Sensor Having a Plurality of Diaphragms
    1.
    发明公开

    公开(公告)号:US20240328882A1

    公开(公告)日:2024-10-03

    申请号:US18193731

    申请日:2023-03-31

    IPC分类号: G01L13/02 G01L7/08

    CPC分类号: G01L13/026 G01L7/084

    摘要: A sensor includes a housing having a body, a plurality of ports, and a plurality of cavities. The ports include a first port and a second port, and the cavities include a first cavity disposed in the first port and a second cavity disposed in the second port. The sensor includes a first diaphragm disposed in the first port and enclosing the first cavity and a second diaphragm disposed in the second port and enclosing the second cavity. The first diaphragm and the second diaphragm are coplanar with one another in a first plane. The sensor includes a die disposed in the first cavity and having a membrane that is deflectable according to a differential pressure between a first pressure in the first cavity and a second pressure in the second cavity. The die is attached to the housing along a second plane parallel to the first plane.

    PRESSURE MODULATOR
    4.
    发明申请
    PRESSURE MODULATOR 有权
    压力调节器

    公开(公告)号:US20160146369A1

    公开(公告)日:2016-05-26

    申请号:US14551296

    申请日:2014-11-24

    IPC分类号: F16K31/126 F16K7/10

    摘要: An apparatus, for controlling signal passage, includes a first passageway for a first fluid, a second passageway for a second fluid, and an interposed chamber. A first, movable diaphragm at a first chamber junction and a second, movable diaphragm at a second chamber junction, with a third fluid bound there between and interposed between the first and second passageways. A device varies a volume of the third fluid bound between the diaphragms and thus moves the diaphragms. The diaphragms each have at least one position that permits passage of a pressure signal between the first fluid in the first passageway and the second fluid in the second passageway through the third fluid bound between the diaphragms. The diaphragms each have at least one position that prohibits passage of a pressure signal.

    摘要翻译: 一种用于控制信号通道的装置包括用于第一流体的第一通道,用于第二流体的第二通道和介入的腔室。 第一室连接处的第一可移动隔膜和在第二室接合处的第二可移动隔膜,其中第三流体限定在第一室和第二通道之间并插入在第一和第二通道之间。 装置改变膜片之间限定的第三流体的体积,从而移动隔膜。 每个隔膜具有至少一个位置,允许第一通道中的第一流体和第二通道中的第二流体之间的压力信号通过限制在隔膜之间的第三流体。 每个隔膜具有至少一个禁止压力信号通过的位置。

    Manometer with Cadence Indicator
    5.
    发明申请
    Manometer with Cadence Indicator 有权
    压力计与Cadence指示器

    公开(公告)号:US20150352001A1

    公开(公告)日:2015-12-10

    申请号:US14296548

    申请日:2014-06-05

    IPC分类号: A61H31/00

    摘要: A manometer with a cadence indicator includes a housing and a gas pressure indicator interfaced to the housing. An input port of the housing is for connecting the manometer to a source of gas pressure, such that the gas pressure at the input port is reflected in the gas pressure indicator, providing a pressure reading. A cadence module is interfaced to the housing such that cadence is provided concurrently from the local of the gas pressure indicator. Cadence is provided by a flashing light or audible noise

    摘要翻译: 具有节奏指示器的压力计包括与壳体接口的壳体和气体压力指示器。 壳体的输入端口用于将压力计连接到气体压力源,使得输入端口处的气体压力反映在气体压力指示器中,从而提供压力读数。 节奏模块与壳体接口,使得从气体压力指示器的当地同时提供节奏。 Cadence由闪烁的光线或可听见的噪音提供

    Systems and methods for a pressure sensor having a two layer die structure
    6.
    发明授权
    Systems and methods for a pressure sensor having a two layer die structure 有权
    具有双层模具结构的压力传感器的系统和方法

    公开(公告)号:US08883536B2

    公开(公告)日:2014-11-11

    申请号:US14191006

    申请日:2014-02-26

    发明人: Gregory C. Brown

    IPC分类号: H01L21/50 G01L7/08 B81C1/00

    摘要: Systems and methods for a pressure sensor are provided, where the pressure sensor comprises a housing having a high side input port that allows a high pressure media to enter a high side of the housing and a low side input port that allows a low pressure media to enter a low side of the housing when the housing is placed in an environment containing the high and low pressure media; a substrate mounted within the housing; a stress isolation member mounted to the substrate; a die stack having sensing circuitry bonded to the stress isolation member; a low side atomic layer deposition (ALD) applied to surfaces, of the substrate, the stress isolation member, and the die stack, exposed to the low side input port; and a high side ALD applied to surfaces, of the stress isolation member and the die stack, exposed to the high side input port.

    摘要翻译: 提供了用于压力传感器的系统和方法,其中压力传感器包括具有允许高压介质进入壳体的高侧的高侧输入端口的壳体和允许低压介质 当外壳放置在包含高压和低压介质的环境中时,进入外壳的低侧; 安装在所述壳体内的基板; 安装到所述基板的应力隔离构件; 具有结合到所述应力隔离构件的感测电路的管芯堆叠; 施加到暴露于低侧输入端口的衬底,应力隔离构件和管芯叠层的表面的低侧原子层沉积(ALD); 并且施加到暴露于高侧输入端口的应力隔离构件和管芯叠层的表面的高边ALD。

    REMOTE SEAL PROCESS PRESSURE MEASURING SYSTEM
    7.
    发明申请
    REMOTE SEAL PROCESS PRESSURE MEASURING SYSTEM 有权
    远程密封过程压力测量系统

    公开(公告)号:US20140090476A1

    公开(公告)日:2014-04-03

    申请号:US13630998

    申请日:2012-09-28

    申请人: Rosemount Inc.

    IPC分类号: G01L19/06

    摘要: A process pressure measuring system includes a transmitter having a first sealed system in which a first outlet couples to a pressure sensor, a first isolator diaphragm assembly, a first capillary passage, and a first isolation fluid. The first isolation fluid couples a first pressure from the first isolator diaphragm to the first outlet and the pressure sensor. A second sealed system includes a second pressure outlet that is coupled to the first isolator diaphragm assembly, a second isolator diaphragm assembly, a second capillary passage and a second isolation fluid. The second isolation fluid is adapted for use in a first temperature range and couples a pressure from the second isolator diaphragm assembly to the second pressure outlet. A third sealed system includes a third pressure outlet that is coupled to the second isolator diaphragm assembly, a third isolator diaphragm assembly, a third capillary passage and a third isolation fluid. The third isolator fluid is adapted for use in a second temperature range and couples a process pressure to the third pressure outlet.

    摘要翻译: 过程压力测量系统包括具有第一密封系统的变送器,其中第一出口耦合到压力传感器,第一隔离膜组件,第一毛细管通道和第一隔离流体。 第一隔离流体将来自第一隔离膜的第一压力与第一出口和压力传感器耦合。 第二密封系统包括耦合到第一隔离膜组件的第二压力出口,第二隔离膜组件,第二毛细管通道和第二隔离流体。 第二隔离流体适于在第一温度范围内使用,并且将来自第二隔离膜隔膜组件的压力耦合到第二压力出口。 第三密封系统包括耦合到第二隔离膜组件的第三压力出口,第三隔离膜组件,第三毛细管通道和第三隔离流体。 第三隔离器流体适于在第二温度范围内使用并将过程压力耦合到第三压力出口。

    DIFFERENTIAL PRESSURE SENSOR DEVICE
    9.
    发明申请
    DIFFERENTIAL PRESSURE SENSOR DEVICE 有权
    差压传感器装置

    公开(公告)号:US20130087863A1

    公开(公告)日:2013-04-11

    申请号:US13267965

    申请日:2011-10-07

    IPC分类号: H01L29/84

    摘要: A MEMS differential pressure sensing element is provided by two separate silicon dies attached to opposite sides of a silicon or glass spacer. The spacer is hollow. If the spacer is silicon, the dies are preferably attached to the hollow spacer using silicon-to-silicon bonding provided in part by silicon oxide layers. If the spacer is glass, the dies can be attached to the hollow spacer using anodic bonding. Conductive vias extend through the layers and provide electrical connections between Wheatstone bridge circuits formed from piezoresistors in the silicon dies.

    摘要翻译: MEMS差压感测元件由附接到硅或玻璃间隔件的相对侧的两个分开的硅模具提供。 间隔件是中空的。 如果间隔物是硅,则模具优选地通过部分由氧化硅层提供的硅 - 硅键合附着到中空间隔物上。 如果间隔物是玻璃,则可以使用阳极接合将模具附接到中空间隔物。 导电通孔延伸穿过这些层,并提供由硅模具中的压阻器形成的惠斯通电桥电路之间的电连接。

    Air fuel ratio sensor of incinerator
    10.
    发明授权
    Air fuel ratio sensor of incinerator 失效
    焚烧炉空燃比传感器

    公开(公告)号:US07874834B2

    公开(公告)日:2011-01-25

    申请号:US11795111

    申请日:2006-01-11

    申请人: Tae-Sik Min

    发明人: Tae-Sik Min

    IPC分类号: F23N1/00 F24H3/00

    摘要: Disclosed is a combustion apparatus using an air fuel ratio sensor, which detects the operation of the air fuel sensor based on pressure of gas and air introduced into a combustion chamber and adjusts the amount of gas and air introduced into the combustion chamber using a controller based on data detected by the air fuel sensor. The combustion apparatus includes a combustion chamber of a boiler; a blower installed in an air feeding line communicated with the the combustion chamber; an electronic proportional gas valve installed in a gas feeding line communicated with the combustion chamber; an air fuel ratio sensor including a movement section connected to the combustion chamber, the blower and the electronic proportional gas valve and moved up and down according to pneumatic pressure supplied thereto from the combustion chamber, the blower and the electronic proportional gas valve, and a distance sensor for detecting a moving distance of the movement section; and a controller for adjusting an amount of gas and air based on data detected by the distance sensor.

    摘要翻译: 公开了一种使用空燃比传感器的燃烧装置,其基于引入到燃烧室中的气体和空气的压力来检测空气燃料传感器的运转,并且使用基于控制器的调节器来调节引入燃烧室的气体和空气的量 关于由空气燃料传感器检测到的数据。 燃烧装置包括锅炉的燃烧室; 鼓风机,其安装在与所述燃烧室连通的空气供给管线中; 安装在与燃烧室连通的气体供给管线中的电子比例气体阀; 空气燃料比传感器,包括连接到燃烧室的运动部分,鼓风机和电子比例气体阀,并且根据从燃烧室,鼓风机和电子比例气体阀供应的气动压力上下移动,以及 距离传感器,用于检测运动部分的移动距离; 以及基于由距离传感器检测到的数据来调节气体和空气的量的控制器。