METHOD FOR FORMING A MICROSTRUCTURE
    1.
    发明申请
    METHOD FOR FORMING A MICROSTRUCTURE 失效
    形成微结构的方法

    公开(公告)号:US20120114903A1

    公开(公告)日:2012-05-10

    申请号:US13231863

    申请日:2011-09-13

    IPC分类号: B32B3/00 G03F7/20

    CPC分类号: G03F7/027 G03F7/203 G03F7/26

    摘要: A method for forming a microstructure includes: (a) forming a photocurable layer on a substrate, the photocurable layer including at least one photocurable compound that has a photocurable functional group equivalent weight ranging from 70 to 700 g/mol; (b) covering partially the photocurable layer using a patterned mask; (c) exposing the photocurable layer through the patterned mask using a first light source so that the photocurable layer is cured at first regions which are exposed; (d) removing the patterned mask; and (e) illuminating the photocurable layer using a second light source to cure second regions of the photocurable layer which have not been cured. The first and second regions have different surface heights and provide a surface roughness for the microstructure.

    摘要翻译: 形成微结构的方法包括:(a)在基材上形成光固化层,所述光固化层包含至少一种光固化性的化合物,其光固化官能团当量为70-700g / mol; (b)使用图案化的掩模部分地覆盖光固化层; (c)使用第一光源使可光固化层通过图案化掩模曝光,使得可光固化层在暴露的第一区域固化; (d)去除图案化掩模; 和(e)使用第二光源照射光固化层以固化未固化的光固化层的第二区域。 第一和第二区域具有不同的表面高度并为微观结构提供表面粗糙度。

    Method for forming a microstructure
    2.
    发明授权
    Method for forming a microstructure 失效
    微结构形成方法

    公开(公告)号:US08703409B2

    公开(公告)日:2014-04-22

    申请号:US13231863

    申请日:2011-09-13

    IPC分类号: G03F7/26

    CPC分类号: G03F7/027 G03F7/203 G03F7/26

    摘要: A method for forming a microstructure includes: (a) forming a photocurable layer on a substrate, the photocurable layer including at least one photocurable compound that has a photocurable functional group equivalent weight ranging from 70 to 700 g/mol; (b) covering partially the photocurable layer using a patterned mask; (c) exposing the photocurable layer through the patterned mask using a first light source so that the photocurable layer is cured at first regions which are exposed; (d) removing the patterned mask; and (e) illuminating the photocurable layer using a second light source to cure second regions of the photocurable layer which have not been cured. The first and second regions have different surface heights and provide a surface roughness for the microstructure.

    摘要翻译: 形成微结构的方法包括:(a)在基材上形成光固化层,所述光固化层包含至少一种光固化性的化合物,其光固化官能团当量为70-700g / mol; (b)使用图案化掩模部分地覆盖光固化层; (c)使用第一光源使可光固化层通过图案化掩模曝光,使得可光固化层在暴露的第一区域固化; (d)去除图案化掩模; 和(e)使用第二光源照射光固化层以固化未固化的光固化层的第二区域。 第一和第二区域具有不同的表面高度并为微观结构提供表面粗糙度。