公开(公告)号：US20180195922A1

公开(公告)日：2018-07-12

申请号：US15738431

申请日：2016-06-02

Applicant: DENSO CORPORATION

Inventor： Kazuyuki OONO ,  Kouji HASHIMOTO

IPC: G01L9/06 ,  H01L29/84 ,  H01L41/113 ,  G01L19/14 ,  G01L19/00 ,  G01L9/00

Abstract: A pressure sensor includes a sensor chip and a resin portion. The sensor chip extends in a lengthwise direction and includes a membrane whose length in a thickness direction perpendicular to the lengthwise direction is smaller than another part, and a piezoelectric element provided in the membrane. The sensor chip includes a fixed end that is covered with and fixed to the resin portion, and a free end opposite from the fixed end in the lengthwise direction. The free end is spaced away from the resin portion in the lengthwise direction, and the membrane is located in the free end. A shortest separation distance between the membrane and a part of the resin portion covering the sensor chip is equal to or larger than a length of the sensor chip along a crosswise direction of the sensor chip perpendicular to both the lengthwise direction and the thickness direction.

公开(公告)号：US20210018391A1

公开(公告)日：2021-01-21

申请号：US16925602

申请日：2020-07-10

Applicant: DENSO CORPORATION

Inventor： Kazuyuki OONO

IPC: G01L27/00 ,  G01L19/00

Abstract: A sensor device changes a supply voltage, and examines whether output signals of a signal processing circuit including a pressure signal and a temperature signal change in a manner that follows the supply voltage change caused by a voltage variation control unit, for a determination of whether a signal processing circuit is normal or abnormal.

公开(公告)号：US20160334292A1

公开(公告)日：2016-11-17

申请号：US15111494

申请日：2015-02-27

Applicant: DENSO CORPORATION

Inventor： Kazuyuki OONO

IPC: G01L13/02 ,  G01L19/14 ,  G01L9/00

CPC classification number: G01L13/026 ,  G01L9/00 ,  G01L9/0041 ,  G01L9/0054 ,  G01L19/14 ,  H01L29/84

Abstract: A pressure sensor includes: a first substrate having first and second diaphragms on one surface provided by first and second recesses on another surface; first and second detecting elements on the first and second diaphragms; a second substrate providing a first reference pressure chamber with the one surface of the first substrate; a third substrate providing a second reference pressure chamber sealing the second recess; and a calculator calculating an offset by a difference between reference and inspection signals and detecting the pressure of the measurement medium by a difference between the detection signal and the offset value. The first detecting element outputs the detection or inspection signal according to pressure difference between the first reference pressure and reference medium pressure or measurement medium pressure in the first recess. The second detecting element outputs the reference signal according to a difference between the first and second reference pressure.

Abstract translation: 压力传感器包括：第一基板，其在一个表面上具有由另一表面上的第一和第二凹槽提供的第一和第二隔膜; 第一和第二隔膜上的第一和第二检测元件; 第二衬底，其提供具有所述第一衬底的所述一个表面的第一参考压力室; 提供密封所述第二凹部的第二参考压力室的第三衬底; 以及计算器，通过参考和检查信号之间的差计算偏移量，并通过检测信号和偏移值之间的差来检测测量介质的压力。 第一检测元件根据第一凹部中的第一参考压力和参考介质压力或测量介质压力之间的压力差输出检测或检查信号。 第二检测元件根据第一和第二参考压力之差输出参考信号。