摘要:
A sensor includes a housing having a body, a plurality of ports, and a plurality of cavities. The ports include a first port and a second port, and the cavities include a first cavity disposed in the first port and a second cavity disposed in the second port. The sensor includes a first diaphragm disposed in the first port and enclosing the first cavity and a second diaphragm disposed in the second port and enclosing the second cavity. The first diaphragm and the second diaphragm are coplanar with one another in a first plane. The sensor includes a die disposed in the first cavity and having a membrane that is deflectable according to a differential pressure between a first pressure in the first cavity and a second pressure in the second cavity. The die is attached to the housing along a second plane parallel to the first plane.
摘要:
An apparatus includes a header containing a sensor configured to measure pressure and a sensor body connected to the header, where the sensor body and the header form a pressure vessel configured to receive an input pressure. The header is connected to the sensor body such that the input pressure received on an inner surface of the header is substantially equal to the input pressure received on an outer surface of the header. A lowest connection point of the header to the sensor body may be located at or above a highest point at which the input pressure extends into the header. A lower portion of the header may be unconnected to the sensor body and extend into an interior volume of the sensor body. The header may include a vent configured to expose the sensor to atmospheric pressure or a lower-pressure input pressure.
摘要:
A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.
摘要:
An apparatus, for controlling signal passage, includes a first passageway for a first fluid, a second passageway for a second fluid, and an interposed chamber. A first, movable diaphragm at a first chamber junction and a second, movable diaphragm at a second chamber junction, with a third fluid bound there between and interposed between the first and second passageways. A device varies a volume of the third fluid bound between the diaphragms and thus moves the diaphragms. The diaphragms each have at least one position that permits passage of a pressure signal between the first fluid in the first passageway and the second fluid in the second passageway through the third fluid bound between the diaphragms. The diaphragms each have at least one position that prohibits passage of a pressure signal.
摘要:
A manometer with a cadence indicator includes a housing and a gas pressure indicator interfaced to the housing. An input port of the housing is for connecting the manometer to a source of gas pressure, such that the gas pressure at the input port is reflected in the gas pressure indicator, providing a pressure reading. A cadence module is interfaced to the housing such that cadence is provided concurrently from the local of the gas pressure indicator. Cadence is provided by a flashing light or audible noise
摘要:
Systems and methods for a pressure sensor are provided, where the pressure sensor comprises a housing having a high side input port that allows a high pressure media to enter a high side of the housing and a low side input port that allows a low pressure media to enter a low side of the housing when the housing is placed in an environment containing the high and low pressure media; a substrate mounted within the housing; a stress isolation member mounted to the substrate; a die stack having sensing circuitry bonded to the stress isolation member; a low side atomic layer deposition (ALD) applied to surfaces, of the substrate, the stress isolation member, and the die stack, exposed to the low side input port; and a high side ALD applied to surfaces, of the stress isolation member and the die stack, exposed to the high side input port.
摘要:
A process pressure measuring system includes a transmitter having a first sealed system in which a first outlet couples to a pressure sensor, a first isolator diaphragm assembly, a first capillary passage, and a first isolation fluid. The first isolation fluid couples a first pressure from the first isolator diaphragm to the first outlet and the pressure sensor. A second sealed system includes a second pressure outlet that is coupled to the first isolator diaphragm assembly, a second isolator diaphragm assembly, a second capillary passage and a second isolation fluid. The second isolation fluid is adapted for use in a first temperature range and couples a pressure from the second isolator diaphragm assembly to the second pressure outlet. A third sealed system includes a third pressure outlet that is coupled to the second isolator diaphragm assembly, a third isolator diaphragm assembly, a third capillary passage and a third isolation fluid. The third isolator fluid is adapted for use in a second temperature range and couples a process pressure to the third pressure outlet.
摘要:
A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.
摘要:
A MEMS differential pressure sensing element is provided by two separate silicon dies attached to opposite sides of a silicon or glass spacer. The spacer is hollow. If the spacer is silicon, the dies are preferably attached to the hollow spacer using silicon-to-silicon bonding provided in part by silicon oxide layers. If the spacer is glass, the dies can be attached to the hollow spacer using anodic bonding. Conductive vias extend through the layers and provide electrical connections between Wheatstone bridge circuits formed from piezoresistors in the silicon dies.
摘要:
Disclosed is a combustion apparatus using an air fuel ratio sensor, which detects the operation of the air fuel sensor based on pressure of gas and air introduced into a combustion chamber and adjusts the amount of gas and air introduced into the combustion chamber using a controller based on data detected by the air fuel sensor. The combustion apparatus includes a combustion chamber of a boiler; a blower installed in an air feeding line communicated with the the combustion chamber; an electronic proportional gas valve installed in a gas feeding line communicated with the combustion chamber; an air fuel ratio sensor including a movement section connected to the combustion chamber, the blower and the electronic proportional gas valve and moved up and down according to pneumatic pressure supplied thereto from the combustion chamber, the blower and the electronic proportional gas valve, and a distance sensor for detecting a moving distance of the movement section; and a controller for adjusting an amount of gas and air based on data detected by the distance sensor.