公开(公告)号：US20190165695A1

公开(公告)日：2019-05-30

申请号：US16263227

申请日：2019-01-31

Applicant: DENSO CORPORATION ,  University of Freiburg

Inventor： Kenta GODA ,  Oliver PAUL

IPC: H02N1/08 ,  B81B3/00 ,  H01G7/02 ,  H04R19/01

Abstract: The present disclosure provides a semiconductor device including a fixed electrode, a movable electrode and an elastic support. The movable electrode faces the fixed electrode and is movable relative to the fixed electrode. The elastic support supports the movable electrode to be movable in an elastic direction of the elastic support. Either one of the fixed electrode or the movable electrode is an electret electrode.

公开(公告)号：US20190296149A1

公开(公告)日：2019-09-26

申请号：US16439023

申请日：2019-06-12

Applicant: DENSO CORPORATION

Inventor： Tsuyoshi YAMAMOTO ,  Kenta GODA ,  Shunsuke HARADA ,  Yoshiaki NAKAYAMA

IPC: H01L29/78 ,  H01L29/06 ,  H01L29/10 ,  H01L29/40 ,  H01L29/739

Abstract: In a semiconductor device, a trench is continuously connected to reach a main cell region and a sense cell region, and a shield electrode and a gate electrode layer are continuously connected to reach the main cell region and the sense cell region within the trench. The shield electrode extends to a side of the main cell region away from the sense cell region on one end side of the trench in a longitudinal direction to be electrically connected to an upper electrode. The gate electrode layer extends to a side of the main cell region away from the sense cell region on the other end side of the trench in the longitudinal direction to be electrically connected to a gate liner.