公开(公告)号：US20190011248A1

公开(公告)日：2019-01-10

申请号：US15979645

申请日：2018-05-15

申请人： DMG MORI CO., LTD.

发明人： Hideaki TAMIYA ,  Kazuki NODA

IPC分类号： G01B9/02 ,  G02B27/42 ,  G02B27/28 ,  G02B27/14

CPC分类号： G01B9/02041 ,  G01B9/02011 ,  G01B9/02018 ,  G01B9/02019 ,  G01B9/02027 ,  G01B9/021 ,  G01B2290/20 ,  G01B2290/70 ,  G02B27/14 ,  G02B27/283 ,  G02B27/4233 ,  G02B27/4277

摘要： A displacement detecting device includes a first diffraction grating, a light source, a displacement detecting unit, and a light receiving unit. The displacement detecting unit includes a light flux dividing unit, a second diffraction grating, and a reference reflecting member. An incident angle of a first light flux to the first diffraction grating, a diffraction angle of the first diffraction grating, an incident angle of the first light flux to the second diffraction grating, and a diffraction angle of the second diffraction grating are angles at which a displacement amount in an optical path length of the first light flux from the light flux dividing unit to the first diffraction grating and a displacement amount in an optical path length of the first light flux from the first diffraction grating to the second diffraction grating become equal in a case where a measured member is displaced in a direction orthogonal to a measured surface.