THERMAL ANEMOMETER FLOW SENSOR APPARATUS WITH A SEAL WITH CONDUCTIVE INTERCONNECT
    1.
    发明申请
    THERMAL ANEMOMETER FLOW SENSOR APPARATUS WITH A SEAL WITH CONDUCTIVE INTERCONNECT 有权
    热传感器流量传感器装置与导电互连密封

    公开(公告)号:US20100154532A1

    公开(公告)日:2010-06-24

    申请号:US12388670

    申请日:2009-02-19

    IPC分类号: G01F1/68

    摘要: A flow sensor apparatus and method. A seal with a conductive interconnect is provided that includes a mass flow sense element mounted to a housing containing a thick film and/or thin film bridge structure for sensing media (e.g., mass flow) within a flow tube. The seal effectively isolates wirebond pads and electrical connections from the sensed media. The media, whether liquid or gas, can contain ionics that eventually contaminate the top of the mass flow sense element. The use of the seal with the conductive interconnect thus seals off the electrical connections and prevents exposure to the sensed media.

    摘要翻译: 流量传感器装置及方法。 提供具有导电互连件的密封件,其包括安装到壳体上的质量流量感测元件,该壳体包含用于感测流管内的介质(例如,质量流)的厚膜和/或薄膜桥结构。 密封有效地将引线键和电气连接与感测到的介质隔离。 液体或气体的介质可以含有最终污染质量流量感测元件顶部的离子。 因此,使用导电互连的密封件密封电连接并防止暴露于所感测的介质。

    Thermal anemometer flow sensor apparatus with a seal with conductive interconnect
    2.
    发明授权
    Thermal anemometer flow sensor apparatus with a seal with conductive interconnect 有权
    热风速计流量传感器设备,带有导电互连的密封

    公开(公告)号:US07891238B2

    公开(公告)日:2011-02-22

    申请号:US12388670

    申请日:2009-02-19

    IPC分类号: A63B53/00

    摘要: A flow sensor apparatus and method. A seal with a conductive interconnect is provided that includes a mass flow sense element mounted to a housing containing a thick film and/or thin film bridge structure for sensing media (e.g., mass flow) within a flow tube. The seal effectively isolates wirebond pads and electrical connections from the sensed media. The media, whether liquid or gas, can contain ionics that eventually contaminate the top of the mass flow sense element. The use of the seal with the conductive interconnect thus seals off the electrical connections and prevents exposure to the sensed media.

    摘要翻译: 流量传感器装置及方法。 提供具有导电互连件的密封件,其包括安装到壳体上的质量流量感测元件,该壳体包含用于感测流管内的介质(例如,质量流)的厚膜和/或薄膜桥结构。 密封有效地将引线键和电气连接与感测到的介质隔离。 液体或气体的介质可以含有最终污染质量流量感测元件顶部的离子。 因此,使用导电互连的密封件密封电连接并防止暴露于所感测的介质。

    Packaging multiple measurands into a combinational sensor system using elastomeric seals
    3.
    发明授权
    Packaging multiple measurands into a combinational sensor system using elastomeric seals 有权
    使用弹性密封将多个被测量包装到组合传感器系统中

    公开(公告)号:US07832269B2

    公开(公告)日:2010-11-16

    申请号:US11821421

    申请日:2007-06-22

    IPC分类号: G01F15/00 G01K1/08 G01N19/10

    CPC分类号: G01D21/02

    摘要: A combinational sensor system for measuring multiple measurands includes a flow transducer, a pressure transducer and a humidity transducer. The pressure and humidity transducers are provided with independent access to sensed media and are ratiometric to a supply voltage, whereas the flow sensor is sensitive to openings to the flow path. The combinational sensor system utilizes elastomeric seals that include patterned electrically conductive and non-conductive seals. An ASIC is generally associated with the combinational sensor, and is located on a patterned electrically conductive substrate lead frame or for signal conditioning in order to detect any of the sensed measurands. The transducers can be arranged in a manner that distributes the transducers to optimize the accuracy and response time of the combinational sensor system.

    摘要翻译: 用于测量多个被测量的组合传感器系统包括流量传感器,压力传感器和湿度传感器。 压力和湿度传感器具有对感测介质的独立访问,并且与电源电压成比例,而流量传感器对流动路径的开口敏感。 组合传感器系统使用包括图案化导电和非导电密封件的弹性体密封件。 ASIC通常与组合传感器相关联,并且位于图案化的导电衬底引线框架上或用于信号调节以便检测任何感测的被测量。 换能器可以以分配换能器的方式布置,以优化组合传感器系统的精度和响应时间。

    AIRFLOW SENSOR WITH PITOT TUBE FOR PRESSURE DROP REDUCTION
    5.
    发明申请
    AIRFLOW SENSOR WITH PITOT TUBE FOR PRESSURE DROP REDUCTION 失效
    带压力管的气流传感器用于减压减压

    公开(公告)号:US20100101332A1

    公开(公告)日:2010-04-29

    申请号:US12685862

    申请日:2010-01-12

    IPC分类号: G01F1/46

    CPC分类号: G01F5/00 G01F1/46 G01F1/6842

    摘要: An airflow sensor apparatus for measuring flow rate includes a pitot tube with a bypass channel wherein the pitot tube extends halfway into a flow channel in order to reduce a pressure drop. One or more upstream taps can be spaced along the pitot tube facing into a direction of a flow stream which directs the fiow to the bypass channel. At least one or more downstream taps can be located to face perpendicular to the direction of flow, such that the fluid after passing over a flow sensor passes through the downstream tap(s). The upstream tap senses stagnation pressure and the down stream tap senses static pressure which is exerted in all directions in the flow channel in order to determine a velocity pressure based on a difference between pressures.

    摘要翻译: 用于测量流量的气流传感器装置包括具有旁通通道的皮托管,其中皮托管延伸到流动通道的中途,以减少压降。 一个或多个上游抽头可以沿着皮托管间隔开,所述皮托管面向流动​​流的方向,所述方向将所述流引导到所述旁路通道。 可以将至少一个或多个下游抽头定位成垂直于流动方向,使得流过流量传感器之后的流体通过下游丝锥。 上游龙头感测停滞压力,下游龙头感测在流动通道中在所有方向上施加的静压,以便基于压力差来确定速度压力。

    Ultra low pressure drop flow sensor
    6.
    发明授权
    Ultra low pressure drop flow sensor 有权
    超低压降流量传感器

    公开(公告)号:US07343823B2

    公开(公告)日:2008-03-18

    申请号:US11356814

    申请日:2006-02-17

    IPC分类号: G01F1/46

    摘要: A fluid velocity sensor includes a sensor die for detecting a fluid property of a fluid flowing through a low resistance flow channel defined by a flow channel wall. One or more tap can be oriented facing into a direction of a flow stream of a fluid flowing through a flow channel defined by a channel wall, wherein the tap(s) leads to the low resistance flow channel, which directs the flow to the sensor die. At least one or more other taps can be located to face perpendicular to the direction of flow, such that the fluid after passing over the sensor die continues on a low resistance path to the other tap(s) facing perpendicular to the direction of flow in order to determine a velocity pressure based on a difference between pressures. The fluid velocity sensor can be arranged in a uni-directional or bi-directional fluid flow configuration.

    摘要翻译: 流体速度传感器包括用于检测流过由流动通道壁限定的低阻力流动通道的流体的流体特性的传感器模具。 一个或多个水龙头可以被定向为面向流过流过通道壁限定的流动通道的流体流的方向,其中,所述水龙头通向低阻力流动通道,其将流动引导到传感器 死。 至少一个或多个其他水龙头可以被定位成垂直于流动方向面对,使得在通过传感器模头之后的流体在低阻力路径上继续到另一个垂直于流动方向的水龙头 以确定基于压力差之间的速度压力。 流体速度传感器可以布置成单向或双向流体流动配置。

    Interdigitated, full wheatstone bridge flow sensor transducer
    7.
    发明授权
    Interdigitated, full wheatstone bridge flow sensor transducer 有权
    交错式,全麦克斯通桥式流量传感器

    公开(公告)号:US07278309B2

    公开(公告)日:2007-10-09

    申请号:US11366653

    申请日:2006-03-01

    IPC分类号: G01F1/68

    CPC分类号: G01F1/6845 G01F1/688

    摘要: A sensor apparatus includes a heating element comprising an upstream side and a downstream side. A first heat sensing set is generally configured adjacent to the upstream side of the heating element and comprises a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern. A second heat sensing set can be configured adjacent to the downstream side of the heating element and comprises a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern.

    摘要翻译: 传感器装置包括加热元件,该加热元件包括上游侧和下游侧。 第一感测组件通常配置成与加热元件的上游侧相邻,并且包括第一感测元件和第二感测元件,第一和第二感测元件被构造成蛇形,交错图案。 第二感测组可以被配置成与加热元件的下游侧相邻,并且包括第三感测元件和第四感测元件,第三和第四感测元件被构造成蛇形,叉指形式。

    MEMS structure for flow sensor
    8.
    发明授权
    MEMS structure for flow sensor 有权
    流量传感器的MEMS结构

    公开(公告)号:US07603898B2

    公开(公告)日:2009-10-20

    申请号:US11960192

    申请日:2007-12-19

    IPC分类号: G01F15/00

    CPC分类号: G01F1/6845 G01F15/006

    摘要: A MEMS based flow sensor is disclosed which generally incorporate isolation between a sensing structure and the sensed media. An internal flow channel can be configured by attaching a backing structure with flow openings to the back of the sensing structure. The sensing structure can be composed of a insulating layer with heating element and a dual sensing element which comprises of resistive thin films positioned in a Wheatstone bridge configuration over a backside cavity. The dual sensing element and its associated wirebonds can be isolated from the sensing media by directing the fluid through the internal flow channel. The completed sensing structure can be over packaged with standard processes such as epoxies and seals.

    摘要翻译: 公开了一种基于MEMS的流量传感器,其通常结合感测结构和感测介质之间的隔离。 可以通过将具有流动开口的背衬结构附接到感测结构的背面来构造内部流动通道。 感测结构可以由具有加热元件的绝缘层和双重感测元件构成,双重感测元件包括位于惠斯通电桥结构中的电阻薄膜,该电阻薄膜位于背侧腔体上。 通过将流体引导通过内部流动通道,双重传感元件及其相关的引线键可以与感测介质隔离。 完整的传感结构可以用标准工艺过程包装,如环氧树脂和密封。

    MEMS STRUCTURE FOR FLOW SENSOR
    9.
    发明申请
    MEMS STRUCTURE FOR FLOW SENSOR 有权
    流量传感器的MEMS结构

    公开(公告)号:US20090158838A1

    公开(公告)日:2009-06-25

    申请号:US11960192

    申请日:2007-12-19

    IPC分类号: G01F15/00

    CPC分类号: G01F1/6845 G01F15/006

    摘要: A MEMS based flow sensor is disclosed which generally incorporate isolation between a sensing structure and the sensed media. An internal flow channel can be configured by attaching a backing structure with flow openings to the back of the sensing structure. The sensing structure can be composed of a insulating layer with heating element and a dual sensing element which comprises of resistive thin films positioned in a Wheatstone bridge configuration over a backside cavity. The dual sensing element and its associated wirebonds can be isolated from the sensing media by directing the fluid through the internal flow channel. The completed sensing structure can be over packaged with standard processes such as epoxies and seals.

    摘要翻译: 公开了一种基于MEMS的流量传感器,其通常结合感测结构和感测介质之间的隔离。 可以通过将具有流动开口的背衬结构附接到感测结构的背面来构造内部流动通道。 感测结构可以由具有加热元件的绝缘层和双重感测元件构成,双重感测元件包括位于惠斯通电桥结构中的电阻薄膜,该电阻薄膜位于背侧腔体上。 通过将流体引导通过内部流动通道,双重传感元件及其相关的引线键可以与感测介质隔离。 完整的传感结构可以用标准工艺过程包装,如环氧树脂和密封。

    Pressure sensor stress isolation pedestal
    10.
    发明申请
    Pressure sensor stress isolation pedestal 有权
    压力传感器应力隔离基座

    公开(公告)号:US20090071260A1

    公开(公告)日:2009-03-19

    申请号:US11901750

    申请日:2007-09-19

    IPC分类号: G01L7/00

    CPC分类号: G01L19/147 G01L19/146

    摘要: A pressure sensor stress isolation pedestal including a pressure sensor mounted in a housing with a circuit board. The sensor is bonded to a relatively tall pedestal. The height of the pedestal creates a stiff mounting structure that isolates the sensor from mechanical stress. The pedestal is formed by making a recess or moat-like structure around the pressure sensor in the housing that supports the sensor. Preferred sensors are MEMS type Pressure Sensors.

    摘要翻译: 一种压力传感器应力隔离基座,包括安装在具有电路板的壳体中的压力传感器。 传感器连接到相对较高的基座上。 基座的高度创建了一个刚性的安装结构,将传感器与机械应力隔离开来。 基座通过在支撑传感器的壳体中的压力传感器周围形成凹部或护城河状结构而形成。 优选的传感器是MEMS型压力传感器。