公开(公告)号：US20170106471A1

公开(公告)日：2017-04-20

申请号：US15293587

申请日：2016-10-14

Applicant: DISCO CORPORATION

Inventor： Shungo Yoshii ,  Junichi Kuki ,  Kana Aida

IPC: B23K26/142 ,  B23K26/402 ,  B23K26/00 ,  B23K26/364

CPC classification number: B23K26/142 ,  B23K26/009 ,  B23K26/083 ,  B23K26/147 ,  B23K26/16 ,  B23K26/18 ,  B23K26/364 ,  B23K26/402 ,  B23K2101/40 ,  B23K2103/56

Abstract: A laser processing apparatus ablates the upper surface of a plate-shaped workpiece by using a laser beam passed through a water-soluble protective film formed on the upper surface of the plate-shaped workpiece. A nozzle applies the laser beam to the upper surface of the plate-shaped workpiece. The processing nozzle includes a debris capturing chamber for capturing debris scattering due to the application of the laser beam. A capturing space is defined in the debris capturing chamber, and an air discharge port and a suction port are opposed to each other in the capturing space. Air is discharged from the air discharge port toward the suction port so as to produce an air flow perpendicular to the optical path of the laser beam, so that the debris is sucked into the suction port by this air flow.