位置。 在该实施例中,与位置传感器在扫描带宽上显示的噪声相比,控制步骤衰减了致动器位置的噪声。 扫描频率高达第一扫描仪共振频率的三分之一或大于300 Hz是可能的。

    Method and apparatus of using peak force tapping mode to measure physical properties of a sample
    5.
    发明授权
    Method and apparatus of using peak force tapping mode to measure physical properties of a sample 有权
    使用峰值力攻丝模式测量样品的物理性质的方法和装置

    公开(公告)号:US08650660B2

    公开(公告)日:2014-02-11

    申请号:US13306867

    申请日:2011-11-29

    IPC分类号: G01Q20/00

    摘要: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

    摘要翻译: AFM成像(峰值力攻丝(PFT)模式)的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力,同时保持所有现有AFM操作模式可实现的扫描速度。 通过改进的分辨率和高的样品通量实现样品成像和机械性能测绘,该模式可在不同的环境中工作,包括气态,流体和真空。 通过消除专家用户监控成像的需要,便于使用。

    Method and apparatus of operating a scanning probe microscope
    6.
    发明授权
    Method and apparatus of operating a scanning probe microscope 有权
    操作扫描探针显微镜的方法和装置

    公开(公告)号:US08646109B2

    公开(公告)日:2014-02-04

    申请号:US12958323

    申请日:2010-12-01

    IPC分类号: G01Q10/00

    摘要: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

    摘要翻译: AFM成像(峰值力攻丝(PFT)模式)的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力,同时保持所有现有AFM操作模式可实现的扫描速度。 通过改进的分辨率和高的样品通量实现样品成像和机械性能测绘,该模式可在不同的环境中工作,包括气态,流体和真空。 通过消除专家用户监控成像的需要,便于使用。

    METHOD AND APPARATUS OF OPERATING A SCANNING PROBE MICROSCOPE
    7.
    发明申请
    METHOD AND APPARATUS OF OPERATING A SCANNING PROBE MICROSCOPE 有权
    操作扫描探针显微镜的方法和装置

    公开(公告)号:US20110167524A1

    公开(公告)日:2011-07-07

    申请号:US12958323

    申请日:2010-12-01

    IPC分类号: G01Q10/00

    摘要: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

    摘要翻译: AFM成像(峰值力攻丝(PFT)模式)的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力,同时保持所有现有AFM操作模式可实现的扫描速度。 通过改进的分辨率和高的样品通量实现样品成像和机械性能测绘,该模式可在不同的环境中工作,包括气态,流体和真空。 通过消除专家用户监控成像的需要,便于使用。

    Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample
    8.
    发明申请
    Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample 有权
    使用峰值力攻丝模式测量样品的物理性质的方法和装置

    公开(公告)号:US20120131702A1

    公开(公告)日:2012-05-24

    申请号:US13306867

    申请日:2011-11-29

    IPC分类号: G01Q10/00 G01Q20/02 G01Q20/00

    摘要: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

    摘要翻译: AFM成像(峰值力攻丝(PFT)模式)的改进模式使用力作为反馈变量来减少尖端 - 样本相互作用力,同时保持所有现有AFM操作模式可实现的扫描速度。 通过改进的分辨率和高的样品通量实现样品成像和机械性能测绘,该模式可在不同的环境中工作,包括气态,流体和真空。 通过消除专家用户监控成像的需要,便于使用。

    PROBE AND METHOD FOR A SCANNING PROBE MICROSCOPE
    9.
    发明申请
    PROBE AND METHOD FOR A SCANNING PROBE MICROSCOPE 审中-公开
    扫描探针显微镜的探针和方法

    公开(公告)号:US20060260388A1

    公开(公告)日:2006-11-23

    申请号:US11380349

    申请日:2006-04-26

    申请人: Chanmin Su Jian Shi

    发明人: Chanmin Su Jian Shi

    IPC分类号: G01B5/28

    CPC分类号: G01Q70/04 G01Q60/34 G01Q60/38

    摘要: A measurement instrument probe has an outwardly extending sensing lever having at least two sections, one section that, at least during operation, has a different effective spring constant than an effective spring constant of another section of the lever. The sensing lever preferably includes a cantilever that is fixed at or adjacent one end of the cantilever, and includes a probing lever stage is preferably disposed at or adjacent to a free end of the cantilever and the cantilever can be driven or excited in a manner that causes the probing lever stage to have an effective spring constant, k1, that is greater than an effective spring constant, k2, of at least one other lever stage disposed between the probing lever stage and where the cantilever is fixed. Alternatively, the sensing lever is fabricated to include a probing lever stage that is more stiff than at least one other lever stage substantially contiguous therewith.

    摘要翻译: 测量仪器探针具有至少两个部分的向外延伸的感测杆,至少在操作期间具有与杆的另一部分的有效弹簧常数不同的有效弹簧常数的一个部分。 感测杆优选地包括悬臂,该悬臂固定在悬臂的一端处或其附近,并且包括探测杆级优选地设置在悬臂的自由端处或邻近悬臂的自由端,并且悬臂可以以如下方式被驱动或激励: 使所述探测杆级具有大于有效弹簧常数k 1,所述有效弹簧常数k大于所述至少一个其它杠杆级的有效弹簧常数k 2 2 探测杆台和悬臂固定的位置。 或者,感测杆被制造成包括探测杆台,其比与其大致相邻的至少一个其他杠杆台更加僵硬。

    Cantilever free-decay measurement system with coherent averaging
    10.
    发明申请
    Cantilever free-decay measurement system with coherent averaging 有权
    悬臂自由衰减测量系统,具有相干平均

    公开(公告)号:US20080022759A1

    公开(公告)日:2008-01-31

    申请号:US11492740

    申请日:2006-07-25

    申请人: Chanmin Su Jian Shi

    发明人: Chanmin Su Jian Shi

    IPC分类号: G01B5/28

    CPC分类号: G01Q60/32 G01Q30/04

    摘要: A system and method for measuring sample material properties by coherently averaging cantilever free-decay signals in a scanning probe microscope is described.

    摘要翻译: 描述了通过在扫描探针显微镜中相干平均悬臂自由衰减信号来测量样品材料性质的系统和方法。