摘要:
A flow sensor apparatus and method. A seal with a conductive interconnect is provided that includes a mass flow sense element mounted to a housing containing a thick film and/or thin film bridge structure for sensing media (e.g., mass flow) within a flow tube. The seal effectively isolates wirebond pads and electrical connections from the sensed media. The media, whether liquid or gas, can contain ionics that eventually contaminate the top of the mass flow sense element. The use of the seal with the conductive interconnect thus seals off the electrical connections and prevents exposure to the sensed media.
摘要:
A flow sensor apparatus and method. A seal with a conductive interconnect is provided that includes a mass flow sense element mounted to a housing containing a thick film and/or thin film bridge structure for sensing media (e.g., mass flow) within a flow tube. The seal effectively isolates wirebond pads and electrical connections from the sensed media. The media, whether liquid or gas, can contain ionics that eventually contaminate the top of the mass flow sense element. The use of the seal with the conductive interconnect thus seals off the electrical connections and prevents exposure to the sensed media.
摘要:
A combinational sensor system for measuring multiple measurands includes a flow transducer, a pressure transducer and a humidity transducer. The pressure and humidity transducers are provided with independent access to sensed media and are ratiometric to a supply voltage, whereas the flow sensor is sensitive to openings to the flow path. The combinational sensor system utilizes elastomeric seals that include patterned electrically conductive and non-conductive seals. An ASIC is generally associated with the combinational sensor, and is located on a patterned electrically conductive substrate lead frame or for signal conditioning in order to detect any of the sensed measurands. The transducers can be arranged in a manner that distributes the transducers to optimize the accuracy and response time of the combinational sensor system.
摘要:
A packing method and system for measuring multiple measurands including bi-directional flow comprises of sampling ports arranged within a flow tube in a symmetrical pattern. The ports are arranged symmetrically with respect to the X and Y centerlines of the flow tube. In addition, the ports are also arranged symmetrical to the restrictor to minimize the amount of turbulent flow within the flow tube.
摘要:
An airflow sensor apparatus for measuring flow rate includes a pitot tube with a bypass channel wherein the pitot tube extends halfway into a flow channel in order to reduce a pressure drop. One or more upstream taps can be spaced along the pitot tube facing into a direction of a flow stream which directs the fiow to the bypass channel. At least one or more downstream taps can be located to face perpendicular to the direction of flow, such that the fluid after passing over a flow sensor passes through the downstream tap(s). The upstream tap senses stagnation pressure and the down stream tap senses static pressure which is exerted in all directions in the flow channel in order to determine a velocity pressure based on a difference between pressures.
摘要:
A fluid velocity sensor includes a sensor die for detecting a fluid property of a fluid flowing through a low resistance flow channel defined by a flow channel wall. One or more tap can be oriented facing into a direction of a flow stream of a fluid flowing through a flow channel defined by a channel wall, wherein the tap(s) leads to the low resistance flow channel, which directs the flow to the sensor die. At least one or more other taps can be located to face perpendicular to the direction of flow, such that the fluid after passing over the sensor die continues on a low resistance path to the other tap(s) facing perpendicular to the direction of flow in order to determine a velocity pressure based on a difference between pressures. The fluid velocity sensor can be arranged in a uni-directional or bi-directional fluid flow configuration.
摘要:
A sensor apparatus includes a heating element comprising an upstream side and a downstream side. A first heat sensing set is generally configured adjacent to the upstream side of the heating element and comprises a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern. A second heat sensing set can be configured adjacent to the downstream side of the heating element and comprises a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern.
摘要:
A MEMS based flow sensor is disclosed which generally incorporate isolation between a sensing structure and the sensed media. An internal flow channel can be configured by attaching a backing structure with flow openings to the back of the sensing structure. The sensing structure can be composed of a insulating layer with heating element and a dual sensing element which comprises of resistive thin films positioned in a Wheatstone bridge configuration over a backside cavity. The dual sensing element and its associated wirebonds can be isolated from the sensing media by directing the fluid through the internal flow channel. The completed sensing structure can be over packaged with standard processes such as epoxies and seals.
摘要:
A MEMS based flow sensor is disclosed which generally incorporate isolation between a sensing structure and the sensed media. An internal flow channel can be configured by attaching a backing structure with flow openings to the back of the sensing structure. The sensing structure can be composed of a insulating layer with heating element and a dual sensing element which comprises of resistive thin films positioned in a Wheatstone bridge configuration over a backside cavity. The dual sensing element and its associated wirebonds can be isolated from the sensing media by directing the fluid through the internal flow channel. The completed sensing structure can be over packaged with standard processes such as epoxies and seals.
摘要:
A pressure sensor stress isolation pedestal including a pressure sensor mounted in a housing with a circuit board. The sensor is bonded to a relatively tall pedestal. The height of the pedestal creates a stiff mounting structure that isolates the sensor from mechanical stress. The pedestal is formed by making a recess or moat-like structure around the pressure sensor in the housing that supports the sensor. Preferred sensors are MEMS type Pressure Sensors.