公开(公告)号：US20220023972A1

公开(公告)日：2022-01-27

申请号：US17380635

申请日：2021-07-20

Applicant: DISCO CORPORATION

Inventor： Shungo YOSHII ,  Junichi KUKI ,  Kana AIDA

IPC: B23K26/36 ,  B23K26/06 ,  B23K26/142

Abstract: A laser processing apparatus includes a processing nozzle. The processing nozzle includes an upper wall having a laser beam passage port defined therein, a lower wall that is connected to a lower portion of a part of the upper wall and that includes a debris capturing chamber defined therein, a suction port defined between another part of the upper wall and the lower wall, a first air ejection port defined in the lower wall, for ejecting air across the debris capturing chamber toward the suction port in a predetermined direction perpendicular to an optical path of a laser beam, and a second air ejection port defined in the lower wall below the first air ejection port, for ejecting air in the predetermined direction. A flow rate of air ejected from the second air ejection port is smaller than a flow rate of air ejected from the first air ejection port.