TRANSPARENT VAPOR-DEPOSITED FILM
    2.
    发明申请
    TRANSPARENT VAPOR-DEPOSITED FILM 有权
    透明蒸汽沉积膜

    公开(公告)号:US20150275349A1

    公开(公告)日:2015-10-01

    申请号:US14429899

    申请日:2013-09-26

    Abstract: Employed is a roller-type continuous vapor-deposited film forming device in which a film-forming section and a preprocessing section provided with a plasma preprocessing device are arranged in series at a distance from each other. With a substrate transported at a high speed, plasma (P) is supplied to the substrate surface side while set to an electrically positive potential by a plasma preprocessing means for supplying the plasma toward the substrate (S) in a space enclosed in a preprocessing roller, and enclosed in a plasma supply means for supplying a plasma-forming gas and in a magnet (21), which is a magnetism formation means. An active preprocessed surface is formed on the surface of the substrate (S). An inorganic oxide vapor-deposited film having as a principal component thereof an aluminum oxide containing AL-C covalent bonds is immediately formed at high speed in succession on the preprocessed surface of the substrate to produce a highly adhesive transparent vapor-deposited film.

    Abstract translation: 采用辊式连续蒸镀膜形成装置,其中成膜部分和设有等离子体预处理装置的预处理部分彼此间隔地排列成一列。 利用高速运送的基板,通过等离子体预处理装置将等离子体(P)供给到基板表面侧,同时将等离子体供给到封装在预处理辊中的空间中的基板(S) 并且被包围在用于供应等离子体形成气体的等离子体供给装置和作为磁性形成装置的磁体(21)中。 在基板(S)的表面上形成活性预处理表面。 在基板的预处理表面上立即高速连续地形成以Al-C共价键为主要成分的氧化铝作为主要成分的无机氧化物蒸镀膜,生成高粘合性的透明蒸镀膜。

Patent Agency Ranking