公开(公告)号：US20190206673A1

公开(公告)日：2019-07-04

申请号：US16216394

申请日：2018-12-11

Applicant: DISCO CORPORATION

Inventor： Shinya WATANABE ,  Ichiro YAMAHATA ,  Katsuhiko SUZUKI

IPC: H01L21/02 ,  H01L21/67 ,  H01L21/78 ,  H01L21/687 ,  B24B53/017

CPC classification number: H01L21/02013 ,  B24B53/017 ,  H01L21/67092 ,  H01L21/6715 ,  H01L21/68764 ,  H01L21/78

Abstract: A workpiece processing method includes a resin coating step of coating a resin on a front surface of a workpiece, a resin curing step of applying an ultraviolet ray to the coated resin to be cured, a resin grinding step of grinding the cured resin with grinding stones to be flattened, and a workpiece grinding step of holding the flattened resin side of the workpiece on a chuck table and grinding the back surface of the workpiece with grinding stones. In the resin grinding step, grinding is performed while cleaning the resin stuck to the grinding stones. Accordingly, it is possible to grind the resin coated on the front surface of the workpiece and the back surface of the workpiece in the same apparatus.

公开(公告)号：US20190198357A1

公开(公告)日：2019-06-27

申请号：US16216291

申请日：2018-12-11

Applicant: DISCO CORPORATION

Inventor： Shinya WATANABE ,  Ichiro YAMAHATA ,  Katsuhiko SUZUKI

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/78 ,  H01L21/66

CPC classification number: H01L21/6715 ,  H01L21/67092 ,  H01L21/67253 ,  H01L21/6773 ,  H01L21/78 ,  H01L22/12

Abstract: A workpiece processing apparatus which coats a front surface of a workpiece with a resin, the workpiece having devices formed in regions demarcated by a plurality of planned dividing lines formed in a lattice manner. The workpiece processing apparatus includes a cassette mounting base mounted with a cassette housing a plurality of workpieces, a resin coating unit that coats the front surface of the workpiece with the resin, a resin curing unit that cures the resin by applying an external stimulus to the coated resin, a resin grinding unit that flattens the cured resin by grinding the cured resin by a rotating grinding stone, and a conveying mechanism that conveys the workpiece between the units.