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公开(公告)号：US20190242771A1
公开(公告)日：2019-08-08
申请号：US16383870
申请日：2019-04-15
发明人： Ryohei HAMAZAKI
CPC分类号： G01L9/12 , G01L1/142 , G01L9/00 , G01L9/0072 , H01L29/84
摘要： A pressure sensor device in a pressure sensor module includes a membrane that is conductive and deformable under pressure, fixed electrodes each including an electrode surface opposed to the membrane, and a dielectric film disposed on the electrode surface of each of the fixed electrodes. The fixed electrodes are disposed in a direction from the center of the membrane toward an outer portion.
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公开(公告)号：US20190204171A1
公开(公告)日：2019-07-04
申请号：US16296920
申请日：2019-03-08
申请人： DENSO CORPORATION
发明人： Akira INABA , Minoru MURATA
CPC分类号： G01L9/0051 , B81B7/0048 , B81B2201/0264 , B81B2203/0127 , G01L9/00 , G01L13/06 , H01L29/84
摘要： A pressure sensor may include a sensor chip and a support member. The sensor chip may include a diaphragm and an inner space. The diaphragm may have a thin plate shape. The diaphragm may be bent in a thickness direction by a fluid pressure. The inner space may be provided by a space adjacent to the diaphragm in the thickness direction. The support member may support the sensor chip at a position separated from the diaphragm. An outer shape of the sensor chip may be provided by a polygonal shape or a circular shape. An outer shape of the diaphragm may be provided by a polygonal shape or a circular shape.
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3.发明申请公开(公告)号：US20190128758A1
公开(公告)日：2019-05-02
申请号：US16094001
申请日：2017-04-13
发明人： Takuya AOYAGI , Takashi NAITOU , Tatsuya MIYAKE , Mizuki SHIBATA , Hiroshi ONUKI , Daisuke TERADA , Shigenobu KOMATSU
CPC分类号： G01L9/0048 , G01D21/00 , G01L9/00 , H01L24/29 , H01L24/30 , H01L24/33 , H01L24/83 , H01L29/84 , H01L2224/29188 , H01L2224/30505 , H01L2224/8389
摘要： Provided is a physical quantity measurement device in which a bonding temperature of a bonding layer is lowered to a temperature not affecting an operation of a semiconductor chip and an insulating property of the semiconductor chip and a base is secured. The physical quantity measurement device includes a base (diaphragm), a semiconductor chip (strain detection element) to measure a physical quantity on the basis of stress acting on the base, and a bonding layer to bond the semiconductor chip to the base. The bonding layer has a first bonding layer bonded to the semiconductor chip, a second bonding layer bonded to the base, and an insulating base material disposed between the first bonding layer and the second bonding layer. The first and second bonding layers and contain glass. A thermal expansion coefficient of the first bonding layer is equal to or lower than a thermal expansion coefficient of the second bonding layer, a softening point of the second bonding layer is equal to or lower than a heat resistant temperature of the semiconductor chip, and a softening point of the first bonding layer is equal to or lower than the softening point of the second bonding layer.
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公开(公告)号：US10073471B2
公开(公告)日：2018-09-11
申请号：US15004451
申请日：2016-01-22
发明人： Jan Derjong
摘要： A pneumatic control and measuring device and seat comfort system with such a device. The pneumatic control and measuring device includes a valve and a pressure sensor, wherein the valve includes an input channel, a pressure channel, an output channel and a sealing element switched or switchable by an actuator. The sealing element is configured to connect the input channel with the pressure channel in that a supply pressure provided in the compressed air supply channel is or can be provided at an output connection of the valve fluidically communicating with the pressure channel. A pressure sensor for capturing a pressure present at the output connection is a printed-circuit-board-integrated pressure sensor.
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公开(公告)号：US20180149543A1
公开(公告)日：2018-05-31
申请号：US15883984
申请日：2018-01-30
发明人： Christoph Klesse , Tobias Ritsch , Claus Stephani , Thomas Uliana
CPC分类号： G01L27/007 , F02D41/2096 , F02D41/2438 , F02D41/2474 , F02D2041/223 , F02D2041/224 , F02D2200/0602 , F02D2200/0604 , F02M57/005 , F02M63/0026 , G01L9/00
摘要： A method according to the invention for checking the plausibility of the function of a pressure sensor in an injection system of an internal combustion engine includes acquiring a calibrated actuation profile, by which peak current values for opening at least one electrically actuatable injection valve are assigned to existing internal pressures. An existing internal pressure is measured in the form of an actual sensor pressure value by the pressure sensor. The method includes obtaining the electrical peak current value corresponding to the measured sensor pressure value from a calibrated actuation profile, such that the corresponding electrical peak current value acquired in this way is applied to the injection valve. Subsequently, an opening state of the injection valve is monitored in reaction to the applied electrical peak current value, and a functional state of the pressure sensor is assigned as a function of the opening state of the injection valve.
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公开(公告)号：US09983081B2
公开(公告)日：2018-05-29
申请号：US15111494
申请日：2015-02-27
申请人： DENSO CORPORATION
发明人： Kazuyuki Oono
CPC分类号： G01L13/026 , G01L9/00 , G01L9/0041 , G01L9/0054 , G01L19/14 , H01L29/84
摘要： A pressure sensor includes: a first substrate having first and second diaphragms on one surface provided by first and second recesses on another surface; first and second detecting elements on the first and second diaphragms; a second substrate providing a first reference pressure chamber with the one surface of the first substrate; a third substrate providing a second reference pressure chamber sealing the second recess; and a calculator calculating an offset value by a difference between a reference signal and an inspection signal and detecting a pressure of a measurement medium by a difference between a detection signal and the offset value. The first detecting element outputs the detection signal or the inspection signal according to a pressure difference between a first reference pressure or a reference medium pressure and a measurement medium pressure in the first recess. The second detecting element outputs the reference signal according to a difference between the first reference pressure and and a second reference pressure.
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公开(公告)号：US09797812B2
公开(公告)日：2017-10-24
申请号：US13847255
申请日：2013-03-19
CPC分类号： G01M99/008 , B01D46/0086 , B01D46/429 , B01D46/442 , B01D2273/10 , G01L9/00 , G01N17/04 , G01N33/0004
摘要： Methods and systems for predicting a filter lifetime include building a filter effectiveness history based on contaminant sensor information associated with a filter; determining a rate of filter consumption with a processor based on the filter effectiveness history; and determining a remaining filter lifetime based on the determined rate of filter consumption. Methods and systems for increasing filter economy include measuring contaminants in an internal and an external environment; determining a cost of a corrosion rate increase if unfiltered external air intake is increased for cooling; determining a cost of increased air pressure to filter external air; and if the cost of filtering external air exceeds the cost of the corrosion rate increase, increasing an intake of unfiltered external air.
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公开(公告)号：US09759622B2
公开(公告)日：2017-09-12
申请号：US14035105
申请日：2013-09-24
申请人： UT-BATTELLE LLC
发明人： Ilia N. Ivanov , David B. Geohegan
CPC分类号： G01L19/00 , B82Y15/00 , B82Y30/00 , G01K7/00 , G01K7/021 , G01K7/028 , G01K7/18 , G01K2211/00 , G01L1/20 , G01L9/00 , G01L9/0001 , G01L9/0002 , G01L9/0005 , Y10S977/742 , Y10S977/955 , Y10S977/956
摘要： The present invention, in one embodiment, provides a method of measuring pressure or temperature using a sensor including a sensor element composed of a plurality of carbon nanotubes. In one example, the resistance of the plurality of carbon nanotubes is measured in response to the application of temperature or pressure. The changes in resistance are then recorded and correlated to temperature or pressure. In one embodiment, the present invention provides for independent measurement of pressure or temperature using the sensors disclosed herein.
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公开(公告)号：US20170190567A1
公开(公告)日：2017-07-06
申请号：US14984469
申请日：2015-12-30
发明人： Tung-Tsun Chen , Chia-Hua Chu
CPC分类号： B81B1/004 , B81B2201/025 , B81B2201/0264 , B81C1/00087 , B81C1/00309 , B81C2201/019 , G01L9/00
摘要： A micro-electro mechanical system (MEMS) pressure sensor includes a first substrate, a second substrate and a sensing structure. The second substrate is substantially parallel to the first substrate. The sensing structure is between the first substrate and the second substrate, and bonded to a portion of the first substrate and a portion of the second substrate, in which a first space between the first substrate and the sensing structure is communicated with outside, and a second space between the second substrate and the sensing structure is communicated with or isolated from the outside.
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10.发明申请公开(公告)号：US20160363553A1
公开(公告)日：2016-12-15
申请号：US15183259
申请日：2016-06-15
发明人： Alina Alexeenko , Andrew Strongrich
IPC分类号： G01N27/22
CPC分类号： G01L9/00 , G01L21/26 , G01N27/226
摘要： A microelectromechanical (MEMS) gas sensor operating based on Knudsen thermal force is disclosed. The sensor includes a substrate, at least one stationary assembly that is fixedly coupled to the substrate, and at least one moveable assembly that is positioned above the substrate which is biased to move substantially according to a main axis and juxtaposed with the at least one stationary assembly.
摘要翻译： 公开了基于Knudsen热力操作的微机电（MEMS）气体传感器。 所述传感器包括基底，固定地联接到所述基底的至少一个固定组件和位于所述基底上方的至少一个可移动组件，所述至少一个可移动组件被偏置以基本上沿着主轴线移动并且与所述至少一个固定 部件。
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