公开(公告)号：US06504118B2

公开(公告)日：2003-01-07

申请号：US09984289

申请日：2001-10-29

申请人： Daniel J Hyman ,  Mark K Hyman ,  Peter D Bogdanoff

发明人： Daniel J Hyman ,  Mark K Hyman ,  Peter D Bogdanoff

IPC分类号： H01H5700

CPC分类号： H01H1/0036 ,  H01H57/00 ,  H01H61/00 ,  H01H2001/0063 ,  H01H2057/006 ,  H01H2061/006

摘要： This invention is a new type of relay that incorporates the functional combination of multimorph actuator elements with electrostatic state holding mechanisms in the development of a micromachined switching device. This combination of elements provides the benefits of high-force multimorph actuators with those of zero-power electrostatic capacitive latching in microfabricated relays with high reliability and low power consumption. The operation of the relay invention allows for several stable states for the device: a passive state using no power, an active state driving the multimorph actuator with some power, and a latched state electrostatically holding the switch state requiring essentially no power. Multimorph actuators covered by this invention include piezoelectric, thermal, and buckling multimorph actuation mechanisms. These devices use one or more sets of actuator armatures in cantilever or fixed-beam configurations, and use one or more sets of electrostatic latch electrodes for state holding.

公开(公告)号：US06483056B2

公开(公告)日：2002-11-19

申请号：US09984288

申请日：2001-10-29

申请人： Daniel J Hyman ,  Mark K Hyman ,  Peter D Bogdanoff

发明人： Daniel J Hyman ,  Mark K Hyman ,  Peter D Bogdanoff

IPC分类号： H01H5700

CPC分类号： H01H1/0036 ,  H01G5/18 ,  H01G5/38 ,  H01G5/40 ,  H01H57/00 ,  H01H61/00 ,  H01H2001/0063 ,  H01H2057/006 ,  H01H2061/006

摘要： This invention is a new type of relay that incorporates the functional combination of multimorph actuator elements with electrostatic state holding mechanisms in the development of a micromachined switching device. This combination of elements provides the benefits of high-force multimorph actuators with those of zero-power electrostatic capacitive latching in microfabricated relays with high reliability and low power consumption. The operation of the relay invention allows for several stable states for the device: a passive state using no power, an active state driving the multimorph actuator with some power, and a latched state electrostatically holding the switch state requiring essentially no power. Multimorph actuators covered by this invention include piezoelectric, thermal, and buckling multimorph actuation mechanisms. These devices use one or more sets of actuator armatures in cantilever or fixed-beam configurations, and use one or more sets of electrostatic latch electrodes for state holding.

摘要翻译： 本发明是一种新型的继电器，其结合了在微加工开关装置的开发中具有静电状态保持机构的多压电晶片致动器元件的功能组合。 这种元件组合提供了高强度多压电致动器与具有高可靠性和低功耗的微型继电器中的零功率静电电容闭锁的优点。 继电器发明的操作允许器件的几种稳定状态：不使用电源的无源状态，驱动具有一定功率的多压电晶片致动器的有源状态以及静态地保持开关状态而基本上不需要功率的锁存状态。 本发明涵盖的多压电致动器包括压电，热和屈曲多压电致动机构。 这些装置以悬臂或固定梁构造使用一组或多组致动器电枢，并且使用一组或多组静电闩锁电极进行状态保持。