公开(公告)号：US11933609B2

公开(公告)日：2024-03-19

申请号：US17644933

申请日：2021-12-17

Applicant: YOKOGAWA ELECTRIC CORPORATION ,  Yokogawa Test & Measurement Corporation

Inventor： Nobuhide Yamada

IPC: G01B9/02001 ,  G01B9/02 ,  G01J9/02

CPC classification number: G01B9/02011 ,  G01J9/0246 ,  G01B9/02051 ,  G01B2290/20 ,  G01B2290/45 ,  G01B2290/70 ,  G01J2009/0265

Abstract: The interferometer 10 according to this disclosure includes: a first optical component 12 that splits each of the P polarization component and the S polarization component of the light to be measured into the first optical path R1 and the second optical path R2 and combines the light to be measured; a second optical component 13 placed in the first optical path; a third optical component 14 that splits the light to be measured into the P polarization component and the S polarization component; and a P polarization detector 11a and an S polarization detector 11b that respectively detect the P polarization component and the S polarization component split by the third optical component, wherein the second optical component has an optical surface that changes the propagation direction of the light to be measured and gives a phase difference between the P polarization component and the S polarization component.

公开(公告)号：US20150043006A1

公开(公告)日：2015-02-12

申请号：US14450376

申请日：2014-08-04

Applicant: Zygo Corporation

Inventor： Peter J. de Groot

IPC: G01B9/02

CPC classification number: G01B9/0209 ,  G01B9/02069 ,  G01B11/2441 ,  G01B2290/20

Abstract: An interferometry system includes: a light source, defining a coherence length, an interferometer configured to combine measurement and reference beams to form an output beam, where the interferometer includes a dispersion imbalance between measurement and reference paths large enough to produce a coherence envelope for the system having a width more than twice the coherence length; a phase modulation device configured to introduce a variable phase between the measurement and reference beams; a detector; imaging optics to direct the output beam to the detector and produce an image of the measurement surface; and an electronic processor electronically coupled to the phase modulation device and the detector and configured to record multiple interference signals corresponding to different locations on the measurement surface, in which the interference signals are based on the intensity of the output beam as a function of the variable phase for the different locations of the measurement surface.

Abstract translation: 干涉测量系统包括：定义相干长度的光源，被配置为组合测量和参考光束以形成输出光束的干涉仪，其中干涉仪包括足够大的测量和参考路径之间的色散不平衡，以产生用于 系统的宽度大于相干长度的两倍; 相位调制装置，被配置为在所述测量参考光束和所述参考光束之间引入可变相位; 检测器 成像光学器件将输出光束引导到检测器并产生测量表面的图像; 以及电子处理器，其电耦合到所述相位调制装置和所述检测器并且被配置为记录对应于所述测量表面上的不同位置的多个干涉信号，其中所述干扰信号基于作为所述变量的函数的所述输出光束的强度 测量表面的不同位置的相位。

公开(公告)号：US08094292B2

公开(公告)日：2012-01-10

申请号：US12561534

申请日：2009-09-17

Applicant: Yongwoo Park ,  Marco Peccianti ,  José Azana

Inventor： Yongwoo Park ,  Marco Peccianti ,  José Azana

IPC: G01C3/08

CPC classification number: G01B9/0209 ,  G01B9/02028 ,  G01B2290/20 ,  G01J3/453 ,  G01S7/481 ,  G01S17/08

Abstract: An interferometric method and system enabling light echoes-to-spectrum mapping, applicable for laser rangefinder, biomedical imaging including surface 3D mapping and tomography, vehicle position identification, and spectrum analysis. The direct mapping into spectrum allows a time-of-flight detection without using any timing pulse modulation. The sensitivity of the detection can be as high as that of the conventional low coherence interferometry, thereby an eye-safe and low-cost solution not compromising performance. In a practical implementation, high accurate range detection can be easily achievable with the level of accuracy equivalent to the laser rangefinder using a 20 ps Full-Width-at-Half-Maximum (FWHM) timing pulse. The system and method comprise applying dispersion-unbalanced interference (referred to as ‘cross-chirp interference’) and gating a phase matched spectral component. The dispersion unbalance used to induce linear one-to-one correspondence between the relative time delay and the spectral component, the performances in terms of range and resolution of the system and method increase with the increase in dispersion unbalance.

Abstract translation: 一种能够实现光回波到光谱映射的干涉测量方法和系统，适用于激光测距仪，生物医学成像，包括表面3D映射和层析成像，车辆位置识别和频谱分析。 直接映射到频谱中可以进行飞行时间检测，而不使用任何定时脉冲调制。 检测的灵敏度可以与传统的低相干干涉测量的灵敏度一样高，从而不会影响性能的眼睛安全且低成本的解决方案。 在实际实现中，通过使用20 ps全宽半最大（FWHM）定时脉冲的等效于激光测距仪的精度水平，可以很容易地实现高精度范围检测。 该系统和方法包括应用色散不平衡干扰（称为“交叉啁啾干扰”）并选通相位匹配的光谱分量。 用于在相对时间延迟和光谱分量之间诱导线性一对应对应的色散不平衡，系统和方法的范围和分辨率方面的性能随着色散不平衡的增加而增加。

公开(公告)号：US07602502B2

公开(公告)日：2009-10-13

申请号：US12216106

申请日：2008-06-30

Applicant: Stefan Schulte ,  Ulrich Andiel

Inventor： Stefan Schulte ,  Ulrich Andiel

IPC: G01B11/02

CPC classification number: G01B9/02039 ,  G01B9/02057 ,  G01B11/2441 ,  G01B2290/20 ,  G01M11/0264 ,  G01M11/0271

Abstract: A method of manufacturing an optical element having an optical surface of a non-rotationally symmetric shape is described. Measuring light is generated using an interferometer optics, wherein the interferometer optics has at least one diffractive component having a grating. The optical surface is positioned at a first position relative to the diffractive component, wherein first measuring light diffracted at the diffractive component is incident on the optical surface at plural locations thereof, and at least one first interference pattern generated from first measuring light reflected from the optical surface is detected. The optical surface is positioned at a second position relative to the at least one diffractive component, wherein second measuring light diffracted at the diffractive component is incident on the optical surface at plural locations thereof, and at least one second interference pattern generated from second measuring light reflected from the optical surface is detected.

Abstract translation: 描述了具有非旋转对称形状的光学表面的光学元件的制造方法。 使用干涉仪光学器件生成测量光，其中干涉仪光学器件具有至少一个具有光栅的衍射元件。 光学表面位于相对于衍射部件的第一位置处，其中在衍射部件处衍射的第一测量光在其多个位置处入射到光学表面上，并且从第一测量光产生的至少一个第一干涉图案从 检测光学表面。 光学表面位于相对于至少一个衍射部件的第二位置，其中在衍射部件处衍射的第二测量光在其多个位置处入射到光学表面上，并且从第二测量光产生的至少一个第二干涉图案 检测从光学表面反射的光。

公开(公告)号：US07518729B2

公开(公告)日：2009-04-14

申请号：US11731052

申请日：2007-03-30

Applicant: Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

Inventor： Pawel Drabarek ,  Stefan Franz ,  Matthias Fleischer

IPC: G01B9/02

CPC classification number: G01B9/0209 ,  G01B9/02065 ,  G01B2290/20

Abstract: An interferometric measuring device includes a short-coherent radiation source and a system composed of a modulation interferometer having a first and a second modulation interferometer beam path and a downstream reference interferometer, the radiation being split in the reference interferometer into a first beam path and a second beam path. If a dispersive optical component is situated in at least one beam path of the reference interferometer, a different optical path length becomes effective for radiation of a different wavelength in the beam path having the dispersive optical component. Therefore, if one measuring probe is replaced with another one having a modified optical path length, the modulation interferometer may be adjusted and the reference interferometer may remain unchanged. The reference interferometer may thus be used over an extended adjustment path of the modulation interferometer without optical components having to be replaced for adjusting the different path difference of measuring probes in the reference interferometer.

Abstract translation: 干涉测量装置包括短相干辐射源和由具有第一和第二调制干涉仪光束路径和下游参考干涉仪的调制干涉仪组成的系统，所述辐射在参考干涉仪中分裂为第一光束路径和 第二光束路径。 如果色散光学部件位于参考干涉仪的至少一个光束路径中，则具有分散光学部件的光束路径中不同光程长度对于不同波长的辐射是有效的。 因此，如果一个测量探针被具有修改的光程长度的另一个测量探头所替代，则可以调整调制干涉仪并且参考干涉仪可以保持不变。 因此，参考干涉仪可以在调制干涉仪的扩展调整路径上使用，而不需要替换光学组件来调整参考干涉仪中的测量探针的不同路径差。

公开(公告)号：US20070064241A1

公开(公告)日：2007-03-22

申请号：US11519037

申请日：2006-09-11

Applicant: David Needham

Inventor： David Needham

IPC: G01B11/02

CPC classification number: G01B9/0209 ,  G01B9/02083 ,  G01B11/14 ,  G01B2290/20 ,  G01B2290/25

Abstract: An algorithm and method for calculating an interferometric gap is disclosed that comprises providing an interferometric sensor having a first gap and an interferometric correlation element having a second gap placed in series with the first gap. A correlation burst waveform is generated having a plurality of features wherein the shape of the burst waveform evolves across the range of the second gap. Means are provided for tracking the features across the entire range of gaps and determining the dominant peak or dominant valley to determine the first gap.

Abstract translation: 公开了一种用于计算干涉间隙的算法和方法，其包括提供具有第一间隙的干涉测量传感器和具有与第一间隙串联放置的第二间隙的干涉相关元件。 产生具有多个特征的相关突发波形，其中突发波形的形状在第二间隙的范围内演变。 提供了用于跟踪整个间隙范围内的特征的装置，并且确定主峰或主谷以确定第一间隙。

公开(公告)号：US06351307B1

公开(公告)日：2002-02-26

申请号：US09511411

申请日：2000-02-23

Applicant: David J. Erskine

Inventor： David J. Erskine

IPC: G01B902

CPC classification number: G01P15/16 ,  G01B9/02023 ,  G01B9/02028 ,  G01B9/02044 ,  G01B9/02045 ,  G01B9/0209 ,  G01B2290/10 ,  G01B2290/20 ,  G01B2290/25 ,  G01J3/2823 ,  G01J3/45 ,  G01J3/453 ,  G01J9/04 ,  G01J2005/583 ,  G01P3/36 ,  G01S11/12

Abstract: A method of measuring the spectral properties of broadband waves that combines interferometry with a wavelength disperser having many spectral channels to produce a fringing spectrum. Spectral mapping, Doppler shifts, metrology of angles, distances and secondary effects such as temperature, pressure, and acceleration which change an interferometer cavity length can be measured accurately by a compact instrument using broadband illumination. Broadband illumination avoids the fringe skip ambiguities of monochromatic waves. The interferometer provides arbitrarily high spectral resolution, simple instrument response, compactness, low cost, high field of view and high efficiency. The inclusion of a disperser increases fringe visibility and signal to noise ratio over an interferometer used alone for broadband waves. The fringing spectrum is represented as a wavelength dependent 2-d vector, which describes the fringe amplitude and phase. Vector mathematics such as generalized dot products rapidly computes average broadband phase shifts to high accuracy. A Moire effect between the interferometer's sinusoidal transmission and the illumination heterodynes high resolution spectral detail to low spectral detail, allowing the use of a low resolution disperser. Multiple parallel interferometer cavities of fixed delay allow the instantaneous mapping of a spectrum, with an instrument more compact for the same spectral resolution than a conventional dispersive spectrometer, and not requiring a scanning delay.

Abstract translation: 测量宽带波的光谱性质的方法，其将干涉测量与具有许多光谱通道的波长分散器组合以产生边缘光谱。 可以通过使用宽带照明的紧凑型仪器，精确地测量光谱映射，多普勒频移，角度，距离和二次效应（如改变干涉仪腔长度的温度，压力和加速度）。 宽带照明避免了单色波的边缘跳跃模糊。 干涉仪提供任意高的光谱分辨率，简单的仪器响应，紧凑性，低成本，高视野和高效率。 分散器的包含增加了单独用于宽带波的干涉仪的边缘可见度和信噪比。 边缘光谱表示为波长相关的2-d矢量，其描述条纹幅度和相位。 矢量数学，如广义点产品可以快速计算平均宽带相移到高精度。 干涉仪的正弦波传播与照明外差高分辨率光谱细节之间的莫尔效应可以降低光谱细节，允许使用低分辨率分散器。 具有固定延迟的多个并行干涉仪腔允许频谱的瞬时映射，与常规色散光谱仪相比，仪器更紧凑，并且不需要扫描延迟。

公开(公告)号：US20010036002A1

公开(公告)日：2001-11-01

申请号：US09880120

申请日：2001-06-13

Inventor： Guillermo Tearney ,  Brett E. Bouma ,  James G. Fujimoto

IPC: G02F001/23 ,  G02F001/01 ,  G02F001/11

CPC classification number: B82Y15/00 ,  A61B1/00096 ,  A61B1/00172 ,  A61B1/00183 ,  A61B3/1005 ,  A61B3/102 ,  A61B5/0064 ,  A61B5/0066 ,  A61B5/0084 ,  A61B5/441 ,  A61B5/6852 ,  A61B2562/0242 ,  G01B9/02002 ,  G01B9/02091 ,  G01B11/00 ,  G01B11/002 ,  G01B11/026 ,  G01B11/12 ,  G01B11/2441 ,  G01B2290/20 ,  G01B2290/35 ,  G01J1/00 ,  G01N21/4795 ,  G02B5/1828 ,  G02B26/06 ,  G02B27/4233 ,  G02B27/4244 ,  G02B27/4255 ,  G11B7/005 ,  G11B7/08564 ,  G11B7/127 ,  G11B7/1353 ,  G11B7/24 ,  G11B2007/0013 ,  H01S5/141

Abstract: An apparatus for performing high speed scanning of an optical delay and its application for performing optical interferometry, ranging, and imaging, including cross sectional imaging using optical coherence tomography, is disclosed. The apparatus achieves optical delay scanning by using diffractive optical elements in conjunction with imaging optics. In one embodiment a diffraction grating disperses an optical beam into different spectral frequency or wavelength components which are collimated by a lens. A mirror is placed one focal length away from the lens and the alteration of the grating groove density, the grating input angle, the grating output angle, and/or the mirror tilt produce a change in optical group and phase delay. This apparatus permits the optical group and phase delay to be scanned by scanning the angle of the mirror. In other embodiments, this device permits optical delay scanning without the use of moving parts.

Abstract translation: 公开了一种用于执行光学延迟的高速扫描的装置及其用于执行光学干涉测量，测距和成像的应用，包括使用光学相干断层摄影的横截面成像。 该装置通过使用衍射光学元件结合成像光学器件实现光学延迟扫描。 在一个实施例中，衍射光栅将光束分散成由透镜准直的不同的光谱频率或波长分量。 镜子放置一个远离镜头的焦距，并且光栅槽密度，光栅输入角度，光栅输出角度和/或镜面倾斜度的变化产生光学组和相位延迟的变化。 该装置允许通过扫描反射镜的角度来扫描光学组和相位延迟。 在其他实施例中，该装置允许光学延迟扫描而不使用移动部件。

公开(公告)号：US20190011248A1

公开(公告)日：2019-01-10

申请号：US15979645

申请日：2018-05-15

Applicant: DMG MORI CO., LTD.

Inventor： Hideaki TAMIYA ,  Kazuki NODA

IPC: G01B9/02 ,  G02B27/42 ,  G02B27/28 ,  G02B27/14

CPC classification number: G01B9/02041 ,  G01B9/02011 ,  G01B9/02018 ,  G01B9/02019 ,  G01B9/02027 ,  G01B9/021 ,  G01B2290/20 ,  G01B2290/70 ,  G02B27/14 ,  G02B27/283 ,  G02B27/4233 ,  G02B27/4277

Abstract: A displacement detecting device includes a first diffraction grating, a light source, a displacement detecting unit, and a light receiving unit. The displacement detecting unit includes a light flux dividing unit, a second diffraction grating, and a reference reflecting member. An incident angle of a first light flux to the first diffraction grating, a diffraction angle of the first diffraction grating, an incident angle of the first light flux to the second diffraction grating, and a diffraction angle of the second diffraction grating are angles at which a displacement amount in an optical path length of the first light flux from the light flux dividing unit to the first diffraction grating and a displacement amount in an optical path length of the first light flux from the first diffraction grating to the second diffraction grating become equal in a case where a measured member is displaced in a direction orthogonal to a measured surface.

公开(公告)号：US09945655B2

公开(公告)日：2018-04-17

申请号：US14651983

申请日：2013-12-12

Applicant: University of Huddersfield

Inventor： Jiang Xiang ,  Haydn Martin

IPC: G01B9/02

CPC classification number: G01B9/02028 ,  G01B9/02 ,  G01B9/02078 ,  G01B9/0209 ,  G01B2290/20

Abstract: An interferometer apparatus comprising: a short coherence length or broadband light source; a light director to direct light from the light source along a measurement path to a surface of a sample and also along a reference path to a reference surface; a wavelength disperser to cause wavelength dispersion of light along one of the measurement and the reference paths; a combiner to cause light from the sample surface and light from the reference surface to produce an interference pattern or interferogram; a detect—or to detect intensity values of the interference pattern as a function of wavelength; and a determiner to determine from the detected intensity values the wavelength at which the measurement and reference paths are balanced, wherein the wavelength disperser is at least one of: a grating wavelength disperser, a prism wavelength disperser, and an optical dispersive medium.