APPARATUS AND METHOD FOR SIMULTANEOUSLY PERFORMING DELAMINATION AND ADHESION PROCESSES

    公开(公告)号:US20180222175A1

    公开(公告)日:2018-08-09

    申请号:US15887038

    申请日:2018-02-02

    Abstract: The present invention relates to an apparatus and a method for simultaneously performing delamination and adhesion processes. The apparatus which simultaneously performs delamination and adhesion processes includes: a lower stage configured to suction and fix a carrier substrate on which a first workpiece is adhered; and an upper stage including a curved main body configured to suction and fix a second workpiece and formed in a shape convex toward the first workpiece, and a driving portion configured to rotate the curved main body such that predetermined portions of the second workpiece sequentially come into contact with corresponding predetermined portions of the first workpiece at a predetermined pressure, adhere the second workpiece to the first workpiece, and delaminate the first workpiece from the carrier substrate during an adhesion process. According to the present invention, the required number of detailed processes and a process time are decreased, a yield is increased, and deformation of a workpiece due to a residual stress generated during the adhesion and delamination processes is minimized by the adhesion and delamination processes being performed simultaneously.

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