公开(公告)号：US06651506B2

公开(公告)日：2003-11-25

申请号：US10100826

申请日：2002-03-15

申请人： Dae-Sung Lee ,  Hyo-Derk Park ,  Kyoung-II Lee ,  Yoo-Jin Lee ,  Yeon-Shik Choi

发明人： Dae-Sung Lee ,  Hyo-Derk Park ,  Kyoung-II Lee ,  Yoo-Jin Lee ,  Yeon-Shik Choi

IPC分类号： G01L912

CPC分类号： G01L9/0042 ,  G01L9/0073

摘要： A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so that the diaphragm displaces upward and downward in response to a pressure stimulus. A first capacitor is provided on the diaphragm and at least a second capacitor is provided on a bulk portion of the substrate so as to be adjacent to the first capacitor. The first and the second capacitor are connected to each other in series, wherein capacitance differs between the first and the second capacitor when the diaphragm moves up and down in response to the pressure stimulus.

摘要翻译： 使用两个用于测量压力刺激的电容器的压力传感器包括具有位于其中心部分的隔膜的基板。 隔膜具有减小的厚度，使得隔膜响应于压力刺激而向上和向下移动。 第一电容器设置在隔膜上，并且至少第二电容器设置在基板的主体部分上以便与第一电容器相邻。 第一和第二电容器彼此串联连接，其中当隔膜响应于压力刺激而上下移动时，第一和第二电容器之间的电容不同。

公开(公告)号：US06558878B1

公开(公告)日：2003-05-06

申请号：US09585182

申请日：2000-06-01

申请人： Hyo-Derk Park ,  Suk-Won Jung ,  Kwang-Bum Park ,  In-Hoe Kim ,  Hyun-Chan Moon ,  Kun-Nyun Kim ,  Soon-Sup Park ,  Sang-Mo Shin

发明人： Hyo-Derk Park ,  Suk-Won Jung ,  Kwang-Bum Park ,  In-Hoe Kim ,  Hyun-Chan Moon ,  Kun-Nyun Kim ,  Soon-Sup Park ,  Sang-Mo Shin

IPC分类号： G03F700

CPC分类号： G03F7/7035 ,  G02B3/0012 ,  G03F7/0005 ,  G03F7/0017 ,  G03F7/201 ,  G03F7/2039 ,  Y10S430/167

摘要： Disclosed is a microlens manufacturing method which comprises the step of: positioning a X-ray mask for manufacturing the microlens on an substrate on which a sensitive film is formed, and arranging a rotation axis of the substrate and a central axis of the X-ray mask; applying X-rays to the X-ray mask to expose the sensitive film while fixing the X-ray mask and rotating the substrate; developing the sensitive film to form the microlens; performing an electroplating process on the plating base to form a metal layer; and separating the metal layer from the sensitive film structure and combining the metal layer with a mold frame for injection molding the microlens and manufacturing an injection mold.

摘要翻译： 公开了一种微透镜制造方法，其包括以下步骤：将用于制造微透镜的X射线掩模定位在其上形成敏感膜的基板上，并且布置基板的旋转轴线和X射线的中心轴线 面具; 将X射线施加到X射线掩模以在固定X射线掩模并旋转衬底的同时曝光敏感膜; 开发敏感膜以形成微透镜; 在电镀基底上进行电镀工艺以形成金属层; 并且将金属层与敏感膜结构分离，并将金属层与用于注射成型微透镜并制造注塑模的模架相结合。