公开(公告)号：US20220161366A1

公开(公告)日：2022-05-26

申请号：US17438787

申请日：2020-03-12

Applicant: DENKA COMPANY LIMITED

Inventor： Akimasa YUASA ,  Yoshiyuki ESHIMA ,  Daiki FUJIYOSHI ,  Seiji KOBASHI ,  Koji NISHIMURA

IPC: B23K26/364 ,  B28D5/04 ,  C04B41/00 ,  C04B41/53 ,  C04B41/91 ,  C04B35/584 ,  C04B35/581

Abstract: A scribe line is formed on a first surface of a nitride ceramic base material by a laser. Next, the nitride ceramic base material is divided along the scribe line. The scribe line includes a plurality of recessed portions. The plurality of recessed portions are formed in a row on the first surface of the nitride ceramic base material. A depth of each of the plurality of recessed portions is equal to or greater than 0.70 times and equal to or smaller than 1.10 times an opening width of each of the plurality of recessed portions. The opening width of each of the plurality of recessed portions is equal to or greater than 1.00 times and equal to or smaller than 1.10 times an inter-center distance of the plurality of recessed portions.